Shimadzu EI-D1003M Instruction Manual Download

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Introduction

Power Supply Unit

INSTRUCTION MANUAL

○

Installation Precautions

Do not apply abnormal loads to the turbo molecular pump control cable plug and/or connector.

Abnormal loads may cause cable disconnection.

(1) Do not pull the turbo molecular pump control cable by the connector or plug.

(2) When installing the power supply unit into equipment, do not allow any electrical cables to

be in tension or to have very tight bending radii.

(3) Do not bundle the turbo molecular pump control cable with any cables.

(4) Do not twist the turbo molecular pump control cable during connection.

Summary of Contents for EI-D1003M

Page 1: ...his instruction manual for future reference Semiconductor Equipment Division Power Supply Unit for Turbo Molecular Pump Model EI D1003M Model EI D1103M Model EI D1303M Model EI D2003M Model EI D2203M...

Page 2: ...andard type is explained in this manual For special order type please refer to the out lines and constructions of each specification Copyrights and Disclaimers This document is copyrighted by Shimadzu...

Page 3: ...oing so would impair safety of the pump proper WARNING Decisions on system compatibility should be made by the system designer or the person deciding the specifications after conducting tests as neces...

Page 4: ...e speed function cannot be used the xx number indicates the model of the corresponding pump If the power supply unit is to be combined with an existing pump modification and operational inspections ar...

Page 5: ...seal This label certificates that the product was made or maintenanced by Shimadzu or by Shimadzu authorized facility In case this label is removed or there is a mark showing once this label has been...

Page 6: ...ause cable disconnection 1 Do not pull the turbo molecular pump control cable by the connector or plug 2 When installing the power supply unit into equipment do not allow any electrical cables to be i...

Page 7: ...nty repaired or replacement parts are warranted only for the remaining unexpired portion of the original warranty period applicable to the parts that have been repaired or replaced Exemption from the...

Page 8: ...of the parts when you dispose this product in an inap propriate way LIMITATION OF LIABILITY EXCEPT AS STATED HEREIN SHIMADZU MAKES NO WARRANTY EXPRESSED OR IMPLIED EITHER IN FACT OR BY OPERATION OF L...

Page 9: ...viii 263 13228 This page is intentionally left blank...

Page 10: ...nty period vi Conditional warranty vi Scope of the warranty vi Warranty of repaired or replacement parts vi Exemption from the warranty vi Disposal of Products and Parts vii LIMITATION OF LIABILITY vi...

Page 11: ...Pump to the Power Supply Unit 24 Section 6 OPERATION 6 1 Outline 28 6 1 1 Introduction 28 6 1 2 Operation Flowchart 29 6 2 Start up Preparation 35 6 2 1 Start up Preparation Sequence in LOCAL Mode 35...

Page 12: ...ise 69 7 4 Abnormal Noise and or Vibration 69 7 5 Alarm Detection Capabilities 69 7 5 1 Movement in Alarm Detection Capabilities ALARM 69 7 5 2 Movement in Alarm Detection Capabilities WARNING 70 7 5...

Page 13: ...A 11 A 6 COMMAND DESCRIPTION A 17 A 6 1 Operation Mode A 17 A 6 2 Operation A 18 A 6 3 Run Status A 19 A 6 4 Parameters A 20 A 6 5 Events A 20 A 6 6 Timer A 21 A 6 7 History A 21 A 6 8 Settings A 22 A...

Page 14: ...1 1OUTLINE AND DESCRIPTIONS 1 1 Outline 1 2 Descriptions 1 2 1 Power Supply Unit 1 2 2 Control Cable 1 2 3 Motor Cable 1 2 4 Standard Accessories...

Page 15: ...ber Typical Applications Semiconductor equipments Industrial equipments R D applications The other ultra high vacuum applications The turbo molecular pump one standard set consists of the following it...

Page 16: ...pply Unit Fig 1 1 Outside Dimensions of Power Supply Unit Description Parts number EI D1003M 262 78689 02 EI D1103M 262 78690 02 EI D1303M 262 78688 02 EI D2003M 262 78691 02 EI D2203M 262 78692 02 EI...

