TMPM5200-2
5-37
■
Operat
ion flow chart
The following is the flow chart showing MFM observation.
Image obser vation
•
Setting the amount of
lift
•
Setting cantilever
excitation voltage
(when lifted)
Approach
Adjust photo
positio
diode
n
Check before approach
Store image
Grab image
Finish obser vation
Set scanning parameters
Adjust cantilever
resonance point
⇒
Adjusting PD
⇒
Tuning
⇒
Star ting approach
⇒
Grabbing
■
Checking before an approach
Before performing an approach, make sure that preparation has been completed
according to the procedure in Sect. 5.3, “Preparing for Measurement.”
•
Is the MFM cantilever properly mounted on the cantilever holder?
•
Has coarse approach been executed in such a way that the distance between the
cantilever tip and the specimen surface is within 0.3 mm or less?
•
Is the Z stage position within the approachable range?
•
Is the SUM value of the AFM amplifier unit at its maximum (–5.0 V)?
■
Adjusting the photodiode position
Carry out the procedure in Section 5.4.1, “Adjusting the photodiode position.”
