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JEOL JSPM-5200, Instructions Manual

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JEOL JSPM-5200 Instructions Manual Download Page 139

５

  MEASUREMENT OPERATION 

5-76

   TMPM5200-2 

■ 

Lithography 

When certain values are given to the bias voltage and tunneling current, the specimen 
surface structure may change due to the displacement or adsorption of atoms. 
“Lithography” lets you lithograph (or write on) the specimen surface using this 
phenomenon. 

 

 
In SPM lithography, there are two modes, namely, the vector mode and the trace mode. 
The procedure for lithography is shown in the flow chart below: 

 

Star t

Define a pattern ?

Vector mode ?

Use stored

pattern ? 

Trace 

mode 

End

Write

Define 

OK ? 

Save 

Y

N

Y

N

N

Y

Y 

N

Open

 

Summary of Contents for JSPM-5200

Page 1: ...For the proper use of the instrument be sure to read this instruction manual Even after you read it please keep the manual on hand so that you can consult it whenever necessary ITMPM5200 2 MAY2004 171...

Page 2: ...JSPM 5200 SCANNING PROBE MICROSCOPE TMPM5200 2...

Page 3: ...cations believed cor rect at the time of publication is subject to change without notice due to im provements made in the instrument In order to assist us in preparing future documentation please advi...

Page 4: ...t achieve a task A diamond indicates a single operation that achieves a task File The names of menus commands or parameters displayed on the screen are enclosed in double quotation marks File Exit Sel...

Page 5: ...4 PREPARATION FOR OBSERVATION 4 1 PREPARATION FOR STM OBSERVATION 4 1 4 1 1 Outline 4 1 4 1 2 Mounting the Specimen Holder 4 3 4 1 3 Mounting the Scanner Holder 4 4 4 1 4 Mounting the SPM Head Unit 4...

Page 6: ...37 5 4 3 VE AFM Tab 5 42 5 4 4 SKPM Tab 5 46 5 4 5 Advanced Tab 5 55 5 5 CONTACT AFM MODE 5 81 5 5 1 Contact Mode Tab 5 81 5 5 2 Viscoelasticity Tab 5 92 5 5 3 Lateral Modulation FFM Tab 5 96 5 5 4 E...

Page 7: ...ghness 6 61 6 8 GEOMETRY MENU IMAGE PROCESSING FUNCTION 6 63 6 8 1 Translate 6 63 6 8 2 Rotate 6 63 6 8 3 Mirror 6 64 6 8 4 Resize 6 65 6 8 5 Pad Points 6 66 6 8 6 Drift Correction 6 67 6 8 7 Average...

Page 8: ...how FFT 6 108 6 14 DISPLAY MENU DATA PROCESSING FUNCTION 6 109 6 14 1 Plot 6 109 6 14 2 Plot Parameters 6 109 6 15 SELECT MENU 6 111 6 16 WINDOW MENU 6 112 6 17 SPM SCAN MENU 6 113 6 18 HELP MENU 6 11...

Page 9: ...TION ISOLATOR 8 2 8 2 1 Compressor optional 8 2 8 2 2 Vibration Isolation Table 8 2 8 3 SPM HEAD 8 3 8 3 1 Laser Beam Focusing 8 3 8 3 2 Mirror Angle Adjustment 8 4 8 4 CCD CAMERA OPTIONAL 8 5 8 4 1 I...

Page 10: ...are labeled with illustration signs as shown below Do not touch the parts labeled with these signs Beware of electric shock Beware of high temperature Beware of getting caught Do not disassemble Use...

Page 11: ...using an optional evacuation system At the worst there is a risk of deterioration of insulation at the tunneling current detector and scanner high voltage circuits causing insufficient instrument per...

Page 12: ...of two cantilevers long and short be sure to remove the long one with a pair of tweezers Otherwise the top of the long cantilever touches the specimen before the short one does Be sure to insert the c...

Page 13: ...er 1 mw power Follow the instruction manual to avoid getting laser irradiation bombardment The following labels are found on the AFM base unit side panel Two ports for laser irradiation are provided o...

Page 14: ...before the short one does When applying conductive paste to the cantilever and the cantilever holder be sure not to apply the conductive paste to the cantilever piezoelectric element When replacing a...

Page 15: ...1 GENERAL 1 1 INTRODUCTION 1 1 TMPM5200 2...

Page 16: ...without making any modification of the basic unit Moreover it is possible to observe a specimen that is being heated or cooled by attaching a simple optional accessory You can handle quite a variety...

Page 17: ...2 SPECIFICATIONS AND INSTALLATION REQUIREMENTS 2 1 PRINCIPAL SPECIFICATIONS 2 1 2 2 COMPOSITION 2 2 2 3 INSTALLATION REQUIREMENTS 2 5 2 4 STANDARD INSTALLATION DIAGRAM 2 6 TMPM5200 2...

Page 18: ...by point lift mode Lateral modulation FFM optional Viscoelasticity optional Surface potential difference optional Electrochemistry optional Line by line lift mode optional STM STM mode Topography imag...

Page 19: ...ded as standard Detection method Light lever Laser beam source Class 2 semiconductor laser beam red Laser detector Four segment photodiode Cantilever holder Holder used in common for contact mode and...

Page 20: ...capability Contact mode Constant force mode constant height mode force curve mode and friction force curve mode Force setting 10 8 to 10 11 N AC mode Detection method Amplitude detection phase detecti...

Page 21: ...profiling Single multiple broad and extra Image enlargement Image extracting FFT function Fourier transform inverse Fourier transform and win dowing Surface roughness measurement Entire area and desig...

Page 22: ...eptacle with a grounding terminal When an optional evacuation system is installed 1 5 kVA 2 2 receptacles with grounding terminals Fluctuation 10 or less Grounding terminal 100 ohms or less Cable leng...

Page 23: ...0 mm or higher Entrance 800 mm W 1 800 mm H or larger When an optional evacuation system is installed it is necessary to provide a space of 500 mm or more between the rear of the instrument and the wa...

Page 24: ...S OF COMPONENTS 3 1 OVERALL CONFIGURATION 3 1 3 2 MAIN UNIT 3 2 3 2 1 SPM Unit 3 2 3 2 2 AFM Amplifier 3 9 3 3 OPERATION UNIT 3 13 3 3 1 SPM CONTROL System 3 14 3 3 2 Computer System 3 16 3 3 3 Oscill...

Page 25: ...f this instrument are given in this chapter Please refer to this chapter when you read the operating procedures below 3 1 OVERALL CONFIGURATION This instrument is composed of a Main unit a Operation u...

Page 26: ...AND DESCRIPTIONS OF COMPONENTS I 3 2 TMPM5200 2 3 2 MAIN UNIT 3 2 1 SPM Unit The SPM unit is composed of a vibration isolator an SPM base unit and an SPM head unit SPM head unit AFM amp Vibration iso...

Page 27: ...roach thumbscrew SPM head unit connectors Port for cooling system optional Specimen stage coarse shift knobs Photodiode Y axis positioning knob Specimen stage approach unit Utility ports Gas inlet out...

Page 28: ...stage movement is shown below X axis coarse shift knob Y axis coarse shift knob Specimen stage X axis Y axis Manual approach thumbscrew This screw moves the specimen stage up and down Stage moves upwa...

Page 29: ...by a mechanical shock Scanning direction The scanning direction in relation to the specimen stage axes is shown in the figure below at a scan angle of 0 Stage Y axis Stage X axis Scanning start point...

Page 30: ...he user s option They are usually covered with caps Regarding the size and details of the utility ports refer to Chapter 8 APPENDIX SPM head unit The SPM head consists of a laser source a detector and...

Page 31: ...direction per revolution of either knob The focusing screw is used to focus the laser beam on the detector For more information on focusing refer to Chapter 8 3 1 Laser Beam Focusing Photo receiver Th...

Page 32: ...the screw For more information on mirror adjustment refer to Chapter 8 3 2 Mirror Angle Adjustment Preamplifier A preamplifier for the photodiode detector output and a preamplifier for STM tunneling c...

Page 33: ...control To SPM base FA A FA D PR EXT LIFT CANTI FA3 FA2 FA OSCO AFM AMP SUM RMS FFM AFM FMD PHASE LD ON HEAT Front panel Rear panel Front panel LD ON switch Turns the semiconductor laser source in th...

Page 34: ...of the two lower detector elements is indicated If the laser beam irradiates the center of the detector the indication is zero If the beam irradiation point shifts upward the indication becomes negat...

Page 35: ...conversion circuit the indicated value corresponds to the lock range frequency PHASE The indicated value corresponds to the displacement between the phase of the excitation signal to the cantilever a...

Page 36: ...ine wave with amplitude 10 V for the voltage applied to the cantilever vibrating piezoelectric element when the Slope detection method is used in the AC mode AFM operation You can turn the OSCO termin...

Page 37: ...tes an SPM CONTROL system that controls the Main unit a computer system and a console display It also accommodates power supplies for optional accessories for lateral modulation FFM and viscoelasticit...

Page 38: ...low To AFM amp To AFM amp To SPM base DT A FA A LOCK CH2 ADZ ADY ADB ADX CK FA D BS D MT PR DT D Z120 SG AC100V 2A F1T2A To computer POWER Rear panel To AFM amp To SPM base Front panel To SPM base Fro...

Page 39: ...electric scanner The maximum input voltage is 10 V However the maxi mum voltage that can be applied to the piezoelectric scanner is 150 V in total Check the superimposition of the input signal to the...

Page 40: ...s width The JSPM 5200 does not use the following two terminals BS D SG 3 3 2 Computer System A video printer a video recorder a video converter a video monitor and an MO disk are optional attachments...

Page 41: ...the CRT focus Adjust the focus in such a manner that the trace on the CRT looks the sharpest SCALE ILLUM A knob for adjusting the CRT illumination Usually this knob is not used Leave the knob turned...

