RF POWER SUPPLY and MATCHINGBOX
1. For Safe Operation
2
Danger
In order to prevent fires and explosion accidents, do not use this system in
locations with a flammable gas atmosphere or locations with dust.
1-2. Warning labels/nameplate
Note
The locations where warning labels are affixed to the system are shown in
"Reference Materials". Ensure that these warning labels are always clean and entirely
legible. Use a cloth and water to clean the warning labels. Do not use gasoline or
organic solvents. If a label is damaged, missing, or illegible, contact ULVAC or an
exclusive dealer. A nameplate has also been attached to the top of the RF generator.
Take special care to ensure the nameplate is always legible.
1-3. Contact
To order parts, ask questions about products, and to make inquires related to product malfunctions,
first verify the product information and then contact ULVAC or an exclusive dealer. Especially when
you have determined the system has malfunctioned, inform us of the system information along with
the system's history and symptoms in as much detail as possible.
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System information (listed on the nameplate)
Model
Manufacturing number information (Serial No. and Lot No.)