Page 17: ...r cooled chemical type 3 meters length straight plugs for both sides 5 meters length straight plugs for both sides 7 meters length straight plugs for both sides 10 meters length straight plugs for bot...

Page 18: ...NUAL 1 1 2 4 Standard Accessories Description Q ty Notes Parts Number 1 Power cable 1 5meters length 262 76773 05 2 Remote Control Connector 1 MR 34MG MR 34L4 Pin type connector Connector hood 070 507...

Page 19: ...SECTION 1 OUTLINE AND DESCRIPTIONS 6 263 13228 1 This page is intentionally left blank...

Page 20: ...2 2IDENTIFICATION AND FUNCTION 2 1 Power Supply Unit...

Page 21: ...SECTION 2 IDENTIFICATION AND FUNCTION 8 263 13228 2 2 1 Power Supply Unit Fig 2 1 Front Control Panel Fig 2 2 Rear Panel 2 3 1 4 5 10 11 12 14 13 22 9 24 15 8 7 6 17 16 19 18 21 23 20...

Page 22: ...dicating that the pump s rotor is running green 12 NORMAL SPEED LAMP Operation indicator lamp indicating that the pump s rotor is rotating normally green 13 TEMP CONTROL LAMP Not used with EI Dxx03M 1...

Page 23: ...SECTION 2 IDENTIFICATION AND FUNCTION 10 263 13228 2 This page is intentionally left blank...

Page 24: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Power Supply Unit...

Page 25: ...ile the rotor is in a high speed rotation then the motor becomes a generator to power the magnetic bearing system during a power failure deceleration mode therefore the need for a battery backup syste...

Page 26: ...4 4SPECIFICATIONS 4 1 Power Supply Unit 4 2 Standards Fulfilled...

Page 27: ...motor Magnetic Bearing failure Power supply malfunction Over Temperature inside power supply Fail drive circuit Power failure Warning Failure of magnetic bearing Protection Alarm ALARM LED lights buz...

Page 28: ...AKE NORMAL REMOTE ALARM WARNING Serial RS 232C D sub 9pin male Screw lock size M2 6 RS 485 D sub 9pin female Screw lock size M2 6 Alarm Detection Alarm Pump Temperature Pump Startup Failure Overload O...

Page 29: ...kVA Insulation withstand voltage 1500 V 1 minutes Mass 8 kg Environmental Conditions Temperat ures Operation 0 to 45 Storage 25 to 70 No dew condensation Relative humidity 40 to 80 RH Installation co...

Page 30: ...of the Power Supply Unit 5 1 1 Location of the Power Supply Unit 5 1 2 Installation of the Power Supply Unit 5 1 3 Compatibility with Previous Models 5 2 Connection of Power Cable 5 3 Connection of t...

Page 31: ...ith strong radioactive ray 6 Unventilatable place 5 1 2 Installation of the Power Supply Unit When mounting the power supply unit onto the customer s rack use the front panel installation holes The in...

Page 32: ...TRUCTION MANUAL 5 Fig 5 1 Leave enough space around the power supply unit Fig 5 2 Mount the power supply unit 5 5 30 50 front panel installation holes 4 places installation panel 203 198 1 114 5 122 5...

Page 33: ...rescribed screws to attach the rubber pads Using the wrong screws can lead to damage or failure of the power supply unit FIg 5 4 Attaching the rubber pads Fig 5 5 Space to connect the cable 160mm 50mm...

Page 34: ...Mounting Kit How to install the unit onto the rack 1 Turn the power supply unit over and remove the four rubber pads 2 Attach the rack mounting panel to the power supply unit with four Panel Attachme...

Page 35: ...is used it must be checked for compatibility For a detailed procedure please refer to Section 6 7 1 Compatibility with Previous Models POWER SUPPLY 111 199 213 189 172 2 2 3 EI Dxx03M 15 27 REMOTE RS...