Page 42: ...nput to the CH2 terminal the signal selected with the SELECT knob on the SPM CONTROL system is dis played Usually set it to the CHOP position INPUT Same as above Vertical position control Same as abov...

Page 43: ...et to INT Usually VERT both switches are pressed is used VARIABLE A knob for varying the scanning rate continuously Usually push the knob and turn it clockwise to the limit the CAL position HOLD OFF A...

Page 44: ...ing the SPM Head Unit 4 5 4 1 5 Mounting the Cantilever 4 5 4 1 6 Mounting the Tip 4 6 4 1 7 Inserting the Cantilever Holder or the Tip Holder into the SPM Head Unit 4 7 4 1 8 Mounting a Specimen 4 8...

Page 45: ...is section outlines the preparation for SPM observation using the JSPM 5200 from SPM head unit setting to specimen loading 1 Attach an appropriate scanner holder to the SPM base according to the scann...

Page 46: ...4 PREPARATION FOR OBSERVATION 3 Insert the cantilever holder or the tip holder to the SPM head unit 4 Insert a specimen stub into the scanner holder 4 2 TMPM5200 2...

Page 47: ...of the scanner holder The engraving on the front of the scanner holder cap identify type of the scanner Fastening screws Scanner holder Specimen holder When mounting the specimen holder on the scanner...

Page 48: ...be observed if you have optional scanner holders Insert it into the specimen stage along the keyway Then lock it with the two fastening screws Engraving Keyway Specimen stage Fastening screw Scanner...

Page 49: ...ead unit guide rail Stopper Tighten Loosen Connector to SPM head unit 4 1 5 Mounting the Cantilever Below is the procedure for mounting the cantilever on the cantilever holder in order to perform AFM...

Page 50: ...n of the piezoelectric element 3 Push the spring retainer vertically If you force it diagonally the ceramic might be damaged 3 Release the spring retainer slowly to lock the cantilever in place 4 1 6...

Page 51: ...specimen stage is lowered to a low enough position If it is not move the specimen stage downward by turning the manual approach thumbscrew SPM head unit Specimen stage moves upward UP Manual approach...

Page 52: ...g with the cantilever or the tip confirm that the specimen stage is set at a low enough position If it is not move the specimen stage downward by turning the manual approach thumbscrew as shown in Sec...

Page 53: ...et an electric shock due to the high voltage applied to the specimen WARNING 1 Click on SPM Scan on the main menu of the WinSPM software and select Scan from the pull down menu Then select the Advance...

Page 54: ...r beam will be emitted 2 Adjust the laser illumination position adjusting knobs so that the laser beam illuminates correctly the tip of the cantilever while watching the illumination position through...

Page 55: ...m using the knobs so that the laser beam spot illuminates the edge of the cantilever base Cantilever base Cantilever Shift the laser beam spot so that it illuminates the edge of the cantilever base co...

Page 56: ...sition adjustment is wide enough to handle almost all cantilevers If the laser beam position fails to shift even though the laser beam illumination adjustment knobs are turned the laser beam position...

Page 57: ...proper angle on the cantilever holder CAUTION Although the focus of the laser beam has been adjusted in the factory before shipment the beam may be out of focus for some reason If so readjust the beam...

Page 58: ...wn below appears Adjust the position of the photodiode using the photodiode positioning knobs for X axis and Y axis so that the red spot enters the blue region in the center of the window X axis Y axi...

Page 59: ...aser beam position according to Section 4 2 1 Adjusting the Laser Beam Position Photodiode adjustment procedure Photodiode 1 To roughly adjust the photodiode position watch the laser beam spot on the...

Page 60: ...d properly does it touch the innermost wall Especially in the case of the cantilever holder its insertion becomes difficult when the holder gets near the innermost wall due to the electrode on the hol...

Page 61: ...broken Check the cantilever storage condition according to Chapter 8 MAINTENANCE If all these attempts are unsuccessful replace the cantilever 4 2 3 Rough Approaching 1 Using the Coarse Stage functio...

Page 62: ...18 5 2 7 CCD Camera 5 18 5 2 8 Digital Control MFM unit 5 19 5 3 PREPARING FOR MEASUREMENT 5 20 5 3 1 Starting the System in Measurement Mode 5 20 5 3 2 Resetting the Controller 5 21 5 3 3 Confirming...

Page 63: ...159 5 8 TERMINATING MEASUREMENT 5 165 5 9 TERMINATING OPERATION 5 166 5 10 REFERENCE 5 167 5 10 1 SPM Scan Menu 5 167 5 10 2 SPM Parameters Simple 5 177 5 10 3 SPM Parameters Advanced 5 202 5 10 4 Se...

Page 64: ...r saving the calibrated values of the scanner Starting special measurement mode to calculate the calibrated values of the scanner Altering the power supply voltage Setting altering or saving the calib...

Page 65: ...on the left button twice in rapid succession Dragging a mouse This is an operation in which you move the cursor while you hold down the mouse button Input window This is an area for entering text and...

Page 66: ...ider You can change the parameter values in the parameter setting slider shown below using either the keyboard or the mouse Input window Click the mouse and enter the desired value using the keyboard...

Page 67: ...ministrator is stored in the initial state of WinSPM Be sure to store a new user name before you begin to use the system Creating a new user name The procedure for storing a new user name is as follow...

Page 68: ...rd An already stored password can be changed as follows 1 Start the WinSPM system and enter the user name and password 2 Click on the Change Password button The dialog box changes as shown below if th...

Page 69: ...me will be stored Deleting a user name The procedure to delete a user name which is already stored is as follows 1 Start the WinSPM system and enter the user name and the password Click on the Delete...

Page 70: ...or frequency detection mode In SPM measurement you can perform the following measurements Shape measurement SPS Scanning probe spectroscopy measurement SPS mapping measurement MFM Magnetic forth micr...

Page 71: ...le Shape measurement SPS Scanning probe spectroscopy measurement SPS mapping measurement No optional measurement is available in the standard system configuration All SPM Mode In this mode the above t...

Page 72: ...pens the tab window containing controls for detailed items of each operational mode AC Mode MFM VE AFM and SKPM tab windows These windows automatically set parameters required for each operational mod...

Page 73: ...window is used mainly for UHV SPM measurement All of the parameters should be set by the user This enables you to make more detailed settings When all of the SPM operational modes are selected only t...

Page 74: ...s the data Report Creates the report Copy Transfers a displayed image to the clipboard Data copy Transfers data to the clipboard Data paste Transfers data from the clipboard Display settings Opens the...

Page 75: ...e oscilloscope on the software Clicking on the Oscilloscope Control and Oscilloscope 2 buttons on the WinSPM window opens the Oscilloscope Control and Oscilloscope windows as shown below enabling you...

Page 76: ...nu automatically changes according to the sensitivity of Z of the presently selected scanner 4 Double click on the Offset numerical value input box and enter 0 0 using the keyboard 5 Once you have com...

Page 77: ...e signal You usually select TRACK DISPLAY1 key This key selects which value to display out of the set value and the CH1 output value The presently displayed value corresponds to the one for which the...

Page 78: ...en you are operating the lock in amplifier perform the following procedure 1 Press the CONFIG key at the right end of the Lock in Amplifier panel and then press the RS232 key 2 Confirm that 0 is displ...

Page 79: ...el 7265 ut of the front operation panel Cursor keys to set parameters arameters OSC OUT terminals Modulation oscillator output terminals Setting Mod 232C of lifier The RS 232C is and set before shipme...

Page 80: ...layed a parameters in accordance with the list below BAUD RATE 19200 bps DATA BITS 7 1 PARITY DELIMITER 044 RS232 ADDRESS 1 ECHO ON PARITY EVEN PARITY PROMPT ON ng software Model 7265 Setti Scan in th...

Page 81: ...box Click on SPM Scan in the main menu bar to open the pull down menu Click on Device Setup to open the Device Setup dialog box Check the Tempera ture Controller box and then click on the OK button T...

Page 82: ...ine scan is recorded The topography should be traced with the probe lifted up The digital MFM unit is used for this purpose When the digital MFM unit is in use in the line by line lift mode signal fee...

Page 83: ...ake sure that the specimen is mounted and that the cantilever probe is fastened in place and that they are in position before starting the approach Turn on the SPM controller and the The computer does...

Page 84: ...unless they are correctly selected Likewise the piezo element power supply voltage depends on the instrument 150 V or 200 V If you ignore the confirmation there is the possibility of damaging the syst...

Page 85: ...tage has already risen to the top position Befo an approach confirm th f the Z s in the approachable range by means of the following procedu tage n indicato he SPM Parameters Make sure that the positi...

Page 86: ...e and so on Correction of tilt due to cilloscope power 2 4 Adjust TRACE ROTATION with a screwdriver so that the trace becomes horizontal to the scale axis on the display Input adjustment 1 Set the MOD...

Page 87: ...t icon 4 Adjust the ve 4 Adjust the ve positioned at the center of the display positioned at the center of the display the the The SPM Parameters window will appear 2 Click on the Advanced tab at the...

Page 88: ...windows belong to the AC AFM mode and can be opened by clicking on each tab in the SPM Parameters window 5 4 1 AC Mode Tab Topographic observation in AC AMF mode can be performed using the AC Mode tab...

Page 89: ...perly mounted on the cantilever holder Has coarse approach been executed in such a way that the distance between the cantilever tip and the specimen surface is 0 3 mm or less Z stage position within t...

Page 90: ...ay Window will appear 2 Adjust the photodiode position adjustment knobs so that the red spot enters he blue zone at the c t enter Also confirm that the SUM value of the AFM amplifier unit is as large...

Page 91: ...100 00 us This is the parameter that determines the scan speed Naturally this parameter should be changed according to the observation area and the unevenness of the specimen surface Filter Hz Click...

Page 92: ...cantilever characteristic frequency Click on the button in the Source 1 selection box and select Phase from he pull down menu lick on the t 2 C button in the Source 2 selection box and select None The...

