Pfeiffer Vacuum QMG 422 Operating Instructions Manual Download Page 7

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BG 805 981 BE (0201) QMG422.oi

2 Overview

The QMG 422 comprises two equipment families:

In the family 400 the analyzers QMA 400 and QMA 430 (8 mm rod diameter) and
QMA 410 (16 mm rod diameter) and the HF generators QMH 400/410 with mass
ranges of 128 to 2048 amu are used.

400

This symbol refers to information that is applicable only to Series 400
components.

IS 420

QC 422

420/421

QMH

400/410

Ionenquelle

Massenfilter

Ionennachweis

SEV

Faraday

QM S 422 mit Systembus

Optionen

EP 422/1

EP 422/2

cha nne ls

s el ec t

d etec t

m ass

a mp l if

tr ip

o utp ut

a ux

d i/d o

c on fig

e rror

e mi ss

V 1 ...V 6

V 7...

s em hv

io n sc r

c yc le

run /ha lt

fi la m

s em

ge neral

ion source

operation

m on o

m ulti

ha l t

VACUUM

For an explanation of the abbreviations see Sections 2.3 to 2.7

For ion counting the CP 400 ion counter preamplifier rather than the EP422/2
electrometer is used.

With a QMI 422 rather than QMS 422 no system bus, IS 420 ion source supply, HV
420/421 high voltage supply and options are available.

Family 400

Summary of Contents for QMG 422

Page 1: ...Operating Instructions Incl Declaration of Conformity BG 805 981 BE 0201 1 Quadrupole Mass Spectrometer System QMG 422 ...

Page 2: ...33 CS 422 PRG No BG 509 734 The above numbers can be read out with config TEST or the Quadstar 422 software The letter A Z at the end of the number represents the modification index which indicates the firmware level This operating manual remains valid as long as only the index changes In most cases the function is enhanced but also additional functions may be included that are not described in th...

Page 3: ...420 High voltage supply 18 3 10 HV 421 High voltage supply 18 3 11 DI 420 Digital Input 19 3 12 DO 420A Digital Output 19 3 13 AI 421 Analog Input 20 3 14 OH 421 Optical Hub 20 4 Installation 21 4 1 QMS QMI 422 21 4 2 Overall system 21 4 3 EP 422 22 4 4 CP 400 22 4 5 Cabling with QMA 400 23 4 6 Cabling with QMA 125 24 4 7 RS 232 C interface 25 4 8 LAN interface 26 4 9 Installing removing options 2...

Page 4: ...sages 60 7 4 Measurement signal problems 62 7 5 General problems 63 7 6 Service interventions 64 8 Maintenance 64 9 Decommissioning 64 10 Spare parts and accessories 65 Appendix 66 A Default parameter values 66 B Literature 68 C Index 69 Declaration of Contamination 70 Declaration of Conformity 71 ...

Page 5: ...tion on correct handling or use Disregard can lead to malfunctions or minor equipment damage Skilled personnel Instructions marked with this symbol may only be carried out by persons who have suitable technical training and the necessary experience to do it safely italic ITALIC ITALIC Function PARAMETERNAME PARAMETERVALUE Example mass FIRST 12 starting mass 12 of the mass scan 1 1 Symbols used ...

Page 6: ... forwarding agencies concerned Before handling any used instruments or components find out whether they are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts Pass on the safety information to other users Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the custodian or third parties disregard the inform...

Page 7: ...enquelle Massenfilter Ionennachweis SEV Faraday QMS 422 mit Systembus Optionen EP 422 1 EP 422 2 channels sel ec t detec t m ass ampl if tr ip o utput aux di do c on fig e rror e mi ss V1 V6 V7 sem hv io n sc r c yc le run halt filam sem general ion source operation m on o m ulti halt VACUUM For an explanation of the abbreviations see Sections 2 3 to 2 7 For ion counting the CP 400 ion counter pre...

Page 8: ... in either family The QMI 422 comprises the power supply and QC 422 quadrupole controller and allows computer operation of family 125 equipment QMH QMA 400 can be operated but without ion source and SEM supply The only option available is the AO 421 analog output or IC 421 ion counter The EP 422 amplifies the very small ion current signals of the analyzer to voltage levels that are suitable for fu...

