RF POWER SUPPLY and MATCHINGBOX
4. Functions
40
* When performing external control, see "Table 4-3 External control (EXT.CONT) pin assignments"
and use the included connector to connect external control. Even if the external control terminal is
not used, connect pin 16 and pin 17 (external interlock) with a jumper wire.
* Please prepare contacts with a capacity of 12 VDC and 12 mA or higher.
* If using semiconductor devices, please prepare devices with a leakage current 0.1 mA or lower.
Figure 4-8 External control (EXT.CONT) pin assignments
22
External Control
1
2(COM)
16
RF generator
+
-
+
-
+
-
RF-ON command
External interlock input
Reset signal
35
+
-
Switch AUTO/MANUAL
27
+
-
Program select signal 0
28
+
-
29
+
-
30
+
-
10V
10
12
+
-
9,13,45,47(COM)
5
Interlock resonse
3
RF-ON response
7
ALARM signal
External power setting
11
14
15
25V 20mA max
25V 20mA max
25V 20mA max
(NO)
(NO)
(NO)
20
Standby signal
(NO)
25V 20mA max
32
+
-
33
+
-
External Control
RF generator
36
Manual response
26
25
TUNE limit
38
MATCH limit
25V 20mA max
25V 20mA max
25V 20mA max
(NO)
(NO)
(NO)
40
BUSY signal
(NO)
25V 20mA max
42
ACK signal
(NO)
25V 20mA max
48
Preset operation end signal
(NO)
25V 20mA max
10V
18
+
-
TUNE analog preset
10V
19
+
-
MATCH analog preset
44
Pf monitor
Pr monitor
VDC monitor
VPP monitor
46
TUNE monitor
MATCH monitor
anti-counter electromotive voltage diode
+12V
External Control Circuits
When connecting an inductive load (relay or
coil) to the output of the external control
terminal, insert a diode or use a relay with a
surge absorbing element so that counter-
electromotive force is not geerated.
50
ARC signal
100Ω
100Ω
100Ω
100Ω
100Ω
100Ω
100Ω
100Ω
100Ω
100Ω
100Ω
100Ω
0.1W
Transistor output section has an internal
resistance, but there is no overcurrent
protection function.Consider them to make the
current in the external control device side.
17(COM)
23(COM)
31(COM)
31(COM)
31(COM)
31(COM)
31(COM)
31(COM)
34(COM)
4
6
8
21
37
39
41
43
49
9,13,45,47(COM)
9,13,45,47(COM)
9,13,45,47(COM)
ANALOG-GND
Program select signal 1
Program select signal 3
Program select signal 4
Motor strobe signal
Program strobe signal
