Ulvac UTM300B, Instruction Manual

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OPERATION
6.1 Overview
6.1.1 Introduction : Operation Modes
6.2 Startup Preparation
6.2.1 Start-up Preparation Sequence in LOCAL Mode
6.2.2 Start-up Preparation Sequence in logic interface
6.2.3 Start-up Preparation Sequence in RS-485 communication
6.3 Start-up
6.3.1 Start-up Sequence in LOCAL Mode
6.3.2 Start-up Sequence in logic interface
6.3.3 Start-up Sequence in RS-485 communication
6.4 Shutting Down
6.4.1 Preparations Prior to Shutting Down Operation
6.4.2 Shutting Down Sequence in LOCAL Mode
6.4.3 Shutting Down Sequence in logic interface
6.4.4 Shutting Down Sequence in RS-485 communication
6.5 Variable Speed Operation
6.5.1 Outline
6.5.2 Operation from Start-up to Low Speed Rotation
6.5.3 Operation From Rated Speed Rotation to Low Speed Rotation
6.5.4 Operation from Low Speed Rotation to Rated Speed Rotation
6.6 Software Operation
6.7 Interface Connector
6.7.1 Specification
6.7.2 Pin Assignment
6.7.3 Connector
6.7.4 Setting for Interface Connector Operation
6.7.5 Delay Venting Mode
6.8 RS-485 Communication Specifications
6.8.1 Transfer Specifications
6.8.2 CABLE
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