Shimadzu EI-D1003M, Instruction Manual

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Introduction
iii
Power Supply Unit
INSTRUCTION MANUAL
CAUTION
The standard power input voltage of the power supply unit EI-Dxx03M (the "xx" number
indicates the model of the corresponding pump) is AC 200 - 240 V
±
10%. Connect the power
supply unit to the voltage indicated on the rear panel label only.Connection of the power supply
unit to the incorrect input voltage can cause damage to the equipment. Supply the power via a
breaker (rating 15A).Please provide PE(Protective Earth) connection to the terminal of a "PE"
marked wire in final application.
CAUTION
If an EI-Dxx03M power supply unit is used in combination with an existing pump that was
operated in combination with a power supply unit not having the variable speed function (EI-
xx03MD), the variable speed function cannot be used. (the "xx" number indicates the model of
the corresponding pump.)
If the power supply unit is to be combined with an existing pump, modification and operational
inspections are necessary. Please contact Shimadzu for detailed information.
CAUTION
The following "CAUTIONS" are to prevent operation anomalies.
1.Do not interrupt the electrical power operating the turbo molecular pump while the turbo
molecular pump is in operation.
2.Do not connect or disconnect the turbo molecular pump control cable during the time the
power supply is "ON".
3.Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces electro-
magnetic pollution, noise, etc., in the immediate proximity of an operating turbo molecular
pumping system (pump, power supply, cables, etc).
4.When using the variable speed function to change the pump rotation rate, use a rotation rate
that does not cause resonance with other devices installed at the site.