Page 9: ...ce with the necessary operating voltages Programmable potentials short circuit proof Polarity reversible for positive and negative ions Normal mode degas mode Suitable for all ion source type of the QMA 400 The high voltage supply is installed in the QMS 422 and supplies the SEM with the necessary high voltage HV 420 For positive ions with SEM 217 HV 421 For positive and negative ions with SEM 217...

Page 10: ... off axis SEM and is connected to the IC 421 AI 421 16 channel analog input module DI 420 32 bit digital input module DO 420A 32 bit digital output module PI 420 Dual Pirani module for coarse and fine vacuum 8 PE 420 Penning module for high vacuum 9 OPA 200 network controller board for the ARCNET local area network LAN It is installed in the PC 6 5 Port optical hub star distributor for the ARCNET ...

Page 11: ...ion against water Standards Safety EN 61010 1 Protection class 1 pollution degree 2 overvoltage category II EMC EN 50081 2 EN 50082 2 Power 90 265 VAC 47 63 Hz 300 Wmax Dimensions 177 Weight 9 6 kg with QC 422 without additional modules Number of slots Total 17 used by QC 422 3 Matching to QMS 422 Backlit LCD display 4 lines of 40 characters each 5 status LEDs membrane keyboard Weight 0 75 kg Powe...

Page 12: ...D FIX Range AUTO Range 0 5 1 ms u 16 u 2 5 ms u 32 u 10 20 ms u 64 u 2 16 u 50 100 ms u 64 u 2 32 u 0 2 60s u 64 u 2 64 u 2 1 See STEPS 43 2 32 at mass range 2048 EP 422 or ext input Ion counter mass MODE FIX Range AUTO Range AUTO Range SAMPLE 0 5 ms 60 s 0 5 ms 60 s 1 ms 60 s STAIR 0 5 ms u 60 s u 2 ms u 60 s u 2 ms u 60 s u SCAN 0 5 ms u 60 s u 10 ms u 60 s u 20 ms u 60 s u PEAK 0 5 ms u 60 s u ...

Page 13: ...step response τ63 ts τ63 Filter time constant Settling time to 1 ts 4 τ63 NORMAL N Low pass average value FIR F Finite Impulse Response AVERAGE Average formed across several measurement cycles 400 Also refer to 16 Types Axial cross beam grid sputter process monitor Spec Spec Parameter sets 4 per ion source Potentials V1 V9 125 Also refer to 3 Types Axial cross beam grid sputter process monitor Emi...

Page 14: ...0 1200 2400 4800 9600 19200 baud Cable length 15 m shielded for baud rate 19200 baud 15 m shielded at reduced baud rate Only in conjunction with ASCII protocol Type ARCNET with fiber optics Connection JIS F07 TOSLINK Type of fiber PCF 200 230 or 200 300 or APF 980 1000 µm Distance 26 Baud rate 2 5 Mbit s Wavelength 800 nm Length of fiber optic conductor 0 1000 m Transmission distance 3000 mmax cas...

Page 15: ...ue after digital processing 0 10 24 V Rout 2 200 Ω short circuit proof scan Analog mass number signal 0 10 24 V Rout 2 200 Ω short circuit proof Laboratory sockets ø2 mm Connector ctrl ctrl 9 5 6 1 View towards QC D Sub 9 pin female Pin 5 ELM OUT 9 ELM OUT 4 EXT IN 8 EXT IN 3 RUN IN 7 2 EXT PROT 6 GND D 1 GND D CP Option Connection for CP 400 D Sub 25 pin male 14 1 13 25 View towards QC Pin 1 CH 1...

Page 16: ...tion inner V3 Focus V9 Wehnelt V5 Extraction Filament Filament Cathode 9 10 11 12 13 14 15 16 Filament common V4 Field axis V0 Ref Gnd Screen V8 Reserve V1 Ionref SPEC SRC ON V7 Deflection outer Electrode name Ref direction Range V Increm V Current mAmax Degas potential to V0 V V1 IONREF V1 V0 0 150 1 2 550 V2 CATH V1 V2 0 125 0 5 2 7 V3 FOCUS V1 V3 30 30 0 25 2 550 V4 F AXIS V1 V4 0 60 0 25 0 5 0...

