5
MEASUREMENT OPERATION
TMPM5200-2
5-157
2.
O
3.
Specify the lithography conditions in
n to write on.
indow. The cursor changes to the
+
mark.
Lithography in Vector mode
The following is the procedure for performing lithography in the Vector mode.
1.
Click on the Lithography button in the Advanced tab window.
The Lithography window opens.
bserve an image as usual and grab it.
the Settings frame.
Set parameters according to the specime
4.
Select Vector in the Write Mode frame; then click on the Define button in the
Vector Settings frame.
Move the cursor to the Display W
5.
Move the
+
mark to the initial point of the pattern that you want to write, and
click on the mouse; then drag it by holding the mouse to draw a line, and
click on the mouse again to determine the final point.
When determining the
cursor position, click on
the mouse.
Click on the mouse.
ine the pattern as explained above. To stop the pattern
6.
C
Lithogra
The
1.
C
b window.
2.
O
3.
Specify the lithography conditions in
.
Select Trace in the Write Mode frame; then click on the Write button.
Move the cursor to the Display Window. The cursor changes to the
+
mark.
5.
Execute lithography by moving the mouse while holding the left
mouse-button.
Click on the right mouse-button to stop the lithography.
6.
Confirm the written pattern using the ordinary image-observation procedure.
—— CAUTION ———————
To prevent the tip from colliding with the specimen surface, the speed
of the tip movement must not be faster than 200 nm/s.
You can continuously def
definition, click on the right mouse-button.
lick on the Write button to perform lithography.
Lithography will be performed along the defined pattern.
phy in Trace mode
following is the procedure for performing lithography in the Trace mode.
lick on the Lithography button in the Advanced ta
The Lithography window opens.
bserve an image as usual and grab it.
the Settings frame.
4