Page 93: ...Display Window A caret symbol appears and a message window opens adjustment is complete djust the photodiode position adjustment knobs so that the red spot enters 4 Click Autotune dialog box a AC mod...

Page 94: ...nd in Sect 4 1 Adjusting the photodiode position If the Auto Tune Failed message still does not disappear Tuning g that is opened by clicking on Cantilever Autotune Setup in the SPM Scan pull down men...

Page 95: ...n the Close button Considerations in using the Approach On button When the Approach On button is displayed in gray Click on the Retract Off button Unless you click on the Retract Off button the Z scan...

Page 96: ...t You can set the distance between the specimen and the cantilever tip using the Reference function If the RMS value is 5 6 V provided that it is set to 1 6 V initially when the cantilever is away fro...

Page 97: ...specimen Terminating observation Terminate observation according to the following procedure 1 Stop scanning 2 Click on the Retract On button to retract the cantilever tip 3 Click on the Out radio but...

Page 98: ...ERATION TMPM5200 2 5 35 Stage moves upward SPM head unit Groove Manual approach screw Cantilever holder Tip holder Stage moves downward SPM 5200 The example illustrated above show the manual approach...

Page 99: ...that is open Parameters window To do this however an point by point lifting function lifting at every picture element is included as standard e observation MFM imag In general MFM observations are per...

Page 100: ...rabbing Checking before an approach Before performing an approach make sure that preparation has been completed according to the procedure in Sect 5 3 Preparing for Measurement Is the MFM cantilever p...

Page 101: ...b key to fina button in the select a numerical value near 5 000 nm Clock ms Click on the Scan Size selection box and The maximum scanning range depends on the scanner installed In actual practice the...

Page 102: ...ain TOPO button and select 1 ow you have completed the parameter settings for observing an MFM image in C mode Adjusting a cantilever oint Carry out the procedure in Section 5 4 1 Adjusting a cantilev...

Page 103: ...be observed clearly and sharply in AC mode Observe the image in AC mode in advance to establish the best observation parameters Then carry out the same procedure as in Section 5 4 2 Image observation...

Page 104: ...ce frequency about 300 kHz of the cantilever a d the modulation fr quency several tens of kHz for viscoelasticity observation Mounti In or fix the sample rmly to the specimen stub using conductive pas...

Page 105: ...nitialized If an error message appears be sure that the power supply is on the cables are connected securely and the Device Setup window is properly set 3 Specify the parameters according to the follo...

Page 106: ...a Press the A button of the Input selection switches b To put the Amplifier into the FLOAT state press the ct the 108 and to the p second until the amplifier starts initializing parameters ters accord...

Page 107: ...ENSITIVITY ht up from 1 mV 3 image as well as an optimal viscosity image Oscillation frequency OSC Frequency kHz If the difference between elasticity and viscosity of the specimen is small for example...

Page 108: ...n Section 5 2 5 Lock in Preparation fo A current detection amplifier operational amplifier is incorporated in the SPM head The cantilever is groun s amplifier Selecting a er If a cantilever has a long...

Page 109: ...ever to the cantilever holder insert the cantilever holder into the SPM head until it stops Affixing the specimen To properly observe a surface potential image it is essential that the specimen be tig...

Page 110: ...dow is properly set Specify the parameters according to the following table Sensitivity 10 mV Time Constant 5 ms Ref Phase 0 000 Ref Frequency F Output Acos Asin Frequency kHz 40 000 Amplitude V 1 000...

Page 111: ...able check box to activate the lock in amplifier It will take about one second until the amplifier starts initializing parameters If an error occurs confirm connections and software settings 5 Specify...

Page 112: ...e KFM parameters t K C L Filter KHz 3 Gain 3 1 Click on the KFM button in the SKPM tab window to open the KFM window hen specify the following items FM Feedback on PD Polarity Reverse when the sample...

Page 113: ...clicking on the button when the analog meter registers positive If it does not indicate 0 when the phase is 90 or 270 carry out the automatic phase adjustment again 6 Confirm that the reading of the a...

Page 114: ...s up raise its sensitivity using the Lock In Amplifier window 9 Set oscilloscope optional CH2 to AUX1 to monitor CH2 then reset Filter and Gain in the KFM window according to the potential resolution...

Page 115: ...xceed the The urface potential of the comparatively flat set its Loop Gain to 2 If the sample is uneven set its Loop Gain to 8 If the to ographical image does not become stable the tip catches increas...

Page 116: ...AC DC t t contact potential difference is q sin From the above equation the electrostatic force F is given as follows z AC DC C t V q V F 2 sin 1 2 This equation can be expanded as follows t V z AC 2...

Page 117: ...e in Sect 5 3 Preparing for Measurement Is the cantilever for the AC mode properly mounted on the cantilever holder Has coarse approach been executed in such a way that the distance between the cantil...

Page 118: ...AFM or SKPM can be selected from this selection box Selectable modes depend on the attachments connected Selecting Normal sets the system to topography mode 4 Click on the button in the STM AFM select...

Page 119: ...nu p etter the image of a specimen which has irregularities In this case however the feedback circuit easily oscillates Loop Gain is the parameter that determines the gain of the feedback circuit The...

Page 120: ...trol window will open software oscilloscope lick on the 2 button of the Oscilloscope Control window Click on the 2 button in the Source selection box in the Channel B frame then select Force from the...

Page 121: ...ase of the AC AFC mode ection 1 4 1 Adjusting a cantilever resonance point utomatic cantilever tuning If however you have failed Cantilever automatic tuning FMD not only the Slope detection method tec...

Page 122: ...ed automatically the frequency and find the resonance frequency on the Normal Scan radio button in the Pe 2 Double click on the Start Frequency KHz input box and enter 250 using the keyboa ouble click...

Page 123: ...er image title window will appear click on the OK on if you want to save the data However you usually c button The frequency sweep data roughly loo V 250 300 f 350 The peak frequency is indicated as P...

Page 124: ...slightly lower value V 8 0 V 5 6 V 300 290 Peak Frequency f 30 kHz Click the mouse button here 290 0 500 kHz Click on the increase button arrow mark to the right while watching the RMS Value until it...

Page 125: ...ion Method detection method if you already know the c frequency of the cantilever you can omit the above operation Ca characteristic frequency peak search and can proceed tion elect RMS from AFM ALIGN...

Page 126: ...k frequency Dynamic range 2 utput Amp V to 0 1 V on the Phase Scan radio button and on the Scan button in the FM ow T ALIGNMENT of th not exceed 2 If it seems likely to exceed it diminish the Output A...

Page 127: ...o a figure close to 70 of the RMS value in the AC feedback mode Subtract a value of 0 2 from the FMD value in FMD feedback mode b Click on the button in the Feedback Filter Hz selection box then selec...

Page 128: ...V Confirm that the ap proach has been completed using the indicator of the AFM AMP unit the oscillo scope or the software oscilloscope When confirming the completion of an approach using the indicato...

Page 129: ...move the cantilever tip toward the 0 V side the direction tow specimen and set it in the optimum position so that the best image can be photographed If the RMS value reads 5 6 V the preset voltage set...

Page 130: ...lower right section in the Advanced tab window to open the Advance Control window click on the Display Source tab to open the Display Source window then enter data in the manner shown below 4 Click o...

Page 131: ...e Repeat button to scan the specimen The following display will appear uble click on the Lift Height input box then enter 100 nm using th Topography image MFM image Phase image 8 Decrease the Lift Out...

Page 132: ...mage observation is an optional function that requires a lock in amplifier supplied to order Connect the lock in amplifier to the SPM controller and set the software in accordance with the procedure i...

Page 133: ...ding upon the characteristic frequency of the level OSC Level V or shift scanner you use If it happens reduce the oscillation the present oscillation frequency OSC Frequency kHz setting the position u...

Page 134: ...9 Specify the SPM parameters for usual operation so that you can obtain an optimum topographical image 10 Change the following parameters so that you can obtain an optimum elasticity image as well as...

Page 135: ...n frame of the Advanced tab window Surface potential observation SKPM Scanning Kelvin Probe Microscopy is an optional function that requires a lock in amplifier supplied to order Connect the lock in a...

Page 136: ...ick on the Repeat button to scan the specimen The topographical image is displayed on the left side of the screen the surface potential image on the right side Topography image Surface potential image...

Page 137: ...n Then slowly perform approach Although the higher the modulation frequency of the bias voltage applied across the specimen and the cantilever the higher the res st keep in mind the fact that the exci...

Page 138: ...AC DC the potential difference U is t V U t t t V V q s Fr on the el in om the above equati ectrostatic force F is given as follows z C t VAC q V F DC 2 sin as follows 2 1 This equation can be expand...

Page 139: ...isplacement or adsorption of atoms Lithography lets you lithograph or write on the specimen surface using this phenomenon In SPM lithography there are two modes namely the vector mode and the trace mo...

Page 140: ...tion click on the left mouse button You can continuously define the pattern as explained above To stop the pattern definition click on the right mouse button 6 Click on the Write button to perform lit...

Page 141: ...window are as follows r computing the drift ore reference points ction is being checked the n each time measurement is performed least square Carry out drift compensation as follows 1 Click on the Adv...

Page 142: ...on it Drift compensation is applied You can specify up to three points for drift compensation When specifying the third point carry out image measurement and reference point specification once again...

Page 143: ...rformed in the area in which repulsive force acts between the specimen and the cantilever tip The following is an explanation of the method of observation using the Contact Mode tab window The Contact...

Page 144: ...h Grabbing Checkin Befo according to the procedure in Sect 5 3 Preparing Measurement Is the Z stage position in the approaching possible range 9 0 V ier unit to AFM g before approaching re performing...

Page 145: ...The following screen appears on the Display Window 2 Rotate the photodiode position adjustment knob until the red spot enters the lue zone at the center Confirm that the SUM value of the AFM amplifier...