Page 17: ... 7 A 10 8 A V 1 90 µs 0 5 mV 10 9 A 10 10 A V 2 1 9 ms 2 mV 10 11 A 10 12 A V 2 2 6 ms 50 150 mV Drift Offset doubles with each 10 C of temperature increase Noise typ 2 10 13 App unfiltered Input Installed directly on SEM feed throughs of the QMA Pulse width 10 nstyp pulse height 1 5 mV Impedance 50 Ω double pulse resolution 20 ns Protection against arcs in SEM with HV 420 421 QME 125 High voltage...

Page 18: ...i 2 kΩ Potential isolation 0 5 Vmax Between chassis and QMA GND Weight 0 42 kg Slots 3 Number per unit max 1 not simultaneously with HV 420 Supply 5 V 0 2 A 24 V 0 2 A 24 V 0 2 A HV connector SHV SEM voltage HV HV 0 7501 3500 V Resolution 1 V ripple 10 mVpp Admissible load 17 MΩ Current limitation 0 8 mA Settling time 0 7 s to 1 CD voltage to GND 6300 V Adjustable 4 7 6 4 kV Ripple 10 mVpp Admissi...

Page 19: ... 15 are internally connected common plus poles of the 4 insulated input groups SOURCE15 has no pin of its own Slots 1 Number per unit max 3 Supply 5V 0 4 A Outputs 32 open collector Darlington drivers Output signal max 28 VDC 100 mA Usat 1 7 V 100 mA low true Protection Zener diode 33V 1W and parallel diode 1A Insulation 30 Veff 60 VDC to GND and between groups Connector 2 16 outputs each 32 pin D...

Page 20: ...4 AGND0 1 2 3 10 9 7 6 5 11 13 9 5 13 4 12 Pin AGND8 AGND15 AIN0 AIN0 AIN1 AIN1 AIN5 AIN5 AIN4 AIN4 AIN3 AIN3 AIN2 AIN2 AIN7 AIN7 AIN6 AIN6 11 7 3 Example Connection to input AIN3 c7 AI 421 c8 AIN3 AIN3 Source a16 AGND Analog ground AGND must be connected to an admissible potential see above Insulation preferably to ground The cable must be shielded Ground the shield but not to AGND Twisted pair c...

Page 21: ...f a single power distributor is recommended The only exception is the computer but only if it is connected to the QC 422 by means of a fiber optic link Skilled personnel Make sure that the QMA the vacuum chamber and the entire equipment is always connected to the protective ground Hazardous voltages up to 600 V are present on the QMA If this unit can be touched by the user when the vacuum system i...

Page 22: ... remote operation if the temperature on the QMA is too high The EP 422 must be mounted outside the hot area M3 threads on the housing The cable must not be subjected to vibrations Increased noise levels must be expected 125 The same applies for the QME 125 1 with 6 m cable length however the maximum cable temperature is 70 C DANGER The CP 400 may not be operated with a high voltage supply that can...

Page 23: ...QMH ep1 farad In addition to 1 Configuration config SYSTEM DETECT SEM Module Connector Connection l m Module Connector Comments HV42x HV High voltage 3 QMA HV or 10 m HV421 HV short SHV CD remains open short HV QMA HV EP422 Input Meas signal QMA EP SEM control cable 0 8 QMH ep2 sem short TNC QMA EP FARAD if only 1 EP In addition to 1 Configuration config SYSTEM DETECT CD SEM Module Connector Conne...

Page 24: ...ration config SYSTEM DETECT FARAD Module Connector Connection l m Module Connector Comments QC422 QME control cable QME 3 QME QMS or 10 20 m QME QMA Analyzer 0 2 QMA QME ev 6 m EP422 Input Meas signal QMA EP ev 6 m control cable 0 8 QME EP In addition to 1 Configuration config SYSTEM DETECT CH TRON Module Connector Connection l m Module Connector Comments QME HV High voltage 0 3 QMA HV ev 6 m In a...