Page 36: ...of Power Cable 1 Connect the power cable terminal to the terminal board of user s power distribution board for equipment The wire with PE mark is for earth use and other remaining two wires are for si...

Page 37: ...t is identified as specified Even the use of other similar cable would disable start up of the pump even though it could be connected After turn on the POWER switch of the power supply unit ALARM lamp...

Page 38: ...5 Fig 5 11 Connection of Cables AC INPUT MOTOR MAG BRG CONTROL CABLE MOTOR CABLE POWER CABLE WIDE RANGE TYPE TURBO MOLECULAR PUMP POWER SUPPLY UNIT EI Dxx03M CONTROL CABLE POWER SUPPLY UNIT EI Dxx03M...

Page 39: ...SECTION 5 INSTALLATION 26 263 13228 5 This page is intentionally left blank...

Page 40: ...up Sequence in LOCAL Mode 6 3 2 Start up Sequence in REMOTE Mode 6 4 Shutting Down 6 5 Variable Speed Operation 6 5 1 Outline 6 5 2 Operation from Start up to Low Speed Rotation 6 5 3 Operation from...

Page 41: ...tic levitation until the rotational speed drops Levitation then stops and the touch down bearing supports the rotor Consequently repeated touch down operations can reduce the life of the bearing 6 1 1...

Page 42: ...p internal pressure 200 Pa Start up preparation complete REMOTE operation Backing vaccum pump operates Turn POWER switch from 0 OFF to 1 ON Start cooling water for cooling water method Set the REMOTE...

Page 43: ...N signal output ON ROTATION signal output ON ACCELERATION signal output OFF NORMAL signal output ON Start up flowchart LOCAL operation LCD monitor mode operation mode Display STOP ACC NORMAL SPEED lam...

Page 44: ...ess STOP switch Turn POWER switch from 1 ON to 0 OFF Input STOP signal NORMAL signal output OFF BRAKE signal output ON ROTATION signal output OFF BRAKE signal output OFF Stop cooling water LOCAL opera...

Page 45: ...ON signal output ON Speed setting flowchart Start up to low speed rotation LOCAL operation Note 1 Speed 80 low speed value NORMAL SPEED lamp lights LCD monitor mode operation mode Display ACC NORMAL L...

Page 46: ...g flowchart Rated speed to low speed rotation Note 1 Speed low speedvalue The speed is maintained at the low speed value Set the low speed value in the LCD setting mode Note 1 Note 1 After this settin...

Page 47: ...setting flowchart Low speed to rated speed rotation The acceleration stops at the rated speed and the speed is maintained Cancel LOW SPEED signal ACCELERATION signal output OFF NORMAL signal output ON...

Page 48: ...de 1 Feed the cooling water into the cooling line for cooling water method 2 Turn on the POWER switch Fig 2 2 17 of the power supply unit and check that REMOTE signal see Table 6 3 from the remote con...

Page 49: ...nitor mode operation mode LCD changes from ACC to NORMAL Pump start up is complete 6 3 2 Start up Sequence in REMOTE Mode 1 Start up begins when the 6 2 2 Start up Preparation Sequence in REMOTE Mode...

Page 50: ...ed 20 kPa GAUGE For shut down of the turbo molecular pump follow the sequence below 6 4 1 Preparations Prior to Shutting Down Operation 1 Check that process gas inflow is in complete stop When main va...

Page 51: ...in such a case when a hydraulic rotary vacuum pump is used as backing vacuum pump and there is possible reverse flow and diffusion of oil from the backing vacuum pump return the pump internal pressure...

Page 52: ...SPEED mode 2 Select the NORMAL mode or LOW SPEED mode by LOCAL operation using the setting mode rotational speed settings speed setting set value on the LCD display or by REMOTE operation using the re...

Page 53: ...to NORMAL 8 When the pump speed reaches the set low speed value acceleration stops and the pump speed is maintained The same operation occurs if the LOW SPEED mode is selected after the START switch i...