Page 146: ...lection box and select 100 00 us This is the parameter that determines the scan speed Naturally this parameter ng to the observation area and the unevenness of the Reference Double click on the Refere...

Page 147: ...d select Topography 3 Click on the button in the Source 2 selection box and select None 4 Click on the button in the Source TOPO selection box and select 1 When you observe a force image You can obser...

Page 148: ...speed of approaching in the basic mode You cannot change the speed of approaching in the SPM instrument other than the ultra high vacuum SPM Judgment of approaching conditions Whether approaching has...

Page 149: ...orce occurring between the specimen surface and the lever tip The FFM measures the friction force from this torsion of the cantilever Scanning direction Cantilever Ordinary contact mode AFM FFM The fo...

Page 150: ...ow will be displayed 3 Double click on the Tip Displacement nm box on the F C Parameters window and enter the maximum value of the scanner Z scanning range using the keyboard 3 m is installed enter ab...

Page 151: ...becomes saturated in the repulsive force domain outside the measurable ran the F C Paramete Saturated The relationship between Tip Displacement nm and Reference V is shown in the figure below ement Re...

Page 152: ...s slightly large Reference is on the s ce a little at a time until you obtain the best image ing an image uto Grab in the Contact Mode window is selected ry time measurement finishes images are automa...

Page 153: ...dure Stop scanning k on the Ou or Z a on the Start but 4 When the cantilever has moved 0 1 to 0 2 mm away from the specimen click on the Stop button to stop the movement 5 Separate the specimen and th...

Page 154: ...ty Ta You can perform viscoelasticity measurement by additionally installing the opti in Amplifier When the lock in amplifi Specimen stub Conductive paste Specimen Checking Afte approach perform in AC...

Page 155: ...n the Lock In Amplifier window The lock in amplifier will automatically adjust r window Set the Lock in Amplifier according to the following steps a to c selection switches switches put t pressed stat...

Page 156: ...1 ms OSC Level 0 200 Ref Phase 0 000 Output ACosT ASinT 6 Click on the Advanced button The Lock In Amplifier 1 Advanced window opens 7 Specify the parameters according to the following table Filter B...

Page 157: ...arameters for usual operation so that you can obtain an optimum topography image 4 Change the follow parameters so that you can obtain an optimum elasticity image as well as an optimum viscosity image...

Page 158: ...l Modulatio You can perform lateral modulation FFM measurement by additionally installing nal Lock in Amplifier When the loc Specim n e Specimen stub Conductive paste The Checking Affix the specimen a...

Page 159: ...t 6 Click on the Auto Phase button of the Lock In Amplifier window The lock in amplifier will automatically adjust the phase When using Model 5110 Turn on the POWER switch of the Lock in Amplifier Amp...

Page 160: ...The Lock In Amplifier 1 Advanced window opens 7 Spec cording to the following table ify the parameters ac Filter Band pass Dynamic Res High Resolution Filter Frequency kHz O 20 000 ffset Line Reject...

Page 161: ...between the scan range and the voltage applied to the scanner Sometimes an oscillating sound is made depending upon the characteristic frequency of the scanner t OSC Level V or shift the present oscil...

Page 162: ...Affix the specimen firmly to the specimen stub using conductive te instead of using double faced tape as Specimen Conductive paste Specimen stub Selecting frequency of the cantilever It is necessary t...

Page 163: ...the parameters according to the following table Sensitivity 50 mV Time Constant 5 ms Ref Phase 0 000 Ref Frequency 3F Output ACos ASin OSC Frequency 20 000 OSC Level 5 0 Use result 1F freq Select Star...

Page 164: ...nce image Acos u can obtain an o 3 Increase the input sensitivity of the lock in amplifier from 50 mV to 100 nV direction using the SENSITIVITY setting key in the range in which the signals from the l...

Page 165: ...age position in the approaching possible range e AFM value of the AFM amplifier unit about 2 0 V coarse approaching been executed in such a way that the d Is th Is the FFM value of the AFM amplifier u...

Page 166: ...ze selection box and select a numerical value near 1 000 um The value to set in Size differs depending on the scanner provided In practice specify an appropriate value according to the observation are...

Page 167: ...onally 8 Click on the button in the Loop Gain selection box and select 8 from the pull down menu Loop Gain is the parameter that determines the gain of the feedback circuit The larger the specified va...

Page 168: ...ime you click on it it changes alternately between and The checking box means that it is selected Software Oscilloscope Set Channel B following the procedure below 1 Click on the 2 button of the Oscil...

Page 169: ...output up to 15 hing tilever closer ce V voltage The follo 2 Specify each parameter according to the following procedure a Click on the Reference V input box When the value in the box is highlighted...

Page 170: ...cifying it in the Sample Bias V input box from 0 V to both positive and negative values n the specimen and the specimen pe or conductive paste Conductive paste If possible apply the conductive paste n...

Page 171: ...the AFM AMP unit indicates the ng having completed occurred due to unexpected electric click on agai You may hear an oscillation sound coming fro completing This is because the setting of the feedbac...

Page 172: ...asurement is called Force Curve measurement The following is the procedure for Force Curve measurement Measurement Method The procedure up to approaching is exactly the same as that for the measuremen...

Page 173: ...Double click on the Tip Offset nm input box and enter 0 using the keyboard 6 Set Ramp Direction to Out In Out 7 Click on the ouble click on the Tip Displacement nm input box on the FC window and tere...

Page 174: ...en attempted outside the measurable range of the detector and the A D converter 10 V In such a case change the Tip Displacemen to a smaller value Saturated The relationship among Tip Displacement nm d...

Page 175: ...wever the Force Curve measurement is often carried out at a certain specified point in an observed image when you perform image observation in the contact mode The following is the procedure for speci...

Page 176: ...ment 7 t the measurement point press the right mouse 8 9 Repeat button on the Advanced tab window If you changed the measurement point by this method the changed point becomes the initial position for...

Page 177: ...procedure for observing an FFM image in the Advanced contact mode 1 Click on the button in the Acquisition selection box in the Scan frame and select 2 Inputs from the pull down menu This operation ac...

Page 178: ...oset check box 5 Click on the Repeat button on the Advanced tab window Scanning starts and images are displayed on the Display Window as shown below Topography image FFM image The white locations in t...

Page 179: ...e image processing Brightness Contrast Other general cautions grabbing storing and processing of an image are Chapter 6 Analysis Operation age observation ifier for current detection is built in the A...

Page 180: ...ctive paste Specimen stub figure above shows the specimen for the JSPM 5200 The Selecting a cantilever d short as shown in the figure below and you If there are two cantilevers long an want to use the...

Page 181: ...ty like an insulating material or the surface of the specimen is oxidized the current changes little and the image contrast is poor Linear current instead of Log current can be used to observe a curre...

Page 182: ...observed on some specimens 2 Click on the Probe button in the Advanced tab of the SPM Parameters window The Tip window opens surement Using Conductive Cantilever I V measurement on the surface of a sp...

Page 183: ...nt to perform I V m The cursor is in effect only inside of the active window surrounded by a green line The image surrounded by you acquire the current image according to Current Image Observation the...

Page 184: ...I V measurement If the measured current gets saturated decrease the gain d Select Auto by clicking on the radio button for Ramp Direction then the button changes to Ramp Direction determines the scann...

Page 185: ...meters item of the Display menu in the main menu bar If the measurement position is changed with this method the changed position becomes the initial position Therefore when scanning has been finished...

Page 186: ...the specimen surface and confirm that you can obtain an optimum image Then retract the tip Setting Lock in Amplifier v Obs 1 Carry out a topography image observation according to the usual method hy i...

Page 187: ...w and then check the Add External Z Signal check box Sometimes an oscillating sound is made depending upon the characteristic frequency of the scanner that you use If it happens reduce the oscillation...

Page 188: ...ty image The area in which both Acos elasticity image and Asin viscosity image become bright is the one in which elasticity and viscosity are large 9 S o 1 u can obtain an optimum elasticity image as...

Page 189: ...display the tab window for lateral modulation FFM measurement rvation of a topography image You first observe the topography image of the specimen surface and confirm that you can obtain a good image...

Page 190: ...ow and then check the Add External Y Signal check box Sometimes an oscillating sound is made depending upon the characteristic frequency of the scanner that you use If it happens reduce the oscillatio...

Page 191: ...00Vp p will be applied to the scanner Therefore there is the following relationship be optimum topography image 10 Change the following parameters so that you can obtain an optimum friction image Osci...

Page 192: ...on the specimen surface sing the lithography function rtain values are given to the bias voltage and tunneling current the specimen oxi by using this phenomenon The The s shown in the flow chart belo...

Page 193: ...on the mouse the mouse You can continuously define the pattern as explained above To stop the pattern definition click on the right mouse button 6 Click on the Write button to perform lithography Lith...

Page 194: ...ield of view The Drift Control window is used to correct such drift a occurs in the measurement imag 1 Click on the Advanced button in measurement The Advanced Control window appears elect the Scan ta...

Page 195: ...M MODE head unit with a tip holder is used for observation in the STM Scanning unneling Microscope mode 5 6 1 S The STM tab window is a basic operation window for observing a topography measurement in...

Page 196: ...ox in the STM tab window When the n n ng before approaching re performing approaching check whether the according to the procedure in Sect 5 3 Preparing Approach as coa cantilever tip and the specimen...

Page 197: ...Current nA is used to specify the tunnel current between the specimen and the tip Change it while observing the image that is being scanned Here set Current nA to Filte enter 1 usin 1 000 for the time...

Page 198: ...age by obtaining the current c When You hange as an image while n the cantilever and the specimen constant 5 Select the STM radio button at the left bottom of the STM tab window 6 Click on the keeping...

Page 199: ...an change the speed of approaching only when using the ultra high vacuum SPM Judgment of approaching conditions Whether approaching has finished or not is judged by measuring the voltage applied to th...

