OPERATION MENU’S
The Digital Output and Input menu gives an overview of mainly the valve settings, digital
outputs (ON/OFF) and digital inputs such as pressure and door switches (ON/OFF) In
addition the alarm active status is displayed. “Yes” means the digital input is monitored and a
change in signal will generate an alarm. “No” means the signal is not monitored and a change
of signal does not result in any alarm.
<
INPUTS
>
Is to display the inputs.
<
OUTPUTS
>
Is to display the outputs.
Press <ESCAPE> to go back to the Monitor Menu.
6.5.4
DPC Lot Id Status
Figure 6-40 DPC Lot Id Status
The DPC Lot ID status gives an overview of the current Lots Id.
The Lot Id, its type (P=Product, F=Filler and T =Test) and the total wafers per type and
batch are displayed. A total of all wafers will be shown.
Press <ESCAPE> to go back to the Monitor Menu.
T
OUCHSCREEN
R
EFERENCE MANUAL
6-40
