20
Sensor
Cartridge
Family
Sensor
Cartridge
Part No.
Gas Name
Maximum
Warm-up
Time
(minute)
Ammonia
MIDAS-S-NH3
Ammonia
10
Hydrides
MIDAS-S-ASH
Arsine
20
MIDAS-S-HYD
Diborane, Germane
20
MIDAS-S-PH3
Phosphine
20
MIDAS-S-SHX
Silane (20 ppm), Disilane
20
MIDAS-S-SHL
Silane (2 ppm)
20
MIDAS-S-HSE
Hydrogen Selenide
20
Mineral Acid (HF)
MIDAS-S-HFX
Hydrogen Fluoride, Boron Trifluoride,
Nitrogen Trifluoride, Tungsten
Hexafluoride
20
MIDAS-S-SF4
Sulfur Tetrafluoride, Chlorine Trifluoride
20
Mineral Acid (HCl)
MIDAS-S-HCL
Hydrogen Chloride, Boron Trichloride,
Dichlorosilane, Hydrogen Bromide
20
MIDAS-S-POC
Phosphorous Oxychloride
20
Halogens
MIDAS-S-HAL
Chlorine, Fluorine
10
MIDAS-S-BR2
Bromine, Chlorine Dioxide
20
Carbon Dioxide
MIDAS-S-CO2
Carbon Dioxide
20
Carbon Monoxide
MIDAS-S-COX
Carbon Monoxide
10
Hydrogen
MIDAS-S-H2X
Hydrogen
10
Hydrogen Cyanide
MIDAS-S-HCN
Hydrogen Cyanide
10
Hydrogen Sulfide
MIDAS-S-H2S
Hydrogen Sulfide
10
Nitric Oxide
MIDAS-S-NOX
Nitric Oxide
10
Nitrogen Dioxide
MIDAS-S-NO2
Nitrogen Dioxide
10
Oxygen
MIDAS-S-O2X
Oxygen
30
Ozone
MIDAS-S-O3X
Ozone
10
Sulfur Dioxide
MIDAS-S-SO2
Sulfur Dioxide
10
TEOS
MIDAS-S-TEO
TEOS
10
Flammables
MIDAS-S-LEL
Hydrogen, Methane
30
Table 5. Sensor cartridge warm up times