５
MEASUREMENT OPERATION
5-184
TMPM5200-2
■
You select source signals and set their characteristic measurement conditions. Since these
settings include the characteristic measurement conditions, the contents differ according
to the tab window.
AC
−
AFM tab window
Display Source
•
So
Select the signal sources for images. The selection of signals also affects the
number of source signals. You must sele
r Topography, RMS or Phase for
source signal 1, and either T
, RMS, Phase or None for source signal 2.
If source signal 2 is None, m
ment
ormed using only source signal 1.
The image display during measurement appears a shown in the left hand figure
below. The image size is 512
×
512 pixels, which corresponds to the 512
×
512 scan
mode in the advanced control mode.
If the source signal 2 is other than None, measurement is performed using both
source signal 1 and source signal 2. The image display during measurement is as
urce 1, 2
ct eithe
opography
easure
is perf
s
shown in the right hand figure below. The image size is 512
×
512 pixels, which
corresponds to the 2 Input (512) scan mode in the advanced control mode.
Source sign
al
1
Source signal
1
Source signal
2
Source signal 2 is None
If Source signal 2 is other than None
check box, the source signal will be obtained by performing
e backward scan (right -to-left scan) on the specimen.
If you select Topography for Display Source 1 and 2 for measurement, for example,
and you check the BW check box (backward scan) to a display source, and you do
If
•
BW
Usually, the source signal that is obtained by performing the forward scan
(left-to-right scan) on the specimen is used to display the image. However, if you
have checked the BW
th
