Ulvac UTM300B, Instruction Manual

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5.1 Installation
5.1.2.2 Installation
Refer to Fig. 5-3 for the method to fix the turbo molecular pump to host equipment.
When you fix the pump, use the bolts regulated grade, size, number and tightening torque
(Refer to Table 5-1 and Table 5-2). And use all the bolt-holes of the inlet flange of the pump.
Refer to Fig. 5-4 about usage of the bolt.
The sets of half-screw bolt and nut should be used to fix the inlet flange of the pump. Make
installation with the cylindrical part of the bolt (not screw part) fit in the mating section of flanges.
When you connect piping or valve between the chamber and the pump, please fix the same
method as the inlet flange.
Description Rapid shutdown torque (Note)
UTM300B
5400 N
・
m
(Note) Rapid shutdown torque is the typical value measured by the ULVAC’s test condition.
The torque to transmit to host equipment might be different according to the rigidity of
host equipment. Host equipment should be designed to have enough margins in strength.
Fig. 5-3 Installation of Turbo Molecular Pump