Page 54: ...the pump monitor mode operation mode LCD switches from BRAKE to NORMAL 6 The pump stops decelerating and the pump speed is maintained A normal start up and normal operation occurs if the mode is rever...

Page 55: ...ow speed value exceed 80 rated speed the LCD display remains unchanged and the pump accelerates 5 When the rated speed is reached the pump stops accelerating and the pump speed is maintained REMOTE Op...

Page 56: ...esentative for details Function Description Reference flowchart Operation mode User memo Operation status Motor speed Motor current Magnetic bearing monitor Note 1 Monitors pump operation status 1 Mon...

Page 57: ...28 6 A flowchart of the entire LCD display is shown below SELECT SET in the flowchart indicate keys on the power supply unit front panelrepresent the LCD display Fig 6 7 Power Supply Unit Front Panel...

Page 58: ...ERR X1 NORMAL ROT 100 MC 99 9A UB 100 SX1 100 SY1 100 SX2 100 SY2 100 SZ 100 UB1 100 UB2 100 RUN TIME 99999HR at 2003 12 31 23 59 LAST MAINT 99999HR from 2003 1 1 00 00E MENU INTEGRATING TIMER SELECT...

Page 59: ...01 SELECT SET SET RS485 EVENT SENDING ON SELECT ROT SPEED DISPLAY DISPLAY SPEED NORMAL NORMAL ROTATIONAL SPEED SETTINGS SETTINGS ROT SPEED SET SET SELECT SET SELECT SET SET ROT SPEED SPEED NORMAL SELE...

Page 60: ...TOR MONITOR MONITOR LCD Display Operation LOCAL REMOTE RS 232C RS 485 Control by a manual switch operation on the front panel Control by a remote control signal operation Control by a RS 232C communic...

Page 61: ...r Rotational Speed display can be selected from rpm and rps in the menu mode SETTINGS ROT SPEED DISPLAY An asterisk is displayed after the speed display during variable speed operation LCD Display Pum...

Page 62: ...detected is displayed ALARM 12 PF COUNTER LIMIT ALARM 21 TMP TEMP MB CABLE ALARM 13 WRONG TMP MODEL 01 2003 12 31 23 59 15 POWER FAILURE NORMAL ROT 100 MC 99 9A UB 100 02 2003 12 31 23 59 21 TMP TEMP...

Page 63: ...TEGRATING TIMER MAINT CALL 99999HR INTEGRATING TIMER POWER FAILURE 999 MAINT CALL 99999HR 99999HR at 2003 12 31 23 59 SELECT SET SET SET SET SELECT SET SELECT SET at 2003 12 31 23 59 at 2003 12 31 23...

Page 64: ...3 12 31 23 59 SET SELECT SET INTEGRATING TIMER MB WARNING 999 at 2003 12 31 23 59 SET SELECT SET MB ALARM 999 RESET COUNTER NO SELECT SET MB WARNING 999 RESET COUNTER NO SELECT SET from2003 12 31 23 5...

Page 65: ...REMOTE CONTROL SIGNAL SETTINGS Select remote control signal settings WARNING OUTPUT SETTINGS Note 1 Select warning output setting DEFAULT SETTINGS Select default settings USER MEMO SETTINGS Setting of...

Page 66: ...RATE 9600bps 9600bps RS232C BAUD RATE 9600bps SELECT SET SET EVENT SENDING ON ON RS232C EVENT SENDING ON SELECT SET BAUD RATE 9600bps 9600bps Press the or key to select a baud rate between 19 2k 9600...

Page 67: ...s Low speed setting When the speed setting is set to LOW speed or the remote control signal designates low speed the pump continues operation at the speed set by the low speed setting ROT SPEED SPEED...

Page 68: ...Select YES and press the SET key to return all the above items to their default settings Note 3 REMOTE SIGNAL MODE REMOTE EI 03 REMOTE SIGNAL MODE STOP REMOTE ONLY SET SELECT SETTINGS REMOTE SIGNAL MO...

Page 69: ...r OFF and no failure close open SEMI E74 2 Power OFF and alarm occurrence close open No failure open close WARNING 11 13 12 13 EI 03 1 warning occurrence open close Power OFF and no failure close open...