Page 200: ...position for I V measurement retract the tip This is for preventing the tip from contacting the specimen surface and deforming when you move the tip to the position to measure 5 Click on the Position...

Page 201: ...and enter 1 using the key board Double click on the input box for High Voltage V and enter 1 using the keyboard ffset current is capacitance corrected in such a way that In this system the o when the...

Page 202: ...captured in the CITS menu In the case of CITS unlike STS I V data is measured imen drift or hysteresis so that the I V curve at an arbitrary point of the image ctly corresponds to the image points Ti...

Page 203: ...ck on the input box for Low Voltage V Scanning is performed and the following will be displayed Current image Topo image Current image Acquiring When Auto Grab in the STM tab window is selected When a...

Page 204: ...e small Theoretically the resolution will increase but the tip will be more liable to strike the specimen You can visually check the distance between the specimen and the tip at Z Piezo Position which...

Page 205: ...m away from the specimen click on the Stop button to stop the movement 5 Turn the manual approach screw to move the specimen stage down Stage moves upward SPM head unit Stage moves downward Groove Man...

Page 206: ...l on the Advanced t every parameter Advanced tab window Check distance between the can 0 3 mm or less Is the ing before approaching Before performing approaching check whether the preparation has been...

Page 207: ...select Normal from the ull down menu p 4 Click on the Size box When the numerical value is highlighted enter 1um using the keyboard and finalize the numerical value by pressing the Tab key the Or clic...

Page 208: ...ter that determines the response speed of the feedback circuit The larger the specified value is the faster the response speed becomes thus producing a sharp image but the feedback circuit easily osci...

Page 209: ...ted Setting e cedure below 1 ton of the Oscilloscope Control window window will open The or checking bo changes alternately between and The checking box means th Software Oscilloscop Set Channel B fol...

Page 210: ...on the a Double click on the Current nA input box When the value in the box is highlighted enter 1 using the keyboa button in the Feedback Filter Hz selection box then select 1 0 from the pull down m...

Page 211: ...lick on the button in the Feedback Filter Hz selection box and then select a slow filter a smaller value from the pull down menu Topography image observation When approaching has completed carry out s...

Page 212: ...nu This action acquires two images and displays them simulta bserving a current image you usually acquire the topography image of the specimen and compare it with the neously When o current image 2 Cl...

Page 213: ...a current image because there are points where no current flow is observ specimens lick on the Probe button in the Advanced tab of the SPM Paramete indow The Tip window opens 3 4 C r posi Click on the...

Page 214: ...the cursor dragging so be sure to drag the mark slowly 6 After placing the mark at the measurement point press the right mouse button to finalize the position The Tip window will be displayed 7 Desele...

Page 215: ...nning will be performed from 1 button in the No to election box nd select 1 from the pull down menu This specifies the number of I V measurements for data averaging Increase the number particularly wh...

Page 216: ...eamp Gain of the SPS Parameters window If no stable data is obtained at the same measurement point or unreasonable data is parameters during I V measurement might cause errors for data that you obtain...

Page 217: ...r hysteresis so that the I V curve at an arbitrary point of the image perfectly corresponds to the image points Tip I V I V measurement cur ev ve is measured at ery pixel 128 points 15 points standar...

Page 218: ...lue determines the preamplifier gain for I V measurement If the measured current gets saturated decrease the gain d Select Auto by clicking on the radio button for Ramp Direction then the button c Ram...

Page 219: ...e by using this phenomenon g using the lithography function n certain values are given to the bias voltage and tunneling current the specimen ce structure may cha The lithography function has two mode...

Page 220: ...ck on the mouse ine the pattern as explained above To stop the pattern 6 C Lithogra The 1 C b window 2 O 3 Specify the lithography conditions in Select Trace in the Write Mode frame then click on the...

Page 221: ...rocedure for drift compensation is as follows 1 Click on the Advanced button in the Advanced tab window before starting measurement And select the Scan tab in the Advanced Control window that appears...

Page 222: ...ed Scanner Specimen Cantilever Tip Retract is used when the cantilever and the tip must be retracted temporarily Z position readjustment During scanning stage drift may cause the tip position to chang...

Page 223: ...indow will be displayed The tip position is readjusted CAUTION If you move the motor drive greatly the tip gets too close to the specimen surface or gets too far from the specim Click on the Tip Retra...

Page 224: ...the range in which the measured image is displayed change the observation area using the following procedure Note that you cannot perform this operation in the basic mode 1 Click on the Drag button in...

Page 225: ...nts the grabbed image will be quite different from the scanned image This phenomenon often occurs during observation at high magnification particu larly in the contact mode It is thought that this is...

Page 226: ...and then select the desired image name from the list that appears 2 Return to the main menu and select Display then select Change Para from the pull down menu l position where the offset was measured...

Page 227: ...ame and observation conditions in the Info box in the Parameters window using the keyboard After checking the parameters click on the You can freely enter any comment such as measuremen menu The Save...

Page 228: ...in the SPM Parameters window 3 Click on the Tip Retract button to select it The tip will retract 4 Click on the Stage button in the SPM Parameters window The Coarse Stage window opens 5 Select Out fo...

Page 229: ...the screen and click on the Start button then click on the Shut Down button from the pop up menu 5 Select Shut down the computer then click on the YES button The computer is turned off After saving t...

Page 230: ...l M This displays the Scan Mode Setup dialog that sets the SPM measurement function to start up This dialog is used when you have checked the Don t show this window when start up box of this dialog wh...

Page 231: ...function of the device unless this device is set properly Moreover since the piezo drive power supply voltage differs depending on the instrument 150 V or 200V you might cause instrument trouble unles...

Page 232: ...0 nN V V ka F Apply When the Apply check box is checked the force image or force curve appears with an interatomic force value calculated from the applied voltage Spring Constant k N m Enter the spri...

Page 233: ...k N rad Enter the spring constant of the cantilever in the torsional direction Constant k N rad input box 2 3 3 t h l G wt k W Board Tip l h t Cantilever 2 on the instrument used Change the photodiode...

Page 234: ...x x a 10 The shifts per evolution of the photodiode position adjustment knob are as follows X axis shift axis shift 0 5 0 25 Ca ut box cantile ver is zero ntilever PD distance d mm Enter the distance...

Page 235: ...this is not checked calibration of the scanning range will work Changing Compensation Parameter Only a user with administrator privilege can change the compensation parameter A floppy disk which has...

Page 236: ...ed scanning area the source signal gain and offset voltage will be calculated If you perform pre scan the amount of change in the source signal is calculated for the whole measurement you can obtain m...

Page 237: ...les over the limit range decrease the setting voltage Amplitude Setup In the automatic adjustment sequence after searching the resonance point of the cantilever the software adjusts the RMS signal to...

Page 238: ...onance frequency The nature of the force that the cantilever receives cha Start Frequen Set the start and stop values at kHz order in the frequency scan for detecting resonance hanges to FMD mode Exci...

Page 239: ...NTROL unit according to the following procedure 1 Click on the SPM Setup menu from the main menu and select Reset SPM from the pull down menu The Reset SPM window appears 2 Confirm that the power supp...

Page 240: ...ng units nm 10 9 m um 10 6 m For example when you have entered 3 000 um the scanning area is 3 0 m If you have not entered a unit the previously displayed unit is applied The value displayed in the Sc...

Page 241: ...ation angle Setting the Amount of Image Offset Ther Dr Us eyboard Us shows the current scanning area e are 3 methods for setting the amount of image shift as follows agging Move the cursor to the curr...

Page 242: ...the image may sometimes become distorted due to creeping in the scanner for a short while after starting the scan Usually use 0 degrees Zoom The area that you specify in the displayed image will be s...

Page 243: ...ld of view continuously by re d this operation click on the right mou Shifting field of view The field of view shifts in real time so shift it slowly Enable Pre Scan If you have checked the left side...

Page 244: ...erence signal becomes the RMS signal in AC mode and the FMD signal in FM mode respectively Specify each signal voltage within the range of 0 to 10 V Surface potential measurement tab window In the sur...

Page 245: ...ecause offset bias voltage control is required You can specify the offset bias voltage up to 10 V STM mode The reference signal is a Log Cu ly the reference signal but also the bias voltage You can sp...

Page 246: ...ow Gain Cutoff frequency Frequency The sensitivity decreases gradually as the frequency becomes higher than the cutoff frequency Loop Gain You specify the loop gain of the feedback circuit The gain be...

Page 247: ...anced control mode If the source signal 2 is other than None measurement is performed using both source signal 1 and source signal 2 The image display during measurement is as urce 1 2 ct eithe opogra...

Page 248: ...e region or with a very bumpy surface the source signal might becom y observe under low gain and increase the gain when you cannot gh contrast The setting here does not a If the Enable Pre Scan check...

Page 249: ...es are as follows Clock Fast Offset position 0 0 nm Lamp direction Out In Out Source signal Force r of accumulation 1 Fo t distance when you perform Focus Curve measurement This button is operable onl...

Page 250: ...o I V settin are some parame ters that cannot be changed in 0 10 V nA unchangeable Number of accumulation 1 unchangeable rement points 128 unchangeable I V ou perform the I V Curve measurement set fro...

Page 251: ...the magnetic force you need no at 256 256 When measurement starts the images appear as follows Topo Magnetic Image You can confirm the scan mode and source signal settings at magnetic force measuremen...

Page 252: ...line Since the up and down movements of the tip are performed for every scan line you can obtain the stable shape and magnetic force images You cannot use the Line by Line radio button if the Digital...

Page 253: ...nd source signal settings at surface potential m dow by movi Source signal 1 Topography Source signal 2 CPD Aux3 er which enables KFM measurement easurement from the Surface Potential measurement KFM...

Page 254: ...FMD signal to the Lock in amplifier Filter kHz Set the feedback filter for the KFM feedback Gain Set the gain loop gain for the KFM feedback Offset Set the DC offset voltage that is applied to the tip...

