16
10.
MAINTENANCE
10.1.
Preparation of Tools and Others
Prepare the following tools and equipment before conducting maintenance.
10.2.
Necessary Tools and Others
Description
Use and others
Clean gloves
Handling of internal electrode
Recommended: Powder-free rubber gloves
Philips screwdriver for M3
screw
Attaching the sensor head to/detaching from the sensor unit
Degreased clean rod
180mm or more in length,
10mm or less in diameter
Removal of internal electrode
Plastic or metal rod is recommended
Thin rod for removing O-ring Removal of O-ring
Recommended: Thin plastic rod
Sandpaper #180 – #400
Polishing the electrode
Use of metal file is strictly forbidden
#180, #240 or #400 is recommended.
Wiper
Cleaning the electrode
Wiper for use in a low-level dust producing clean room is
recommended.
Alcohol
Cleaning the electrode
10.3.
Necessary Equipment
Satisfactory performance of SC1 may not be attained if the following equipment is not
available.
Description
Use and others
Insulation resistance tester
Insulation check of anode
Insulation resistance tester of 2500 V/10,000 M
Ω
or more is
recommended (10,000 M = 10G)
Helium leak detector
Leak test after reassembly
Recommended minimum detection: 10
-11
Pa
m
3
/s or less
Ultrasonic cleaner
Cleaning the internal electrode and others
Recommended solvent: alcohol
Summary of Contents for G-Tran BMR2
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