Page 70: ...ute self diagnosis of the magnetic bearing sensor If an abnormality is discovered by self diagnosis alarm codes 81 to 85 occur Refer to Table 7 5 for the appropriate remedy This function can be used o...

Page 71: ...ART STOP switch By alternate type switch Wiring connection Starting Pump start by short circuiting 15 and 14 Pump stop by opening 16 and 14 Pump start with the contact close or photo transistor ON 16...

Page 72: ...ration on GND and short circuiting Note 1 Contact input STOP 16 Stopping operation on GND and circuit opening Note 1 Note 2 RESET 17 Resetting operation on GND an short circuiting LOW SPEED 33 Variabl...

Page 73: ...g EI xx03M MD Power Supply Units As Is EI 03 Compatible Mode 1 Connectors The shape and pin count of connectors are mutually compatible and can be utilized as is 2 Pin Configuration It is compatible w...

Page 74: ...on 30 Common 30 Common 4 Break contact Break contact added NORMAL 25 Make contact 25 Make contact Same pin number same function 26 Common 26 Common 2 Break contact Break contact added ACCELERATION 23...

Page 75: ...ntrol Signal Settings instructions included in the 4 Menu Mode table of Section 6 6 Software Operation 1 Connectors The shape and pin count are both different See Figure 6 12 2 Pin Configuration Diffe...

Page 76: ...tact 19 Common 30 Common 18 Break contact 4 Break contact NORMAL 11 Make contact 25 Make contact 13 Common 26 Common 12 Break contact 2 Break contact ACCELERATION 8 Make contact 23 Make contact 10 Com...

Page 77: ...SECTION 6 OPERATION 64 263 13228 6 This page is intentionally left blank...

Page 78: ...7 7TROUBLESHOOTING 7 1 Nothing Happens After an Operation is Made 7 2 Power Failures 7 3 Vacuum Pressure Rise 7 4 Abnormal Noise and or Vibration 7 5 Alarm Detection Capabilities...

Page 79: ...sition Set the REMOTE LOCAL selection switch in the LOCAL position Other causes Check the power supply unit s ALARM lamp is not ON If an alarm is indicated correct the malfunction and reset the power...

Page 80: ...ower Interruption Before Being Supported by Touchdown Bearing Note 1 Times are typical for regenerative braking from the rated speed Actual times will vary depending on vacuum conditions inside the pu...

Page 81: ...ecelerates Note 1 Indicator lamp ROTATION NORMAL SPEED ALARM Before power failure indication goes on Before power failure indication goes on Before power failure indication goes on Lamp ON goes on Tur...

Page 82: ...metimes occurs and then makes the touch down bearing rotate slightly CAUTION When turning the POWER switch for the power supply unit on or off a clunk sound may be heard from inside the pump This soun...

Page 83: ...e of Warnings 1 ALARM lamp FIg 2 1 14 does not flash 2 Warning description is displayed on LCD 3 The remote control connector WARNING signal do not turn ON 4 The buzzer does not sound 5 Pump operation...

Page 84: ...e checking the magnetic bearing cable Never disconnect the cable while the power is on 5 3 3 14 AC LOW VOLTAGE 15 POWER FAILURE Power failure or reduction in the power supply voltage Wait for the powe...

Page 85: ...equipment causing noise is not used around the power supply unit pump unit motor cable or magnetic bearing cable 5 1 5 2 5 3 7 23 EI MOTOR OVERCURR 34 EI INV OVERCURR Overcurrent supplied to the moto...

Page 86: ...2 Y1 53 MB VIBRATION2 X2 54 MB VIBRATION2 Y2 55 MB VIBRATION2 Z 56 MB VIBRATION1 X1 57 MB VIBRATION1 Y1 58 MB VIBRATION1 X2 59 MB VIBRATION1 Y2 60 MB VIBRATION1 Z Strong external shock or vibrations I...

