Ulvac UTM300B, Instruction Manual

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A-23
A6 RS-485 COMMANDS / ANSWERS (SEND AND RECEIVE Examples)
Type
Direction
of Data
(Note 1)
Character String
Sent/Receive
(Note 2) Description Remarks
Setting
→ MJ01SR0300\ Read Settings Settings number 03
←
MJ01SA030000AF\ Send Settings Value Settings number 03 = 0
Rotational speed = NORMAL
→ MJ01SW030001C6\ Write Settings Overwrite settings number 03 = 1
←
MJ01SA030001B0\ Send Settings Value Settings number 03 = 1
Rotational speed = LOW SPEED
Others
→
MJ01AA7A\ Undefined Command When undefined command is
received
← MJ01AN87\ Invalid Command
→
MJ01LS20\ Operation Mode Check When command is correct, but
checksum is not.
← MJ01AN87\ Invalid Command
(Note 1) "$" represents a carriage return code (0dH).
(Note 2)
→
From computer to turbo molecular pump.
←
From turbo molecular pump to computer.