Page 25: ...P short TNC QMA EP without EP422 d o control cable 0 8 QME EP RS 232 C Link cable 9 pin Null modem Circuit in QC 422 D Sub connector Pin assignment CD RXD TXD DTR SGND DSR RTS CTS Case S GND n c n c n c 12 V 1 2 3 4 5 6 7 8 9 9 pin male 6 1 9 5 Front view of QC 1 not connected 2 Received Data 3 Transmitted Data 4 Data Terminal Ready 5 Signal Ground 6 not connected 7 Pin 8 8 Pin 7 9 not connected C...

Page 26: ...e the receivers of earlier LAN modules can be overdriven in short distances with the new modules this is no longer the case Set jumper X20 on the transmitter side as shown in the table and the diagram Setting X20 New FO module TODX 296 Old FO module TODX 294 Old PC interface with SMA connectors short 0 500 0 1 4 m 0 150 0 1 2 m not allowed medium 0 750 0 2 2 m 0 400 0 2 0 m 0 50 m long 0 1000 0 3 ...

Page 27: ...o table on 26 OH 421 No BG 442 455 T without X12 can only be used as central hub short 1 2 3 4 X6 R5 R3 3 4 1 2 X6 medium 3 1 2 4 X6 TODX296 X7 X10 same as X6 Unused FO connectors should always be closed off with a dummy plug to prevent disturbance by parasitic light Central hub Expansion hubs X1 X1 PC P C QC 422 QC 421 QMS 200 OH 421 OHA 200 OH 200 and OPA 200 are compatible Note the technical sp...

Page 28: ...atic bags Defects caused by the disregard of this warning will void the warranty 1 Detach the power plug on the QMS 422 wait 10 s 2 Remove the cover panel 3 Unfasten 6 screws of the front panel 4 Detach the electrical connections of the front panel Ground connection Flat pin terminal on the power switch note the pin assignment LED connection of the bus board connector J20 5 Establish the electrica...

Page 29: ...ched on After power off wait 10 s before you touch or move any modules Always tighten the screws firmly Before installation check the module address according to the specifications of the individual modules The analog output AO 421 and the ion counter IC 421 are mounted on one board Disconnect the power cable and wait 10 sec Install remove the QC 422 as described above Remove the connector cover s...

Page 30: ... the setting if necessary Do not change the settings of any other trimmers Up to 2 DI 420 can be installed Address setting Jumpers A6 9 10 inserted DI 420 1 174 600 octal rotary switch position 0 DI 420 2 174 604 octal rotary switch position 1 For connecting the inputs see technical specifications 19 Up to 3 DO 420A can be installed DO 420 is not suited Address setting Jumpers A9 10 inserted DO 42...

Page 31: ...the display contrast After a function has been selected e g mass key the function SETUP MASS its parameters here MODE SPEED RESOL and parameter values and the measured value of the selected channel are displayed Parameter menus depend on the parameter state in the picture below a changeover to MODE SAMPLE has been made In computer mode the parameters are displayed for approx 30 s when a key is pre...

Page 32: ... measured value display Accept new value Enter Change parameters in small increments and in large increments When the keys are pressed continuously the entire value range is scanned The new value becomes effective without The operation is subdivided into four function groups channels select detect mass amplif trip output aux di do config error emiss V1 V6 V7 sem hv ion src cycle run halt filam sem...

Page 33: ...ble or skip the channel during the measurement operation and copy parameter sets to different channels Parameters for analog output of measured values e g linear or logarithmic Parameters of the switching functions of each measurement channel di do config error general Keys for general settings such as configuration initialization maintenance and service and processing of error messages Operation ...

Page 34: ...is allows fast parameter change The ion source parameters of the set belonging to the active filament can be reviewed in the ion source group 125 Control of ion source supply for QME 125 Switch filament on off The filam LED is on when the emission is on and flashes when it is inhibited by the EXT PROT signal on the ctrl connector Choose measurement cycle mode or offset or adjustment measurement In...