Page 87: ...N Y1 88 MB VIB WARN X2 89 MB VIB WARN Y2 90 MB VIB WARN Z Transient strong external shock or vibrations Continuous operation is possible However if the shock or vibrations occur frequently stop the pu...

Page 88: ...rotation signal could not be detected correctly 23 23 EI MOTOR OVERCURR Overcurrent ran through the motor 24 24 TMP PUMP TEMP Pump Temperature 31 31 EI BR OVERTEMP Increased temperature inside power...

Page 89: ...RATION2 Y1 53 53 MB VIBRATION2 X2 54 54 MB VIBRATION2 Y2 55 55 MB VIBRATION2 Z 56 56 MB VIBRATION1 X1 Excessive magnetic bearing vibration 57 57 MB VIBRATION1 Y1 58 58 MB VIBRATION1 X2 59 59 MB VIBRAT...

Page 90: ...ly self diagnostics 82 82 MB SELFCHECK Y1 83 83 MB SELFCHECK X2 84 84 MB SELFCHECK Y2 85 85 MB SELFCHECK Z 86 86 MB VIB WARN X1 Vibrations of the magnetic bearing become temporarily excessive Operatio...

Page 91: ...SECTION 7 TROUBLESHOOTING 78 263 13228 7 This page is intentionally left blank...

Page 92: ...S PROTOCOL A5 TABLE OF COMMANDS A6 COMMAND DESCRIPTION A6 1 Operation Mode A6 2 Operation A6 3 Run Status A6 4 Parameters A6 5 Events A6 6 Timer A6 7 History A6 8 Settings A6 9 Shared Answer A7 RS 232...

Page 93: ...de Also the speed setting can be made using the set value write function 3 Checking turbo molecular pump run status The serial interfaces allow the user to check the current turbo molecular pump s run...

Page 94: ...rs depending on actual operational environment Interface RS 232C Synchronous system Asynchronous Transmission rate 1200 2400 4800 9600 and 19 2k bits per second See Section 6 6 Software Operation 4 fo...

Page 95: ...RS 232 cable wiring connections Connector of power supply Connector of computer CD 1 RD SD ER SG DR RS CS CI 2 3 4 5 6 7 8 9 CD 1 RD SD ER SG DR RS CS CI 2 3 4 5 6 7 8 9 D Sub 9pin Female D Sub 9pin...

Page 96: ...1200 2400 4800 9600 and 19 2k bits per second See Section 6 6 Software Operation 4 for settings Character configuration Start bit 1 Data bits 8 Parity None Stop bits 1 Flow control None Number of powe...

Page 97: ...ications with certain cable lengths and RS 485 device types Connect the terminator to determine whether it is required 4 Cable Length Connection cables can be extended up to 1 2 kilometers but may be...

Page 98: ...ngth When the multi drop function is turned on the network ID portion of the sent character strings see Section A4 is enabled and the event communication function that notifies the power supply unit s...

Page 99: ...o the command is referred as the ANSWER Table A 1 Basic structure of Commands and Answers A4 2 Character to Character Time out 0 1 sec Delays between characters in the answer message longer that 0 1 s...

Page 100: ...wer is returned within 100 msec A4 6 Receiving Sequence The character string from the power supply unit is received after the COMMAND character string is sent When the carriage return code 0dH is rece...

Page 101: ...the network ID portion of a sent command to the network ID of the power supply unit with which communication is required All connected power supply units receive the sent command but only the power s...

Page 102: ...tion RC None Operation invalid RV None Run status Command Run status check CS None Answer Stop NS aa 1 Acceleration NA aa 1 Normal rotation NN aa 1 Deceleration NB aa 1 Failure Stop FS aa 1 Failure Fr...

Page 103: ...Table A 4 Table of Timers aaaaa Set value decimal See Table A 4 Table of Timers 9 aa Timer number decimal See Table A 4 Table of Timers bbbbb Timer value decimal See Table A 4 Table of Timers cccccccc...

