RF POWER SUPPLY and MATCHINGBOX
3. Setup
24
Caution
The MBX-1330N/MBX-1350N cooling water connector is Rc3/8 (PT3/8) female.
Please use this connector by converting it to the connector of the tube that will be used
with the appropriate conversion connector. To obtain the specified water flow rate, use a
Synflex tube with a diameter of 3/8 inches or larger.
Caution
If the specified flow rate of cooling water is not flowing, if the flow rate decreases, or
if the cooling water connector has not correctly connected, the internal temperature of
the matching box may increase abnormally. If the temperature increases abnormally,
there is a risk of electric shock hazards occurring due to fire or water leakage, and there
is also a risk of other unforeseen malfunctions and hazards occurring. Ensure that a
cooling water flow rate monitoring mechanism and a cooling water interlock are
installed on the customer equipment side of the system for the matching box's cooling
water. Forced air cooling is also performed in the matching box with the cooling fan, so
ensure spacing of 10 cm or more for the intake and exhaust panels other than the output
panel for air flow.
Since all wiring acts as an inductor at the frequency used by the RF Generator, decide on an
installation location for the matching box where the distance between the load and the matching
box's RF access port is as short as possible. If this wiring is long, problems will occur like the
generation of abnormally high voltage that damages parts or auto matching will not operate
properly, so ensure the wiring is the minimum length.
Matching box
Customer-prepared chamber or installation panel (aluminum, etc.)
Matching box
Mounting taps
Figure 3-3 Matching box installation example
