2.1
Power Supply Unit
9
Power Supply Unit
INSTRUCTION MANUAL
2
(1) LCD - - - - - - - - - - - - - - - - - - - - - - - - - - - - Display operation monitor, alarm contents,
settings (see Section 6.6 "Software Operation")
(2) SELECT KEY - - - - - - - - - - - - - - - - - - - - - LCD display operation key, select menu
(3) + KEY - - - - - - - - - - - - - - - - - - - - - - - - - - LCD display operation key, previous menu or
addition
(4) - KEY - - - - - - - - - - - - - - - - - - - - - - - - - - - LCD display operation key, next menu or
subtraction
(5) SET KEY - - - - - - - - - - - - - - - - - - - - - - - - LCD display operation key, set menu
(6) START SWITCH - - - - - - - - - - - - - - - - - - - Press to start rotation of the pump's rotor.
(7) STOP SWITCH - - - - - - - - - - - - - - - - - - - - Press to apply the brake to stop rotation of the
pump's rotor.
(8) RESET SWITCH - - - - - - - - - - - - - - - - - - - Press to stop the buzzer after an alarm or
warning occurs. After remedying the cause of
the alarm, press the RESET switch again to turn
off the ALARM lamp. However, the buzzer
sounds again if the RESET switch is pressed
again before the cause of the alarm is remedied.
(9) DISPLAY SWITCH - - - - - - - - - - - - - - - - - LCD display operation key, change display
mode.
(10) POWER LAMP - - - - - - - - - - - - - - - - - - - Power On indicator lamp (green)
(11) ROTATION LAMP - - - - - - - - - - - - - - - - - Operation indicator lamp indicating that the
pump's rotor is running (green)
(12) NORMAL SPEED LAMP - - - - - - - - - - - - Operation indicator lamp indicating that the
pump's rotor is rotating normally (green)
(13) TEMP. CONTROL LAMP - - - - - - - - - - - - Not used with EI-Dxx03M.
(14) ALARM LAMP- - - - - - - - - - - - - - - - - - - - Alarm/warning lamp (yellow). See 10.6 "Alarm
Detection Capabilities." Lights when an alarm
occurs or flashes to give a warning.
(15) REMOTE/LOCAL SELECTION SWITCH - Remote/Local selection switch; The remote
mode allows the turbo molecular pump to be
controlled by employing the external control
connector (24) or serial interface connector
((22), (23)), located on the rear panel of the
power supply unit. The local mode allows
controlling the turbo molecular pump from the
front panel
(16) AC INPUT CONNECTOR- - - - - - - - - - - - Power cable receptacle
(17) POWER SWITCH - - - - - - - - - - - - - - - - - Power switch
(18) CONTROL CONNECTOR - - - - - - - - - - - Control cable receptacle
(19) MOTOR CONNECTOR - - - - - - - - - - - - - Motor cable receptacle
(20) EARTH GROUND - - - - - - - - - - - - - - - - - Electrical grounding terminal
(21) RS-485 CONNECTOR- - - - - - - - - - - - - - Serial interface connector (Note 1)
(22) RS-232C CONNECTOR - - - - - - - - - - - - Serial interface connector (Note 1)
(23) REMOTE CONNECTOR - - - - - - - - - - - - Remote-control connector
(24) CONTRAST - - - - - - - - - - - - - - - - - - - - - Adjusts the contrast of the LCD
(Note 1) See APPENDIX-A "COMMUNICATIONS" for details.
Summary of Contents for EI-D1003M
Page 9: ...viii 263 13228 This page is intentionally left blank...
Page 19: ...SECTION 1 OUTLINE AND DESCRIPTIONS 6 263 13228 1 This page is intentionally left blank...
Page 20: ...2 2IDENTIFICATION AND FUNCTION 2 1 Power Supply Unit...
Page 23: ...SECTION 2 IDENTIFICATION AND FUNCTION 10 263 13228 2 This page is intentionally left blank...
Page 24: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Power Supply Unit...
Page 26: ...4 4SPECIFICATIONS 4 1 Power Supply Unit 4 2 Standards Fulfilled...
Page 39: ...SECTION 5 INSTALLATION 26 263 13228 5 This page is intentionally left blank...
Page 77: ...SECTION 6 OPERATION 64 263 13228 6 This page is intentionally left blank...
Page 91: ...SECTION 7 TROUBLESHOOTING 78 263 13228 7 This page is intentionally left blank...
Page 119: ...Appendix A COMMUNICATIONS A 28 263 13228 A This page is intentionally left blank...