3
3.
SPECIFICATIONS AND COMPONENTS
3.1.
Key Specifications
Name
Inverted magnetron type vacuum gauge Model SC1
Connectable sensor head
One pc.
Compatible sensor head
C-21, C-23, C-24, C-25
Measurable pressure range
1.0
×
10
-5
to 1 Pa, 7.5
×
10
-8
Torr to 7.5
×
10
-3
Torr
Measurement accuracy (N
2
)
(when shipped from factory)
Scale factor 2
*:Scale factor 2: -50% to +100%
Applied voltage
Approx. 2.6 kVDC
Operating temperature range
10 to 40°C
Control input signal
HV ON/OFF
Data output
0 V to 10 VDC, non-linear
Measurement data
Setpoint actuating set value 1: data
Setpoint actuating set value 2: data
Control output signal
Open collector output, negative logic
[24 VMAX, 50 mAMAX, saturation voltage is 1V]
Setpoint actuating signal -1 [ON/OFF]
Setpoint actuating signal -2 [ON/OFF]
Discharge confirm signal [OK/NG]
LED display
POWER SET-1
ERROR SET-2
Power supply
24 VDC ± 2 V, 150 mA (sensor unit alone)
Input/output connector
D-sub 15-pin (M2.6 screw)
Weight of main unit
430 g (not including sensor head)
Outside dimensions
See Fig. 14-1 Dimensional Drawing.
Summary of Contents for G-Tran BMR2
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