vi
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Explanation of label
(1) HOT SURFACE Label
Risk of burn. Keep off from touching surface of the
pump as it is heated.
(2) Pump Securement Label
If the pump is not secured properly, it could
become detached and cause injury or damage to
surrounding equipment. Be sure to secure the
pump according to 5.1.2 "Installation of the Pump".
(3) Do Not Remove Label
Do not remove cover, or else it may cause
somechanges inside and it is failed.
(4) SECURITY seal
This label certificates that the product was made
or maintenanced by ULVAC or by ULVAC
authorized facility. In case "this label is removed"
or "there is a mark showing once this label has
been removed", ULVAC warranty shall not be
applied to the product.
(5) Name plate
(6) Direction of rotation Label
The direction of rotation of rotor inside the pump.
Summary of Contents for UTM300B
Page 8: ...vii Location of label...
Page 11: ...x This page is intentionally left blank...
Page 17: ...xvi Table of contents This page is intentionally left blank...
Page 51: ...34 SECTION 5 INSTALLATION This page is intentionally left blank...
Page 70: ...GAS PURGE 7...
Page 77: ...60 SECTION 8 TURBO MOLECULAR PUMP RECONDITION This page is intentionally left blank...
Page 111: ...A 26 Appendix A COMMUNICATIONS This page is intentionally left blank...