Page 35: ...GE Electrometer in Auto Range AO MODE amplif MODE AUTO AUTO D and detect TYPE FARAD SEM LIN Linear output within range selected with O RNG LOG 3D Logarithmic 3 decades 3 V dec within range selected with O RNG LOG 8D Logarithmic 8 decades 1 25 V dec across all ranges With mass MODE SCAN or PEAK and SPEED 100 ms u with STAIR 10ms u a changeover to 3 decades occurs automatically Ion counter AO MODE L...

Page 36: ...ll pending error messages Sets all offset values to zero and consequently disables offset correction COPY TO CH Copies parameters of the selected channel to another channel 0 63 Target channel for copying process SURE Confirm copy function by pressing COPY TO ALL Copies the parameters of the selected channel to the channels cycle BEGIN END SURE Confirm copy function by pressing COPY TO SET Copies ...

Page 37: ...ination Status indication of the DI 420 input bits not dependent on measurement channel NEXT switches to the next 32 bits Display manual operation of the DO 420A output bits not dependent on measurement channel BIT Choose DO bit to be operated SET Set DO bit CLEAR Clear DO bits NEXT Advance to next 32 DO bits See TEST CS 422 Assignment of a switching function A or B to any bit of a DO 420A If seve...

Page 38: ... mA Emission current END With cycle FUNCT CYCLE and cycle MODE MULTI 0 63 Ending channel of the measurement cycle with cycle MODE MULTI See TEST CS 422 TEST DSP and TEST QMS See V5 See V4 Assignment of an ion source parameter set to filament 1 or 2 Applies also to the assignment with SPEC without filament FIL1 FIL2 With ion src MODE NORMAL SET 0 SET 3 Assignment of the ion source parameter set Fil...

Page 39: ...ctrometer signal must be analyzed with an oscilloscope or with Quadstar 422 in mass MODE SCAN N so that it can be optimized With mass MODE SCAN F the FIR filter provides for additional filtering See TEST SERVICE Starting mass number of the mass scan FIRST With mass MODE SCAN STAIR and PEAK 0 00 max 2047 99 The maximum value depends on the mass range The mass number is displayed as a decimal value ...

Page 40: ...t signal is formed The measurement resolution is up to 24 bits mantissa MASS With mass MODE SAMPLE 0 00 max 2047 99 The maximum value depends on the mass range Configuration specification of the existing measurement rage HF generator MASS R QME Typ MASS R QMH Typ MASS R QMH Typ 100 QME 125 1 128 QMH 400 1 1024 QMH 410 1 200 QME 125 2 512 QMH 400 5 2048 QMH 410 2 300 d o QMA 430 340 QMH 410 3 Opera...

Page 41: ...e measured value at the analog output mon MONITOR Not with detect TYPE PIRANI PENNING and A INPUT LIN LOG See AO MODE RNG CODE Range Code E 12 1V E 5 8V only for test purposes See TEST SERVICE Display next 32 bits with DIG IN and DIG OUT Next error message if more than one exists NODE Only with config CTRL MODE LAN 1 255 ARCNET node address See TEST SERVICE Offset correction see FUNCT cycle OPTION...

Page 42: ...EXTERN OFF 0 Integral mass spectrum DC OFF 1 255 Mass peak separation The peak width is approximately proportional to the set number Unit resolution at 20 30 with QMH 400 1 100 Often unit resolution suffices that is resolution of the adjacent peaks Decreasing the mass peak separation larger number causes wider peaks and higher sensitivity 125 RESOL Changeover Spectrum Integral OFF Integral mass sp...

Page 43: ...an SPEED Not with mass MODE SAMPLE or detect TYPE PIRANI PENNING A INPUT 0 5 1 2 5 10 20 50 ms u 0 1 0 2 0 5 1 2 5 10 20 60 s u With detect TYPE FARAD SEM EXTERN and amplif MODE FIX 10 ms u 60 s u With detect TYPE FARAD SEM EXTERN and amplif MODE AUTO AUTO D 2 ms u 60 s u With detect TYPE ION CNT and mass MODE STAIR 20 ms u 60 s u With detect TYPE ION CNT and mass MODE SCAN and PEAK STATE Enable o...

