9.
Click on the IV tab.
eters for I-V measurement according to the following
a
ltage at which to measure I-V.
V to +1.0 V.
ce compensation in such a way that when the
rrent is 0 nA. Therefore, specify the Low and High
Voltages so that they encompass 0 V.
b.
Click on the
10.
Specify the param
procedure.
.
Specify the vo
•
Here, assume that the I-V measurement range is to be from –1.0
•
Enter –1.000 in Low Voltage/V and 1.000 in the High Voltage/V input box using
the keyboard.
This system executes capacitan
input voltage is 0 V, the cu
button in the Source selection box on the SPS Parameters
t from the pull-down menu.
c.
Click on the
window, and then select Linear curren
button in the Preamp Gain selection box on the SPS
Parameters window, and then select 1.00 V/nA from the pull-down menu.
This value determines the preamplifier gain for I-V measurement. If the
measured current gets saturated, decrease the gain.
d.
Select Auto by clicking on the radio button for Ramp Direction; then the
button changes to “ ”.
Ramp Direction determines the scanning direction of the bias voltage for I-V
measurement. If Auto is selected, scanning is performed from a voltage near the
voltage specified for Bias/V on the SPM Parameters window.
Suppose that Bias/V is set to 1.0 V, and Low Voltage/V to –1.0 V and High Volt-
age/V to 1.0 V.
If Auto is selected, the scanning will be performed from +1.0 V to –1.0 V.
If Up is selected, the scanning will be performed from –1.0 V to +1.0 V regardless
of the value specified for Bias/V.
If Down is selected, the scanning will be performed from +1.0 V to –1.0 V regard-
less of the value specified for Bias/V.
e.
Click on the
button in the No to Average selection box and select 1 from
the pull-down menu.
This specifies the number of I-V measurements for data averaging. Increase the
number particularly when data is noisy or when a current to measure is very
small.
TMPM5200-2
5-121
