II
Safety Precautions
For safe use of this vacuum gauge, carefully read this manual and comply with the safety
precautions given in this manual.
Request repairs for this unit from the dealer where purchased, from
ULVAC Inc., or from the URL listed in this instruction manual.
Repair
If this unit is accidentally damaged, immediately turn off the power
supply. There is a risk of fire and electric shock from use in this state.
Power off
If this unit produces unusual heat, smoke, or a strange smell,
immediately turn off the power supply. There is a risk of fire from use
in this state.
Power off
Turn off the power to the vacuum gauge before conducting
maintenance. The anode of the sensor head is energized with a voltage
of 2.6 kV DC. You may receive electric shock if you touch it.
Turn off power.
Always connect this unit electrically to a grounded vacuum chamber.
Use a conductive metal clamp on the NW flange. If this unit is not
correctly connected, it will not only show the wrong pressure, there is a
risk of damage to this unit and the equipment connected to this unit
and a risk of fire.
Protective grounding
When this unit is insulated from the vacuum chamber, ground the
case section (D-sub connector shell section) with a class D (class 3)
ground.
Do not disassemble the vacuum gauge.
Don't disassemble.
Do not modify the vacuum gauge. If it is modified, its functions are
not warranted. Also fire or electric shock may result.
Don't modify.
Do not connect the sensor head to a test object in which pressure is in
excess of atmospheric pressure. If the pressure in the sensor head
exceeds atmospheric pressure, the sensor head will be damaged or it
will pop out from the connector, causing injury to the surrounding,
including human body. If the pressure exceeds atmospheric pressure,
provide an isolation valve so that the pressure in the sensor head does
not exceed atmospheric pressure.
Operating environment
If this unit is exposed to chemically active gases including corrosive
gases and halogen or halogenated gases, problems will occur such as
pressure characteristics changing. When using this unit in these types
of environments, install an isolation valve between this unit and the
vacuum chamber and protect this unit as much as possible so it is not
exposed to these gases.
Use in a corrosive gas atmosphere
Summary of Contents for G-Tran BMR2
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