Page 44: ...ithm THRESH amplif MODE FIX and detect TYPE FARAD SEM or EXTERN 0 01 0 03 0 1 30 f s d With Fixrange in of the full scale deflection THRESH amplif MODE AUTO or AUTO D and detect TYPE FARAD SEM 1E 15 1E 14 1E 8 With Autorange in A THRESH detect TYPE ION CNT 1E0 1E1 1E7 In ion counting mode in counts per seconds cps TRIG Selection of measurement cycle start INTERN Start Stop is performed via CS 422 ...

Page 45: ...the HV 421 with config SYSTEM DETECT H SEM are inverted With SPEC and EMISS 0 the SPEC SRC ON signal on the QMA connector of the IS 420 is active In this way an external relay for changing over the ion source electrodes can be controlled TYPE Mode of switching functions 6 14 OFF Switching function not active The DO bit is available for other applications ABS A and B are independent switching funct...

Page 46: ...acement of components etc the following steps should be performed Configure the unit as follows if the system you are putting into service has not been factory aligned In the function group general press the config function Choose SYSTEM with the corresponding softkey Press QMA softkey and enter your QMA type with by pressing Press MASS R enter the mass range by pressing Under DETECT enter the ion...

Page 47: ...re are fulfilled 400 Optimize the filament protection for Degas mode as described above however with ion src D PROT rather than emiss E PROT Switch on Degas with ion src CTRL START and confirm with 125 4 and 3 The EP 422 is an amplifier for very small currents Its zero offset must be corrected occasionally This is intentionally not performed automatically to prevent periodic dead times in data acq...

Page 48: ... TYPE SPEC for positive ions or SPEC for negative ions With detect TYPE EXTERN you can capture analog measured values of a different unit in place of the EP 422 Connect the signal to the EXT IN pins of the ctrl connector on the QC 422 see p 11 amplif GAIN determines the gain 1 10 For experiments and tests a simulated spectrum according to the following diagram is available with config SIMUL INTERN...

Page 49: ...ad additional channels with the parameters of the first optimized channel Subsequently you only need to adapt a few parameters of the individual channels To achieve the shortest measuring time the channels with identical detector type electrometer range and SEM voltage should directly follow each other The measurement cycle time CYCLE TIME consists of the measurement and pause times of the involve...

Page 50: ...nated or can be calibrated In the following diagram of the measurement signals the raw signal elm 55 is represented always in FIX RANGE because it is difficult to follow in AUTO RANGE In all operating modes the measured values except on elm are multiplied times CALIB before they are output The mass MODE SCAN N SCAN Normal mode is used for recording an analog spectrum across the range defined with ...

Page 51: ...ber n of measurement cycles since RUN Beginning with the first measurement cycle it supplies a value that becomes more stable with increasing number of cycles In this way DWELL can be shortened without significant impairment of the filter effect faster settling time The following recursive formulas apply a n AVERAGE Mnew Mold Mnew Mold n b n AVERAGE Mnew Mold Mnew Mold AVERAGE Time constant of the...

Page 52: ...u should limit WIDTH per channel to approx 10 of the mass range In this way you can compensate deviations of the mass scale by correcting the corresponding starting mass FIRST With mass RESOL OFF an integral spectrum is created that can be used e g for total pressure measurement With cycle FUNCT ADJUST you can automatically optimize the mass number MASS to the peak maximum in SAMPLE or STAIR mode ...

Page 53: ...r expiration a status message is displayed The 3 main parameters THRESH RANGE MASS can be entered here directly You do no have to switch back to the channels group Symbols OK The adjust was successful Increase MASS slightly Decrease MASS slightly Increase Intensity or lower THRESH Decrease Intensity I Peak too narrow e g parasitic pulse or poor peak shape Repeat ADJUST If unsuccessful investigate ...

Page 54: ...eria a Imax I1 1 5 b I2 Imax 1 5 c Imax THRESH d No overdriving e I3 Imin 1 5 time tAdjust 16 DWELL lmax lmin l1 l1 1 5 8 64 MASS old 8 64 lmax 1 5 lmin 1 5 MASS new l2 l3 Start If you are not sure that a peak is located within the searched range first perform an ADJUST COARSE Start as described under COARSE however with cycle ADJ TYP FINE Procedure Signal mon If Adjust was successful the MASS of ...

