Ulvac G-Tran BMR2, Instruction Manual

Page: 27 / 54

18
10.5. Disassembling the Sensor Head
10.5.1. Exploded View of Sensor Head
①
Anode
②
Cathode magnetic pole 1
③
Cathoede spacer
④
Cathode magnetic pole 2
⑤
Cap screw
⑥
O-ring
Disassembling the Sensor Head:
⑤ ⇒ ① ⇒ ② ⇒ ③ ⇒ ④
Reassembling the Sensor Head:
④ ⇒ ③ ⇒ ② ⇒ ① ⇒ ⑤
Fig. 10-3 Exploded view of sensor head
1
2
4
3
6
5
5
3
6
4
2
1