Ulvac G-Tran BMR2, Instruction Manual

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V
Contents
Page
Prior to Operation I
Safety Denotations I
Safety Precautions II
Contents V
1. INTRODUCTION .................................................................................................... 1
1.1. Overview of G-TRAN SERIES .................................................................................... 1
1.2. Terminology ................................................................................................................. 1
2. FEATURES OF SC1 Ion Gauge ............................................................................. 2
3. SPECIFICATIONS AND COMPONENTS ............................................................ 3
3.1. Key Specifications ........................................................................................................ 3
3.2. Standard Accessories .................................................................................................. 4
3.3. Options ......................................................................................................................... 4
3.4. Service Parts ................................................................................................................ 4
4. NOMENCLATURE AND FUNCTIONS OF COMPONENTS ............................. 5
4.1. Assembly ...................................................................................................................... 5
4.2. Front Panel .................................................................................................................. 6
4.3. Input/Output Connector .............................................................................................. 7
5. INSTALLATION ..................................................................................................... 8
5.1. Preparations ................................................................................................................ 8
5.2. Installation ................................................................................................................... 8
5.2.1. Installing the sensor head to the sensor unit .................................................. 8
5.2.2. Installing the sensor unit .................................................................................. 8
5.2.3. Electrical connection .......................................................................................... 9
6. CAUTIONS IN HANDLING ................................................................................ 10
7. OUTPUT SIGNALS .............................................................................................. 11
7.1. Control Operation ...................................................................................................... 11
7.1.1. High Voltage ON/OFF [HV ON/OFF] ............................................................ 11
7.2. Output Signals ........................................................................................................... 11
7.2.1. Setpoint actuating signal [SET-1 ON/OFF][SET-2 ON/OFF] ...................... 11
7.2.2. Discharge valid signal [Discharge OK/NG] ................................................... 11
8. SETTING OF SETPOINT .................................................................................... 12
9. FUNCTIONS ......................................................................................................... 13
9.1. Setpoint [SET-1 ON/OFF] [SET-2 ON/OFF] ........................................................... 13
9.1.1. Setpoint ............................................................................................................ 13
9.1.2. Setting of setpoint ............................................................................................ 13
9.1.3. Setpoints of measuring unit and display unit ............................................... 13
9.2. Measurement Value Output ..................................................................................... 14
9.2.1. Measurement value voltage output form ....................................................... 14
9.2.2. Measurement value outputs in each condition .............................................. 15
10. MAINTENANCE ................................................................................................... 16
10.1. Preparation of Tools and Others .............................................................................. 16
10.2. Necessary Tools and Others ..................................................................................... 16
10.3. Necessary Equipment ............................................................................................... 16
10.4. Removing the Sensor Unit and Sensor Head .......................................................... 17
10.4.1. Removing Screws ............................................................................................. 17
10.4.2. Removing the Sensor Head ............................................................................. 17
10.5. Disassembling the Sensor Head ............................................................................... 18
10.5.1. Exploded View of Sensor Head ....................................................................... 18
10.5.2. Removing the Internal Electrode ................................................................... 19
10.6. Cleaning the Electrode in the Sensor Head ............................................................ 22
10.6.1. Insulation Check of Anode .............................................................................. 22