Page 255: ...icity measurement KFM tab window by moving directly to the advanced setting tab window Scan mode 4 Inputs Measurement mode VE AFM Source signal 1 Topography Source signal 2 LIA1 Aux1 Source signal 3 L...

Page 256: ...urement tab win dow by moving directly to the advanced setting tab window Scan mode Measurement mode VE AFM Source signal 1 Topography Source signal 2 raphy Acos Asin Inputs LIA1 Aux1 signal 3 LIA2 Au...

Page 257: ...appear as follows Topography Topo Image Electrostatic Image The source signal settings at the electrostatic force measurement are as follows Scan mode 2 Inputs op ra Source Gain Same as that of the AC...

Page 258: ...Stop so if you click on the button again the stage stops Z stage indicator This displays the current Z stage position Use this to confirm whether the Z stage position lies within the approachable ran...

Page 259: ...rement data is e measurement reserved recording state In the reserved rding state the indication on the button changes to Cancel Grab When you click state In the canceled reserved recording ss you sto...

Page 260: ...M mode Tuning used only for AC AFM This starts the cantilever position adjustment sequence The kind of sequence differs depending on the AFM mode setting AC FM in the operation parameters Cantilever u...

Page 261: ...uency scan detects the resonance frequency peak frequency and Q factor and displays their values Advanced Click this button when you must set the resonance frequency of the cantilever Clicking this C...

Page 262: ...en you set the oscillation frequency to the cantilever resonance Po rity of phase detection reverses making the phase that Phase Shifter controls rotate 180 from the present value This processing is p...

Page 263: ...formed only when the button reads R Off Output Amp Enter the voltage amplitude for the oscillation signal to the cantilever The oscilla tion voltage in the FM mode becomes very small compared with tha...

Page 264: ...M There are some buttons that do not appe Approa This starts the approach action The approach is performed based on the parameters reference filter and loop gain set on the current dialog For detailed...

Page 265: ...unded For example when you have entered 3 000 um the scanning area is 3 0 m If you have not entered a unit the previously displayed unit is applied The value displayed in the Scan Size selection box w...

Page 266: ...s appear an speed and Scan time Under the selected scanning speed the relative speed between the tip and specimen and the required time for scanning one image appear in Scan speed and Scan time respec...

Page 267: ...you can observe STM images with two different bias voltages by one scanning pression to 256 256 pixels the image appears during scanning Specify source signals in the 1 and 2 s of the Display Source T...

Page 268: ...anning to display data in the Display Window These quired by using the Position M ify range for montage in the Montage window After ng Montage in the Acquisition selection box scanning starts and a mo...

Page 269: ...ing Spectroscopy scan will be performed The images displayed during scanning are as follows Topo image Current image Current image STM pecify the scanning mode Strictly speaking specify the kind of si...

Page 270: ...ection 5 10 3 Lift L Lift Select this mode when you perform observations such as Magnetic Force measure ift mode Magnetic Force measurement is possible in Mode ater Surfa L Lift However you need the o...

Page 271: ...not carry out this operation during scanning Stop scanning by clicking on the Abort button then specify a new scanning area Drag You can shift the center point of the scanning area in the image to mea...

Page 272: ...mount of image shift and the scan rotation angle Setting the Amount of Image Offset There are 3 methods for setting the amount of image shift as follows Dragging Move the cursor to the current scannin...

Page 273: ...u can specify 180 to 180 n if you change the scan rotation angle any action involving scanner movement such as change of the scanner coordinate does not arise bec direction changes at the start of the...

Page 274: ...itable to watch the object change When you scan the specimen using the Repeat function specify the name and destination for saving the file A serial measurement number is automatically attached to the...

Page 275: ...s button scanning is stopped and the tip returns to the initial position A serial measurement number is automatically attached to the filename Example Filename test test00 tif test01 tif The Grab Repe...

Page 276: ...image learer So this function often serves to improve the tip con c ile you are pressing the Clean button the bias voltage changes to the voltage in Tip Clean when you use the STM mode and the feedba...

Page 277: ...uency Frequency itivity decreases gradually as the frequency becomes higher than the cutoff ency Sens frequ Loop Gain Specify the loop gain of the feedback circuit The gain becomes higher as the numbe...

Page 278: ...o right scan on the specimen is used to display the image However if you have checked the BW check box the source signal will be obtained by performing the backward scan right to left scan on the spec...

Page 279: ...This mess and that scanning has been forced to stop You can restart scanning from the beginning by clicking on the Repeat or Single button even while this message appears an paused This message shows...

Page 280: ...mark on the right side shows the value corresponding to the source signal specified in Display Source 2 together with the unit used for conversion Only the left arrow mark appears when scan mode other...

Page 281: ...nually adjust tilt brightness and contrast ling the piezo scanner used in the SPM creates a structure combined with multiple drive the movement of the X and Y axes may interfere with each other Theref...

Page 282: ...is increased to a signal 20 times greater in voltage through the piezo d That is input the power supply Add External When this check box is clicked on the signal input from the ADY terminal on the rea...

Page 283: ...and the bias voltage ex ceeds the power supply voltage the maximum bias voltage is saturated at the power supply voltage because the maximum bias voltage becomes equal to the power supply voltage Sca...

Page 284: ...erefore if the specimen is uneven the tip is likely to touch it When the Tip Retract at abort button is checked the tip first retracts during scanning and then returns to the initial position then tip...

Page 285: ...r is selected in the Acquisition selection box If any other scanning method is specified the bias voltage that is specified in Forward is applied in both forward left to right and backward right to le...

Page 286: ...On radio button the displayed maximum value of the bias voltage will be changed to 200 V However since the power voltage is 150 V in some SPM instruments the actual output voltage is limited to 150 V...

Page 287: ...a wide area or an uneven surface specimen the image contrast may become saturated Usually observe images using a low gain but if you cannot obtain enough contrast use a high gain If the Enable Pre Sca...

Page 288: ...ely high or low or if the specimen is tilted the image could become white or black during scanning In such a case set Offset V manu ally 10 V ause of this the display area starting from the initial po...

Page 289: ...g current 1 V nA 0 to 10 nA 0 1 V nA 0 to 100 nA 0 01 V nA 0 to 1 A Usually select 1 V nA for the ordinary STM mode but if a tunneling current exceeds 10 nA in the I V measurement or if a contact curr...

Page 290: ...rface moves away from the tip Z Off Specimen stage does not move There is a play of about 3 10 turns due to the rotation shaft detaching mechanism when you change the moving direction CAUTION When you...

Page 291: ...is Enter the calibration value of the Z stage position The calibration value is set before factory s Only k this box when you do not use the X and Y motor drive Use the instrument with ox checked exce...

Page 292: ...ditions specified showing ing on the Approa in the Approach Conditions frame in this window The Approach dialog box approach conditions will appear When the Tip Retract box is checked you cannot use t...

Page 293: ...ways to conduct the approach operation One is approach by software control and the other is approach by hardware operation Clicking on the Advanced button displays the Tip Advanced window in which you...

Page 294: ...speed until the tip ar rive after the tip arrived nea step 2 speed should be step 1 step 2 Set the corresponding motor speeds for Step 1 Z Approach and Step 2 Z Ap proach r Z Approach and not auto In...

Page 295: ...e r intensity incident p requested The red c the photo ed indicator on the left side of the Display Window shows the SUM value the of the incident laser beam projected on the photodiode Adjust the las...

Page 296: ...meters for cantilever oscillation OSC O C On check box is checked oscillation voltage is applied to the t OSC High Output 0 to 1 0 V OSC High Output 0 to 10 V External OSC When you want to use an exte...

Page 297: ...ed from the above scan types OSC Control Specify the oscillation signal to the cantilever Frequency kHz Specify the oscillation signal in this input box The range in which you can se lect the frequenc...

Page 298: ...utput Specify amplifier gain for the signal that has passed through the high pass and low pass filters Usually set it to 10 RMS Filter o Normal Phase Shifter slider enables you to control the phase wh...

Page 299: ...is very small When PLL Excitation is checked the ordinary self oscillation excitation of the cantilever changes to oscillation excitation by the oscillator installed in the PLL Phase Locked Loop circ...

Page 300: ...justs the phase Scan Starts frequency scanning using the method that is selected from the above scan types Filter High Pass Filter kHz High Pass Filter kHz has the same function as that of the AC Phas...

Page 301: ...Usually enter the value near to that of the resonance frequency peak fre quency of the cantilever the range of 130 Set the Phase Shifter so that the RMS sign condition that t the cantilever becomes a...

Page 302: ...ter window The position at which IV measurement is carried out is determined by using the Position function in the Tip window SPS P Specify various kinds of parameters using the SPS Parameters window...

Page 303: ...imum voltage whichever is closer to the currently set voltage Down The bias voltage is scanned from the maximum voltage to voltage Source Specify the source signal Usually select Linear Current for IV...

Page 304: ...d out is determined by using the Position function in the Tip window You can perform SV measurement only in the STM mode In SV m Clock ms Low Voltage V High Voltage V Ramp Direction Number to Average...

Page 305: ...rried out i Po window fy this item in the same way as for IV e sweeping direction for the distance between the tip and the speci men In Out The tip moves away from the specimen inear Current for IS me...

Page 306: ...and specimen Feedback is automatically turned off during measurement FC measurement is carried out in the back and creen Clock ms Number to Average Number of Points and SPS Mode Specify ms in the same...

Page 307: ...nm Specify the offset position in the Y direction The value in Tip Offset nm will be added to the position in the Y direction before scanning Usually specify 0 Ramp Direction Specify the sweeping dir...

Page 308: ...verse When you check this box the polarity of the CPD signal output from the AFM AMP unit will be reversed Change this according to whether the bias voltage applies to the tip or to the specimen Lock...

