TABLE OF CONTENTS
6.2.1.8
Graphic System Layout............................. 6-14
6.2.2
Temperature Controller Certifications ...................... 6-15
6.2.2.1
Tube Configuration.................................... 6-16
6.2.2.2
Normal Temperature Table ....................... 6-18
6.2.2.3
Profile Temperature Table......................... 6-19
6.2.2.4
Paddle TC Calibration Table ..................... 6-20
6.2.2.5
PID Parameter Table ................................ 6-21
6.2.2.6
Maximum Spike Correction Table ............. 6-22
6.3
Process Recipes ..................................................................... 6-22
6.3.1
Edit a Process Recipe ............................................. 6-23
6.4
Tube Control ........................................................................... 6-25
6.4.1
Graphic Process Control.......................................... 6-28
6.4.2
Start/Stop Process Recipe....................................... 6-30
6.4.3
Abort Process Recipe .............................................. 6-31
6.4.4
Clear Alarms............................................................ 6-32
6.4.5
Variable Process Command .................................... 6-32
6.4.6
Select a Process Recipe.......................................... 6-33
6.4.7
Assigns Control Zones to Paddle Inputs.................. 6-34
6.4.8
Edit Lot Id ................................................................ 6-35
6.5
Monitor.................................................................................... 6-35
6.5.1
Main Detail Status.................................................... 6-37
6.5.2
Alarm Status ............................................................ 6-39
6.5.3
Digital Output/Input Status....................................... 6-39
6.5.4
DPC Lot Id Status .................................................... 6-40
6.5.5
Process Recipe Status ............................................ 6-41
6.5.6
Temperature Status ................................................. 6-42
6.5.6.1
Temperature Status .................................. 6-43
6.5.6.2
Normal Recipe Status ............................... 6-44
6.5.6.3
Profile Recipe Status................................. 6-45
6.5.6.4
Paddle Correction and Parameters ........... 6-45
6.5.7
Graphic Process Status ........................................... 6-46
Appendix A ...................................................................1
T
OUCHSCREEN
R
EFERENCE MANUAL
II