13
5.4 In-line filters
External filters must be used to protect the tubing from contamination. Use particulate filter part number
0780248 for normal gases and 1830-0055 for corrosive gases. Replace the filter every 3 months. Refer to
the table below for specific gases.
Target Gas
Recommended
maximum sample
line (m)
End of line
particulate filter
(P/N 0780248)
End of line
particulate
Teflon filter
(1830-0055)
Ammonia
10
YES
**
Arsine
30
YES
**
Boron Trichloride
5*
NO
YES
Boron Trifluoride
5*
NO
YES
Bromine
10
NO
YES
Carbon Dioxide
30
YES
**
Carbon Monoxide
30
YES
**
Chlorine
10
NO
YES
Chlorine Dioxide
10
NO
YES
Chlorine Trifluoride
5*
NO
YES
Diborane
30
YES
**
Dichlorosilane
5*
NO
YES
Disilane
10
YES
**
Fluorine
10
NO
YES
Germane
30
YES
**
Hydrogen (% LEL)
30
YES
**
Hydrogen (ppm)
30
YES
**
Hydrogen Bromide
5*
NO
YES
Hydrogen Chloride
5*
NO
YES
Hydrogen Cyanide
10
YES
**
Hydrogen Fluoride
5*
NO
YES
Hydrogen Selenide
30
YES
**
Hydrogen Sulfide
30
YES
**
Methane (% LEL)
30
YES
**
Nitrogen Dioxide
30
NO
YES
Nitrogen Oxide
30
YES
**
Nitrogen Trifluoride
30
YES
**
Oxygen Proficiency & Deficiency
30
YES
**
Ozone
5
NO
YES
Phosphine
30
YES
**
Phosphorous Oxychloride
5*
NO
YES
Table 4. In-line filter recommendations