Page 309: ...n the Lift button opens a dialog that you set at the lift operation The Magnetic Force measurement is an image acquisition method that acquire effect of the that react sensitively with minute signal c...

Page 310: ...for AFM mode Specify the reference voltage in this input box Sample Bias V Specify the bias voltage to the sample in this input box Toggle Sample Hold Select whether or not the feedback circuit shoul...

Page 311: ...tion of the mouse Tr xecute lithography by moving ouse on the Display Window while pressing the mouse button Form of F A pattern definition file is saved in ASCII American Standard Code for Informatio...

Page 312: ...scanner because the syste dividing it Over Cont Overlap or gap between frames may occur In such a case specify the edge to edge dista Y ositive and negative values for overlap and gap as shown below...

Page 313: ...th Total Size X 3000 nm Y 3000 nm Overlap X 0 nm Y 0 nm 1500 1500 3000 he scanning area of an image will appear in the Image Size display position of the dow 3000 T Montage win If you select Overlap...

Page 314: ...n and Left right are provided in the ull down menu p down Scan Direction In this selection box specify the direction in which the next one frame scan moves when the present one image scan has finishe...

Page 315: ...montage scan The nd 4 4 are provi elections 2 2 a he frame arrangement for each selection is shown below Numb Spec T adio button When 128 is select elected for No of Images and 256 is selected for No...

Page 316: ...its c fore the processing completes If the conn k in a plete normally an error dialog appears In su ampl ommunication settings unicates with the lock in amplifier using the communication port 1 ect n...

Page 317: ...sitivity when you click on this button the lock in ampli fier sets an appropriate reference phase so that the reference phase agrees with the input signal phase by using the automatic phase adjusting...

Page 318: ...o 250 kHz Amplitude V Set the signal amplitude that is output from the oscillator in V order You c set this by clicking on the Set button using the slider bar On WinSPM you can set this in the range o...

Page 319: ...et the largest possible value unless the input signal becomes saturated the OVLD indicator lights up Time constant when you perform the detection operation on the lock in amplifier The smaller the tim...

Page 320: ...inds of output signals from the lock in amplifier Since the lock in amplifier can ut two kinds of output signals set two signals in pairs and phase of the detection signals in the amplifier are output...

Page 321: ...tor of the lock in amplifier TTL Use the TTL level input signal for the locking operation EXT Use an external oscillator for the locking operation 2F This selects which frequency components of the inp...

Page 322: ...is shows that the current temperature is more than 1 lower than the set temperature Temperature Setting This sets a desired specimen temperature you want You can set the temperature in 0 1 unit When y...

Page 323: ...ject or purpose adjust the maximum current of the direct current power supply depending on the setting temperature When you change the output voltage during temperature control temperature control wor...

Page 324: ...PC The RS 232C communication settings are as follows Communication speed 9 600 bps Data length 7 bit Parity Even Stop bit 1 bit P Gain I Gain D Gain These set the PID parameters for controlling temper...

Page 325: ...g than the actual temperature Set an offset to correct this error When the actual temperature of the specimen is 20 the temperature is measured before heating or cooling if the indicated temperature o...

Page 326: ...D image appears on the title bar Functions of menu bar The menu on the top of the window acts like buttons on which you click to execute its functions Capture This controls stop and restart of CCD ima...

Page 327: ...e is 32 Brightness The image is darkest at brightest at 63 the standard value is 32 Contrast Image contrast is lowest at highest at 63 the standard value is 32 Image Input This selects an input termin...

Page 328: ...NG FUNCTION 6 26 6 6 1 Filter 6 26 6 6 2 Edge Enhance 6 29 6 6 3 Differentiate 6 30 6 6 4 Normalise 6 30 6 6 5 Normalise S D 6 30 6 6 6 Median 6 31 6 6 7 Subtract Background 6 32 6 6 8 Single Math 6 3...

Page 329: ...ab from Memory FS 6 89 6 10 8 Change Parameters 6 90 6 10 9 Display SPS Measurement Position 6 91 6 11 MAPPING MENU IMAGE PROCESSING FUNCTION 6 92 6 11 1 Display Parameters 6 93 6 11 2 Special Display...

Page 330: ...6 15 SELECT MENU 6 111 6 16 WINDOW MENU 6 112 6 17 SPM SCAN MENU 6 113 6 18 HELP MENU 6 117 TMPM5200 2...

Page 331: ...the display There is no need to carry out this operation if power is already being supplied to the computer and Windows has started 2 When Windows starts double click the Analysis icon on the desktop...

Page 332: ...sing Open Loads the data file from the disk Find Searches the list of data files Save As Saves data on the disk as file Replay Replays the continuous measurement image by easy movie Print Prints out d...

Page 333: ...s 3D Display Executes three dimensional display Data processing function This function can analyze SPS data and also perform arithmetic processing By displaying the SPS data in the image window the ma...

Page 334: ...Image read End High speed Fourier Transformation analysis General image processing Reading an Image There are two methods of reading an SPM image Transfer the measured SPM image from the scan mode Th...

Page 335: ...ntrast Adjust the brightness and contrast of the image so as to obtain an image that is easy to observe 1 Click on Brightness Contrast shortcut button The image appears as 400 400 pixels on the image...

Page 336: ...ter removes unwanted noise from the image 1 Click on the Filter shortcut icon 2 The Filter dialog appears Click on Convolve 3 3 3 The Convolve 3 3 window appears 4 Select Low and click on OK Filtering...

Page 337: ...ransformation a diffrac tion pattern appears on the display 3 If the spots of the diffraction pattern are dark making them difficult to see select Contrast 2 to increase the contrast Contrast 2 genera...

Page 338: ...ied form in the 3D Display window 2 Set the display direction and position of the 3 dimensional display image Specify the rotation of a 3 dimensional image using Rotate in the Position tab the display...

Page 339: ...rmation concerning the height direction of the acquired image There are four modes Single Profile which enables you to select and measure an arbitrary cross section in the measurement image Multi Prof...

Page 340: ...ent position using the mouse The measurement position is indicated by the arrow on the preview image in the Multi Image Profile window You can specify an arbitrary cross section by drag ging the start...

Page 341: ...you wish to analyze in the Display Window 2 Click on Copy Data shortcut icon The displayed SPS data and the measured data are copied to the clipboard 3 Switch over the application to the process mode...

Page 342: ...takes place and the data is displayed It is recommended that you use between 5 and 7 points Note that several points at the edge of the graph are not smoothed Evaluating the Measurement Values Measur...

Page 343: ...e command 1 Select Analyse from the menu then select Differentiate from the pull down menu that appears 2 Select dl dV then select the number of points to use for computing the differential value If y...

Page 344: ...indow click on the Make Report shortcut icon The Make Report dialog box appears 3 The list of both the image and the spectrum data is displayed Select the data to arrange and click on the Choose butto...

Page 345: ...airs in the output sheet and displayed in the Report window Arrange the results of the cross sectional and roughness analyses in the output sheet 1 Perform various kinds of cross sectional and roughne...

Page 346: ...BMP file with the same image size as the original When you want to use the output sheet in the Windows application other than the WinSPM save it in the BMP image file Saving in the BMP image file save...

Page 347: ...keyboard After selecting the files that you wish to load click on the Open button to load the files By using a wildcard you can easily use the list of filenames A wildcard is something that is used as...

Page 348: ...th Save As Binary FFT bft Image file which is FFT processed spectrum data in binary ASCII Image asc Image file saved in ASCII code with Save As ASCII FFT aft Image file which is FFT processed spectrum...

Page 349: ...lay in the Display Window If you specify 4 4 16 files are displayed if you specify 8 8 64 files are displayed Build If you click the Build button after specifying Search string a data search starts an...

Page 350: ...IFF format for saving the SPM image This type has compatibility with other application software which cannot handle the 16 bit TIFF format Binary Image bin 16 bit binary format for saving data Binary...

Page 351: ...change the filename change it here and then click on the same button The lists of image data and graph data are displayed independently in the Select Data Item dialog that is displayed by clicking on...

Page 352: ...m the data displayed in the Display Window and also the data displayed in the SPM Data Information window are printed on a single sheet Make Report Ctrl R You arrange the data in the output sheet The...

Page 353: ...hown Select the data you want to arrange from the list The selected data is displayed in the Display Window Choose button Click on the Choose button to select data from the list of Measurement Data Th...

Page 354: ...displayed information in the currently active window except for the SPM data information window that displays texts as a BMP image with the same size You can load the saved BMP image in common to the...

Page 355: ...Display Window Copy Data When you select Copy Data the data image or graph displayed in the Display Window and also the measurement data displayed in the SPM Data Information window are copied Use th...

Page 356: ...urrounding the applied point center of matrix In the Convolve 5 5 filtering is applied to the range of 3 pixels surrounding the applied point center of matrix The current image is smoothed by filterin...

Page 357: ...e 3 3 convolve 5 5 Low 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Median 1 2 1 1 2 4 2 1 2 4 2 2 4 8 4 2 1 2 1 4 8 16 8 4 2 4 8 4 2 1 2 4 2 1 High 1 1 1 1 1 1 1 1 1 9 1 1 1 1...

Page 358: ...pixel When User 1 or User 2 is selected in the Filter frame the matrix element definition frame Kernel becomes effective and you can enter matrix elements by using the keyboard The method of entering...

Page 359: ...direction Diagonal Edge Enhancement in the diagonal direction Diagonal Edge Enhancement in the diagonal direction Laplace Enhancement of perimeter out line by Laplace transformation The following fil...

Page 360: ...ormalise function changes the image contrast so that the darkest part of the image becomes 0 and the brightest part of the image becomes 255 In other words the brightness range of an acquired image is...

Page 361: ...rmalize S D 0 Black 255 White Brightness 0 Black 255 White Brightness 0 Black 6 6 6 Median Electric spot noise spike noise on an image is eliminated In this function the data of the center pixel and t...

