RF POWER SUPPLY and MATCHINGBOX
4. Functions
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4-1-3. Descriptions of control panel functions
The control panel allows you to configure RF generator and matching box parameters and to
view the operating status. You can also turn the RF generator output on or off and set the position
of the matching box variable capacitors up or down.The system can be controlled from the
EXT.CONT terminal even when the control panel is connected or not used.
Table 4-1 Descriptions of panel functions
When using the controller or when the controller is built-in
OLED display
Shows the setting values, measured values, and operating status.
ON
Outputs RF.
OFF/RESET
Stops RF or resets the alarm.
TUNE UP
Operates TUNE in the up direction.
TUNE DOWN
Operates TUNE in the down direction.
MATCH UP
Operates MATCH in the up direction.
MATCH DOWN
Operates MATCH in the down direction.
This increases or decreases the value when changing settings.
Move the cursor or pages forward/backward/left/right when changing
settings.
ESC
Cancels changing the value when modifying settings and returns to
parameter selection.
ENT
Sets the selected parameter to be modifiable.
*RF-ON is valid with the controller when RFOP=panel and the ALARM reset/INTERLOCK released state.
*RF-OFF is possible with the controller even when not RFOP=panel.
*The OFF/RESET key does not clear the warning display. (It is cleared only when the cause of the warning is eliminated)
*The TUNE/MATCH operation keys are enabled in the AMC=MANU, ALARM reset/INTERLOCK released state.
Figure 4-7 Front panel (control panel) example
