Shimadzu EI-D1003M, Instruction Manual

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SECTION 6 OPERATION
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6
6.4.3 Shutting Down Sequence in REMOTE Mode
(1) Input the "STOP" signal (see Table 6-3) from the remote-control connector (Fig. 2-2 (24))
and check that the "BRAKE" signal (see Table 6-3) is ON.
(2) Wait until the "ROTATION" signal (see Table 6-3) turns OFF. At this time, the "BRAKE"
signal (see Table 6-3) also turns OFF.
(3) Turn off the power supply unit POWER switch (Fig. 2-2 (17)).
(4) Stop the cooling water flow.
When the turbo molecular pump is turned off after pumping a corrosive gas, maintain a vacuum
inside the turbo molecular pump or purge the interior of the pump with an inert gas.
Further, in such a case when a hydraulic rotary vacuum pump is used as backing vacuum
pump and there is possible reverse flow and diffusion of oil from the backing vacuum pump,
return the pump internal pressure to atmospheric pressure using dry nitrogen gas, after complete
shut-down of the pump [ROTATION lamp (Fig. 2-1 (11)) goes out], to prevent the turbo molecular
pump from being contaminated with oil vapor.
For shutting down the turbo molecular pump in running at high speed with infeed of dry nitrogen
gas to the pump, keep the nitrogen gas flow rate at 1500 mL/min maximum.
REFERENCE
ROTATION lamp (Fig. 2-1 (11)) goes out or "ROTATION" signal (see Table 6-3) turns off when
the pump rotational speed is 60rpm or less. Turning off the POWER switch (Fig. 2-2 (17)) permits
the pump rotor to be supported by the touch-down bearings.