Ulvac UTM300B, Instruction Manual

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SECTION 6 OPERATION
6.4
Shutting Down
When reducing internal pressure of the turbo molecular pump up to around the atmospheric
pressure by use of inert gas, etc., adjust the pressure reducing valve so that the internal pressure
of the same pump does not exceed 20 kPa GAUGE.
For shut-down of the turbo molecular pump, follow the sequence below.
6.4.1 Preparations Prior to Shutting Down Operation
(1) Check that process gas inflow is in complete stop. When main valve is provided between
the turbo molecular pump and vacuum chamber, close the valve, too.
(2) When purge gas is being fed into the turbo molecular pump, stop the gas feed, too.
(3) When forevacuum valve is provided between the turbo molecular pump and backing
vacuum pump, close the valve, too.
6.4.2 Shutting Down Sequence in LOCAL Mode
(1) Maintained push the START/STOP button (Fig. 2-2 (1)) and check that the NORMAL lamp
(Fig. 2-2 (4)) blinks slowly.
(2) Wait until the NORMAL lamp goes out.
(3) Shut the power off.
6.4.3 Shutting Down Sequence in logic interface
(1) Input the "STOP" signal (Refer to Table 6-6) from the Interface connector.
If stop from "NORMAL" status, "NORMAL" signal is OFF.
(2) Wait until the analog output signal (rotation speed) to 0 V.
(3) Shut the power off.
CAUTION