Mitsubishi MELFA CR1QA-700, Special Specifications Manual

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2-15
２ Robot arm
2.2.6 Clean specifications
(1) Types of clean specifications
The robot arm with clean specification is made by order. Please check the delivery schedule.
Table 2-8 ： Clean specifications
■ Precautions for use
1) When using a device that moves or rotates the robot arm, the down flow may not be secured because of the
air flow. In this case, the degree of cleanliness cannot be ensured.
2) A φ 8 coupling is provided in the base section of the robot arm for suction inside the robot arm. When using
the robot, connect this coupling with the vacuum generating valve and vacuum pump (furnished by the cus
-
tomer).
[1]When the inside of the robot arm is sucked using the vacuum generator.
Table 2-9 ： Specifications of vacuum generation valve （Confirmed in our company）
[2]If any vacuum pump is prepared by the customer, assure on the vacuum side flow rate 30 liters/min.(ANR)
or more.
3) When using the Mitsubishi standard option solenoid valve set, use the spare piping (Φ6 pneumatic hose) of
the primary piping to exhaust the air.
If the exhaust leaks into the robot arm, the degree of cleanliness could be affected.
Type Degree of cleanliness Internal suction Remarks
RV-3SQC/
RV-3SQJC
RV-3SQBC/
RV-3SQJBC
10(0.3μm) Concentrated suction with vaccum
generating valve.
Use it in the clean room with the
down flow (flow velocity 0.3 m/s
above).
The use of a vacuum generating valve
is recommended.
Type Maker
Air pressure
Note1)
Note1) Install the vacuum generating valve downstream of the downflow or install a filter in the exhaust
air section so that the exhaust air from the vacuum generating valve does not affect cleanness.
Recommended filter: Exhaust filter EF300-02, Koganei Corporation
MEDT 14 KONEGAI CORPORATION ・ Vacuum rate (supply pressure is 0.5MPa): 96l. / min
・ Ultimate vacuum (supply pressure is 0.5MPa): -84KPa