Ulvac G-Tran BMR2, Instruction Manual

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VI
10.6.2. Cleaning the Anode ......................................................................................... 22
10.6.3. Cleaning Magnetic Poles 1 and 2 ................................................................... 23
10.6.4. Cleaning the Spacer ......................................................................................... 24
10.6.5. Cleaning the main body .................................................................................. 25
10.6.6. Cleaning the O-ring and O-ring Groove ......................................................... 25
10.6.7. Cleaning Parts ................................................................................................. 25
10.7. Reassembling the Sensor Head ................................................................................ 26
10.7.1. Reassembly ....................................................................................................... 26
10.7.2. Checking the Anode Position .......................................................................... 26
10.8. Insulation Check ........................................................................................................ 27
10.8.1. When a insulation resistance tester is available at hand ............................. 27
10.8.2. If a insulation resistance tester is not available at Hand ............................ 27
10.9. Leak Test .................................................................................................................... 29
10.10. Installing the Sensor Unit and Sensor Head ...................................................... 30
10.11. Maintenance .......................................................................................................... 30
11. TROUBLESHOOTING ......................................................................................... 31
12. WARRANTY .......................................................................................................... 33
13. Certificate of Contamination ................................................................................ 34
14. China RoHS Declaration ....................................................................................... 35
15. APPENDIX ............................................................................................................ 36
15.1. Pressure-Measurement Value Voltage Table (Pa) .................................................. 36
15.2. Pressure-Measurement Value Voltage Table (Torr) ............................................... 39
15.3. Related Drawings ...................................................................................................... 42
15.3.1. Compatible Sensor Heads ............................................................................... 42