36
Thermo Fisher Scientific
Operation Manual HM550
Note:
e valid range of the set value goes from +10°C down to -35°C.
• e actual value of the chamber temperature is shown as actual
temperature and as a graphic.
• After having chosen the requested values, the display automatically
e actual and set values of the chamber cooling are shown in °C on the
display (fig. 17). On the right side of the display, the actual value is also
shown graphically.
• Press button (fig. 18.3) for chamber temperature.
• “CHAMBER” is then shown inverted.
e set value settings are made via the
• up button (fig. 18.5)
• down button (fig. 18.6)
Chamber cooling
Actual and set value
of the chamber
temperature
Figure 17.
Display: Actual / Target chamber temperature.
OMVPD
e graduation of the trimming thicknesses (which can be pre-selected)
is divided into 4 ranges:
ꢀange
ꢂraduation
from 5 µm to 10 µm
5 µm
from 10 µm to 100 µm
10 µm
from 100 µm to 200 µm
20 µm
from 200 µm to 500 µm
50 µm
Operating instructions
Chamber cooling