Page 104: ...a temperature control function 09 Rotational speed 0000 to 0100 Percentage of rated rotational speed Example 80 0080 10 Rotational speed 0000 to 1000 Percentage of rated rotational speed x10 Example...

Page 105: ...00 to 99999 Read or change the timer value in the MENU MODE INTEGRAL TIMER MAINT CALL on the LCD display Example 0 00000 99999 99999 Item Number of bytes Data Comments 1 History number 2 01 to 99 Hist...

Page 106: ...22 in Table A 3 12 MB sensor output X1 4 0000 to 0100 Sensor output monitor value of magnetic bearing when a fault occurs Axis X1 Format is the same as No 26 in Table A 3 13 MB sensor output Y1 4 0000...

Page 107: ...D display 0000 NORMAL 0001 LOW SPEED 04 Low speed value 0025 to 0100 Read or change the set values in the MENU SETTINGS ROT SPEED LOW SPEED on the LCD display Example 25 0025 100 0100 05 ALARM signal...

Page 108: ...R showing the present operation mode Answers LL Operation mode LOCAL This answer is returned when the operation mode is LOCAL The operation mode can also be shifted to LOCAL mode by the front panel RE...

Page 109: ...rrence Answer is sent back Answers RA Acceleration Start This answer is returned by the power supply after the acceleration is started on a START operation RB Deceleration Start This answer is returne...

Page 110: ...Equivalent to the monitor mode E STOP run status on the LCD display The 2 character alarm code is returned as the sub command FF Failure Free run This answer is returned when the pump is free running...

Page 111: ...nated parameter number The 2 character parameter number 4 character parameter value is returned as the sub command in the format shown in Table A 3 Table of Parameters PV Invalid parameter number This...

Page 112: ...character timer value is returned as the sub command in the format shown in Table A 4 Table of Timers TV Invalid timer number This answer is returned if the designated timer number is invalid Returns...

Page 113: ...SV Invalid setting number This answer is returned if the designated settings number is invalid Returns the 2 character settings number as the sub command Commands SU Read user memo Reads the characte...

Page 114: ...on Mode Change Operation mode changed to REMOTE MJ01LD88 Invalid Request When in RS 485 mode MJ01LL90 Invalid Request When in LOCAL mode TMP Operation MJ01RT9E START Operation START operation from RS...

Page 115: ...PR03F D Read Parameter Parameter 03 rotational speed MJ01PA03270 0B5 Send Parameter Data 2700 27 000 rpm MJ01PR150 0 Read parameter Parameter 10 invalid number MJ01PV1504 Invalid parameter number Even...

Page 116: ...Motor current 1 0 A Pump temperature 00 C 3 Temperature control function Power supply has no tempera ture control function Temperature control set tem perature 75 C 3 Unbalance monitor Axis1 4 Axis2...

Page 117: ...n port only operation by the operation request command from computer is effective b The operation mode is shifted to RS 485 ON LINE in response to ON LINE request of operation mode command from RS 485...

Page 118: ...larity is reverse 3 Check the transmission specification of RS 232C at computer side A9 2 Sending and Receiving are Done But Receivable Messages are Invalid 1 Check the transmission rate of the power...

Page 119: ...Appendix A COMMUNICATIONS A 28 263 13228 A This page is intentionally left blank...

Page 120: ...trol Cable 4 24 H How to install the unit onto a rack 18 M Menu mode 43 50 52 57 Monitor mode 47 Motor Cable 4 P power failure 14 15 Power switch 9 R REMOTE signal 55 remote control signal 55 Remote C...

Page 121: ...Index Index 2 263 13228 Power Supply Unit INSTRUCTION MANUAL This page is intentionally left blank...

Page 122: ...o 99 or blank referred to in this declaration conforms with following directives and standards Machinery directive 98 37 EC amended by 98 79 EC EN292 1 1991 EN292 2 1991 A1 1995 EN1012 2 1996 Low Volt...

Page 123: ...t removed Type of attraction material Please fill out the etched material in etch system equipment GaAs substrate etc Please fill out the material of target in PVD system equipment sputter vacuum evap...

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