III
If this unit is exposed to gases that deposit materials including CVD
(Chemical Vapor Deposition) material gases and rotary pump oil mist,
problems will occur such as pressure characteristics changing. When
using this unit in these types of environments, install an isolation
valve between this unit and the vacuum chamber and protect this unit
so it is not exposed to these gases.
Use in a CVD gas atmosphere
If there is a large quantity of fouling in the gauge head from the
gradual vaporization of moisture or organic matter, pressure accuracy
and response speed will be affected. Review installation locations and
methods so that fouling does not occur.
Moisture and fouling
The pressure value and accuracy for this unit differ by the type of gas
measured. The accuracy for this unit is based on measuring nitrogen
gas. Be careful when using gases other than nitrogen.
Gas type dependency
Prior to turning ON the power, make sure that the vacuum gauge
operating voltage and the supply voltage are in agreement.
Connection of incorrect power can damage the vacuum gauge and
cause fire.
Check line voltage.
If there is a possibility of the operator touching the anode terminal of
the sensor head during operation, shut off the power. The anode
terminal of the sensor head is energized with a discharge voltage of 2.6
kV DC. If you touch it when this gauge is actuated, you will get electric
shock.
Shut off power
Do not use the gauge in a place where it may be splashed with water.
If wetted, it may fail or electric leak or fire can result.
Operating environment
If foreign matter like metal fragments or combustibles are admitted
into the vacuum gauge through the openings in the gauge, remove
them. Also keep intact the connecting terminals at the top of the
gauge. Otherwise, the vacuum gauge may be damaged.
Keep out foreign matter.
The magnetic flux density at the center of the sensor head is about 0.1
T. It will be attracted by or attract a metal part nearby with high
magnetic force. Be careful in maintenance that a screwdriver or a
metal part will be attracted with high magnetic force.
Beware of magnetic field
See to it that the power cable does not come into contact with other
conducting parts.
Check connection.
When you discard a vacuum gauge, please process according to the
regulations of each local government. Especially the sensor head that
used it in the atmosphere which may exert danger on a human body
needs to process through a special processing contractor.
Discarding
Use this vacuum gauge in the environment set forth by the
specifications.
Operating conditions
Summary of Contents for G-Tran BMR2
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