Page 55: ...can assign one or several measurement channels output AO CH to each of the twelve AO channels If several measured values are assigned to the same AO channel they will be output sequentially Via the computer interface also data from the PC software can be output on the AO 421 Indicates the start of the measurement and is suitable for triggering an oscilloscope Proportional to the momentary mass num...

Page 56: ... 1 10X 0 1 2 3 4 5 6 7 8 9 10 1 1 10X RANGE 10X 1 10X 1 2 4 6 8 Formula a A V 0 5 LOG 3D b for Uo 1V 10V I 10 3 RANGE 10 0 3 Uo c 0 25V 1V I 1 333 10 3 RANGE Uo 0 5 d 0V 0 25V I 4 10 3 RANGE Uo Applicable with amplif MODE AUTO RANGE O RNG 0 1 0 1 2 3 4 5 6 7 8 9 10 1 10X 3 2 4 6 8 Formula b A V 0 5 10X 2 1 0 25 1 2 4 6 8 10X 1 1 2 4 6 8 10X 6 8 Formula c Formula d 10X RANGE LOG 8D e for Uo 0 10 V ...

Page 57: ...107 0 1 1 1 1 1 1 1 1 1 1 0 1 2 3 4 5 6 7 8 9 10 10 1 2 4 Formula l cps V 0 5 100 101 102 103 104 105 106 2 4 2 4 2 4 2 4 2 4 2 4 2 4 2 4 2 4 Formula m 10 2 detect TYPE EXTERN output Output format mass MODE AO MODE MONITOR Decades V Decade Formulas SCAN STAIR LIN 1 10 n SAMPLE PEAK LOG 3D 3 3 333 o p q LIN n for Uo 0V 10V UExtern 1 GAIN Uo 0 1 2 3 4 5 6 7 8 9 10 0 1 2 3 4 5 6 7 8 9 10 1 1 2 4 6 8 ...

Page 58: ...es can be monitored in mass MODE SAMPLE or with detect TYPE PI PE AI With halt the state of the switching functions is OFF Each measuring channel has two switching functions TRIP A and TRIP B These can be assigned to the output bits of the DO 420A modules as desired and also be interrogated via the computer interface If several switching functions are assigned to the same DO bit they are logically...

Page 59: ... LEVEL B LEVEL A LEVEL B TRIP A TRIP A OFF ON Measured value OFF ON TRIP B works inversely to A LEVEL A LEVEL B TRIP B TRIP B Measured value ON OFF OFF ON With trip DO A xx trip DO B xy assign the DO bits if DO 420A exists This requires two measurement channels and one DO 420A With select x choose the first measurement channel x Choose trip TYPE HYST With trip LEVEL A enter the lower threshold Wit...

Page 60: ...rmation only possible with SIMULATION Simulation mode activated No Warning Meaning comments 17 NO HV No HV 420 or HV 421 exists 18 NO IS No IS 420 exists 19 CANNOT DEG DEGAS not possible with FILAM 1 2 20 NO AUTO FILAM 1 2 not selectable with DEGAS 21 ONLY F1 Only one filament available 22 BUFFER Buffer management not OK Other operator information is displayed in suitable locations For many error ...

Page 61: ...4 Check by detaching cable Switch off unit for 2 min Ohm meter Insulation tester DVM High voltage probe 35 CD error CD Voltage HV 421 overloaded or defective See Error 34 36 Ion source error V1 V9 overloaded or defective Switch off the unit detach IS cable if error disappears if error persists Check insulation of Cable QMA F1 F2 on IS 420 or IS 420 defective 37 38 Filament 1 defective Filament 2 d...

Page 62: ...Loose ground connection EP input or below QMA connector plate Tighten correct Open shielding below QMA connector plate QMA 400 2 QMA 125 4 Electrometer signal not zero between peaks negative small peaks missing Offset not aligned Perform offset correction 47 Offset in range 10 12 very high Temperature of the EP 422 too high Decrease Bad insulation collector to flange good 1 GΩ Correct insulation f...

