RF POWER SUPPLY and MATCHINGBOX
7. Maintenance
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7-2. Matching box maintenance and inspection
In order to use the matching box for many years to come, we recommend you overhaul it at each
usage interval listed below.
Table 7-2 Matching box recommended parts for regular replacement
No.
Part name
Recommended replacement period
1
Cooling fan
4 years
2
Vacuum variable capacitor
3 years or 1 million cycles, whichever is shorter
3
Position meter
3 years or 1 million cycles, whichever is shorter
4
Motor
3 years or 1 million cycles, whichever is shorter
5
Water-cooling piping
4 years
6
Coupling
3 years or 1 million cycles, whichever is shorter
*
The recommended usage interval for replacement is not a guarantee of product service life.
*
The speed of degradation for these products greatly differs according to the frequency of
equipment use and the usage conditions.
*
The service life of the vacuum variable capacitor is dependent on the number of strokes.
*
The service life of components will decrease faster the higher the usage environment temperature
is.
*
The service life of mechanical operation components (such as connectors) is defined by the
operation count, and the service life time decreases by operation count.
*
When stored in the unpowered state, deterioration of the internal elements may occur in a shorter
period than the recommended periodic replacement period above.
*
When it is time for an overhaul, always use ULVAC. If you replace parts yourself or have parts
replaced by another manufacturer without the permission of ULVAC, repairs will be performed for
a fee regardless of the warranty period based on the no charge repair provisions (page V).
