RF POWER SUPPLY and MATCHINGBOX
5. Operation
64
Figure 5-4 Main screen Pf setting (P1)
③
AMC mode setting
When the AMC setting is set to "AMC=MANU", the position of TUNE and MATCH
variable capacitors can be moved by manual operations from the control panel.
When the AMC setting is set to "AMC=AUTO", the auto matching operation is set and the
auto matching operation is performed when RF is turned on. (The variable capacitors
cannot be moved in this state.)
The AMC setting can be changed regardless of whether RF is on or off.
Figure 5-5 Main screen - AMC mode setting (P1)
P f
=
0 W /
1 0 W
P r
=
0 W
A M C = A U T O
V D C =
0 V
T = 5 0 %
V P P =
0 V
M = 5 0 %
P f
=
0 W /
0 W
P r
=
0 W
A M C = A U T O
V D C =
0 V
T = 5 0 %
V P P =
0 V
M = 5 0 %
P f
=
0 W /
0 W
P r
=
0 W
A M C = M A N U
V D C =
0 V
T = 5 0 %
V P P =
0 V
M = 5 0 %
Variable capacitor positions