Page 63: ...eplace the defective unit Short circuit on bus or in wiring Defective power supply Trace Replace power supply manufacturer s warranty becomes void if the power supply is opened Fans running display on CS 422 is blank Contrast strongly out of adjustment Adjust contrast with CS 422 or its cable defective Replace QC 422 not correctly installed or defective 29 or replace CS 422 keys dead Control via i...

Page 64: ...ilters are to be cleaned before the air circulation becomes obstructed The cleaning interval depends on the local dust evolution Dry dust can easily be removed with the aid of a vacuum cleaner Skilled personnel If necessary remove the filters and wash them in a mild soap solution Dry them well before you reinstall them Defective filters should be replaced 65 The installed fans should be checked se...

Page 65: ... BG 448 199 T Ion source supply IS 420 BG 512 900 T Ion source cable 3 m BG 548 082 T Ion source cable 10 m BG 548 083 T Fuses F1 F2 2 5 A slow B 4666 444 HV 420 SEM high voltage supply BG 546 040 T Fuse F1 0 2 AT B 4666 422 HV 421 SEM high voltage supply BG 442 250 T HV cable 3m BG 541 978 T HV cable 10m BG 541 979 T AI 421 Analog input incl connector BG 442 240 T DI 420 Digital input BG 512 830 ...

Page 66: ...mass 0 3 F S LEVEL B trip 1 00 E 5 TYPE detect SEM LOG DEC output 3 DEC TYPE trip ABS MASS mass 14 00 WIDTH mass 16 Parameter Function Default value Parameter Function Default value BAUD config 2400 Bit s MODE config CS 422 DETECT config SEM NODE config 176 IS TYP config CB OPTION config NO MASS R config 512 QMA config 400 SEM FIL config INTERN 400 Parameter Function Axial CB Grid SPM Spec E PROT ...

Page 67: ...E FIL1 ion src SET 0 BEGIN cycle 0 FIL2 ion src SET 0 COPY TO SET ion src SET 0 FUNCT cycle CYCLE CYCLES cycle REPEAT MODE cycle MONO D EMIS ion src 10 0 mA MODE ion src NORMAL D PROT ion src 4 00 A SEM VOLTAGE sem hv 1500 V D TIME ion src 10 min TRIG cycle INTERN END cycle 63 TYPE ion src CB FILAM ion src 1 Operation ...

Page 68: ...125 BG 800 987 BE 4 Operating instructions Analyzer QMA 125 BG 805 988 BE 5 Communication protocol Quadrupole Controller QC 422 BG 805 986 BE 6 User s guide Network Controller Board OPA 200 vina02d3 7 Operating manual Optical Hub OHA 200 8 Operating instructions Pirani module PI 420 9 Operating instructions Penning Module PE 420 Ordering source Pfeiffer Vacuum GmbH Emmeliusstrasse 33 D 35614 Assla...

Page 69: ...polarity 48 IS 420 9 16 30 LAN interface 14 26 Literature 68 Maintenance 64 Mass scan modes 50 Measured value display 32 recording 58 Measured value output analog 55 lin log 55 Measurement cycle halt mono multi 48 Measurement signal problems 62 mon Monitor output 55 Network 27 Offset correction 47 OH 421 10 20 27 OHA 200 10 Operation 31 Options installing removing 28 Overview 10 Ordering numbers 6...

Page 70: ...vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay This declaration may only be completed in block letters and signed by authorized and qualified staff Copies Original for addressee 1 copy for accompanying documents 1 copy for file of sender Harmful substances gases and or by products Please list all ...

Page 71: ...complies with the provisions of the Directive relating to electrical equipment designed for use within certain voltage limits 73 23 EEC and the Directive relating to electromagnetic compatibility 89 336 EEC Quadrupole Mass Spectrometer System QMG 422 PTM265580 Harmonized and international national standards and specifications EN 61010 Safety requirements for electrical equipment for measurement co...

Page 72: ...Berliner Strasse 43 D 35614 Asslar Deutschland Tel 49 0 6441 802 0 Fax 49 0 6441 802 202 Original German BG 805 981 BD 0201 info pfeiffer vacuum de bg805981be www pfeiffer vacuum de ...

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