RF POWER SUPPLY and MATCHINGBOX
5. Operation
65
④
RF-ON operation
Press the "ON" key to start RF output. The Pf monitor value converges to within ±1 W of
the Pf setting value by feedback control. If this value does not converge to within ±1 W of
the Pf setting value, the cause may be an increase in reflected wave power, arc shutoff
operation, or another droop operation.
While RF-ON, the VDC and VPP voltages detected at the matching box output section are
displayed.
When matching is achieved, the Pr monitor value roughly converges to around 0 W.
After matching is complete, check whether or not the plasma has actually ignited. If the
plasma has not ignited, you must a review the causes such as gas pressure, cathode shorting,
preset point, or other issue.
Figure 5-6 Main screen - When RF-ON (P1)
P f
=
1 0 0 W /
1 0 0 W
～
P r
=
1 0 W
A M C = A U T O
V D C =
5 0 V
T = 6 0 %
V P P =
1 0 0 V
M = 3 0 %
Pf monitor value
Pr monitor value
VDC monitor value
VPP monitor value
Displayed when RFON
TUNE monitor value
MATCH monitor value
