Ulvac UTM300B, Instruction Manual

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18
SECTION 4 SPECIFICATIONS
4.1
Specification
4.1.1 Pump Main Unit
Turbo molecular pump model UTM300B
Cooling method Convection Forced air by cooling fan
Ultimate pressure
After baking
Non-baking
(Note 1)
10
-6
Pa order
10
-8
Pa order (Note 2)
10
-6
Pa order
Pumping speed
(Note 3)
N
2
He
H
2
280 L/s
270 L/s
220 L/s
280 L/s
270 L/s
220 L/s
Compression ratio
N
2
He
H
2
＞
1×10
9
7×10
6
1×10
5
Critical backing pressure 1500 Pa
Maximum allowable
inlet pressure
(Note 4) (Note 5)
N
2
0.06 Pa
(ambient : 25 degrees C.)
Refer to Section 4.2
0.7 Pa
(ambient : 25 degrees C.)
Refer to Section 4.2
Maximum allowable
outlet pressure
(Note 4) (Note 6)
N
2
100 Pa
(ambient : 25 degrees C.)
Refer to Section 4.3
1000 Pa
(ambient : 25 degrees C.)
Refer to Section 4.3
Maximum allowable flow rate Refer to Section 4.4 Refer to Section 4.4
Mass
VG,ISO 6 kg 6.3 kg
ICF 9 kg 9.3 kg
Bearing type Permanent magnetic bearing and ceramic ball bearing
Inlet flange VG100,ICF152,ISO100-K
Outlet flange KF16
Rated speed 60000 rpm
Start-up time (> 80 %) 3.5 mimutes (Note 7)
Allowable gas (Note 8) N
2
,He, H
2
,Ar
Mounting position In any desired direction
Noise (by ULVAC's method)
(Note 9)
50 dB(A) or less
Admissible ambient
magnetic field
Radial direction
Axial direction
3 mT
15 mT
(Note 1) Only pumps with ICF flange and with cooling fan can be baked.
(Note 2) When backed by two-stage oil-sealed rotary pump.
(Note 3) Without a protective net. Pumping speed for N
2
is 260 L/s with a protective net.