Page 362: ...ng Polynomial Degree You can specify a degree between 3 and 9 Clicking OK starts correction Non Linear Y This function corrects the image using a polynomial approximation if the image is curved in the...

Page 363: ...teger 0 to 65535 Add Sum of pixel data and a constant Integer 0 to 65535 Subtract Difference of pixel data and a constant Integer 0 to 65535 Here pixel data does not mean the display brightness data 0...

Page 364: ...image data divided by selected image data a b Note If b is zero resultant set to a Bitwise AND Logical multiplication of the two data in each bit a AND b Bitwise OR Logical sum of the two data in each...

Page 365: ...e arrow Designating the analysis position If you align the mouse cursor with both ends of the line the cursor will change to a cross cursor You can then change the analysis position by dragging the cu...

Page 366: ...Color Data Information Information about the image to analyze title measurement mode measurement parameter is displayed Line Plot Height information on a designated line is displayed as line plot Vert...

Page 367: ...ess Ra Uses the equation for computing the arithmetic average roughness Ra stipulated by JIS B0601 Ra is stipulated as the value expressed by the following equation when the center line is taken as th...

Page 368: ...value is also shown on the vertical axis of the line plot Length of the line plot Length Indicates the length L of the line plot This value is also shown on the horizontal axis of the line plot Result...

Page 369: ...added by selecting Add Profile Align the mouse cursor with the end of the line showing the line profile you want to delete and click the right button on the mouse A submenu appears Select Delete Line...

Page 370: ...f z The average value Z0 of the height z in the analysis plane is defined as follows max max 0 0 0 0 1 x y dxdy y x f S Z The area S0 which is based on the assumption that the analysis plane is flat i...

Page 371: ...ositions are displayed using red char acters on the preview screen Zv1 Zv2 Zv3 Zv4 Zv5 Deviation values between the smallest deviation and the fifth deviation in the analysis The corresponding positio...

Page 372: ...right button on the mouse displays a submenu Selecting Vertical line displays a line in the vertical direction and selecting Horizontal line displays a line in the horizontal direction Data Informati...

Page 373: ...he Display Window Choose button Click on Choose to select the data from the list of Measurement Data The selected data is displayed in the Choice data area Choice data The list of data selected from t...

Page 374: ...he vertical direction as seen below The display arrangement may differ but the function operation and displayed information are the same as those for a Single Profile You can select any position in th...

Page 375: ...gion to be measured with the mouse click the left mouse button The cursor will be fixed at the point Move the cursor to the next corner of the region and click the left mouse button then a line will b...

Page 376: ...oss sectional shape between two points The measured surface profile can be handled as a sort of spectrum data 1 Select Line from the Measure pull down menu The mouse cursor changes a cross 2 Specify t...

Page 377: ...steps 3 and 4 6 Press the right mouse button to terminate this measurement Roughness This function displays the results of roughness analysis of the overall height of the currently displayed image th...

Page 378: ...an optional rectangular region and with Square you can designate a square region 1 Click on Analyse in the main menu and select Trim in the pull down menu Then select Rectangle or Square in the pulldo...

Page 379: ...This function is useful to abstract and display a periodic structure of the obtained image Click on Analyse in the main menu and select FFT in the pull down menu The FFT window will be displayed The p...

Page 380: ...age is displayed If you wish to recall a spot diffraction image that was previously Fou rier transformed and memorized in the computer use Display to display the spot image If you select Select to dis...

Page 381: ...erse FFT The words Masking Window are used to distinguish it from the Display Window 1 Display a Fourier transformed spot image on the Display Window Click on the Add button in the FFT Window Then a c...

Page 382: ...of the desired masking window then click the left mouse button When creating four masking windows Spots within these circles are used for inverse FFT When creating coaxial rings Spots within these rin...

Page 383: ...on the Display Window is still displayed but the masking window applied to the spot image in the computer memory is erased In order to display the spot image to which a masking window is not applied o...

Page 384: ...dow is applied to a specified frequency band 1 Enter the lower frequency in the From input box and the upper frequency in the To input box Select Mask or Window in the Window Mask frame Then click on...

Page 385: ...ask frame Then click on the Add button in the FFT Window The unit is 1 nm Window The frequency band between the specified lower and upper frequencies will be erased from the window Upper Frequency Low...

Page 386: ...sis is shown below Binarizing of the image Is particle analysis possible Analysis with other software Condition for particle recognition Particle Analyze Window The particle analyze window and particl...

Page 387: ...f all areas of groups of particles extracted S area ratio Ratio of total area of groups of particles to the total area in the image No of particles Total number of particles extracted Information can...

Page 388: ...lect OK to deter mine it Connection decision Changes the connecting conditions for deciding as one particle Clicking the radio button changes the setting 8 4 The pixels connected to a point of interes...

Page 389: ...ut the information of all particles to display at statistic analysis in the particle analyze window Area Displays the statistic result of the area of all particles Diameter Displays the statistic resu...

Page 390: ...m 2 Area pix Perimcte 1 245 0 250 3 3 337860E 002 14 4 198683E 001 2 202 3 206 7 3 099442E 002 13 4 698625E 001 End of line Delimiter Perimeter 3 3 1 3 2 3 6 7 7 Draw Mesh A mesh is overlaid on the di...

Page 391: ...ce roughness The analysis result is displayed in a dedicated window different from the Display window Designating Analysis Area Preview image Preview of the analysis screen is displayed along with hei...

Page 392: ...tion Information about the analysis image title measurement mode measurement parameter is displayed Select Area When an analysis area is selected the position coordinate in the upper left corner of th...

Page 393: ...ge that lies outside the screen is deleted Also the vacant part of the current image is displayed in black 0 After Translate operation Translate Deleted 2 2 1 2 6 8 2 Rotate Rotates the current image...

Page 394: ...n of the rotation angle Rotation angle After the Rotate operation Deleted Substituted with black 2 3 3 3 3 3 1 3 6 8 3 Mirror A mirror image of the current image is displayed The following three mirro...

Page 395: ...ze Description 128 Change to 128 128 pixels 256 Change to 256 256 pixels 512 Change to 512 512 pixels Click on Geometry in the main menu then select Resize in the pull down menu Select 128 256 or 512...

Page 396: ...size 128 128 256 512 256 256 512 512 512 Click on Geometry in the main menu then select Pad Points in the pull down menu Select 256 or 512 on the pull down submenu Then the current image will be shift...

Page 397: ...n between the designated parallelogram frame and the converted square frame is as follow Designated parallelogram Corrected image Less than 128 128 128 128 pixels Less than 256 256 256 256 pixels 256...

Page 398: ...all unit cell images are averaged and the resultant unit cell image is displayed in the top left corner of the image display screen The message Continue the designation of unit cell is displayed Selec...

Page 399: ...After the Extract Area operation click on Geometry in the main menu then select Replace Area in the pull down menu Then a list of images stored in the computer memory is displayed on the window 2 Sele...

Page 400: ...it easy to view the gradient difference but the area in which the gradient exceeds the limit becomes larger because the higher and lower limits of the gradient are limited The standard value is 128 va...

Page 401: ...mputer memory is not changed with this function In order to change the image data in the computer memory Transform Image Data must be executed 6 9 2 Set Window This function displays only points that...

Page 402: ...ge is displayed and equalized Display Histogram Select Display Histogram in the LUT pull down menu The brightness histogram of the current image is displayed Brightness Number of pixels Black White 25...

Page 403: ...e LUT is a data transform function for displaying the original data on the image display screen Image data Transform Display LUT For example if the LUT is like the one shown below the displayed image...

Page 404: ...s changed to a linear function the image brightness and contrast are also changed This function is to force the LUT to a linear function its default Therefore if Linearise Image LUT is operated for th...

Page 405: ...operation is outside the range of 0 to 255 the data is set to 0 or 255 Original LUT Level Displayed value 255 White 0 Black 0 Black 255 White Data value Original image data Level 255 White 0 Black 0...

Page 406: ...image from the list and click Add Repeat this step and select all the required images Selected images are displayed blue To eliminate an image from the images to compare select an image to eliminate...

Page 407: ...n be changed When the update value displayed is 198 237nm for example it can be rounded off to a round number like 200 000nm Upon determining the update value click OK The height information of all th...

Page 408: ...aying an image are set in this window Parameters set in this window are in effect regardless of the parameters set for scanning as long as they are not changed For example if Display Size is 64 an ima...

Page 409: ...in this selection box Nano Marker A scale marker can be displayed to show the size of an image When the X or Y check box is checked the marker is shown The marker length and unit are automatically ca...

Page 410: ...1 0 length width 5 0 Width When you click on the Text button a cursor will appear on the image Desig nate the starting and ending points of the arrow mark using the cursor Font Font type font size an...

Page 411: ...by Display Parameters the following image will appear in the Display Window Display Window 1 Scan size Height Reference Bias voltage If the Full Display function is selected when a check mark is put t...

Page 412: ...when you click Plot all Points until a high accuracy 3 dimensional image is displayed differs depending upon the performance of the computer used Generally however between 10 and 20 seconds are neces...

Page 413: ...point of the 3 dimensional image 0 0 1 9 If you increase this value the image will appear as a 3 dimensional image that is viewed from a long distance away As you increase this value the image moves a...

Page 414: ...y Alpha overlay Combines a Shaded display and an Illuminated display A semi transparent Illuminated image is displayed superimposed on a Shaded image Alpha Level Set the degree of opacity alpha level...

Page 415: ...rawing in which the illumination light is highly reflected at the surface Shininess Adjusts the shininess of the surface Increasing this value causes the brightness to decrease Show Light Vectors Chec...

Page 416: ...ng 3 dimensional drawing is reduced however like the above it will take more time for the image to be displayed Display Checking this item displays the X Y and Z direction scales Load Settings Checkin...

Page 417: ...o color linear scale Yellow Yellow mono color linear scale User 1 User 2 User defined color New Image color is defined as displayed in the above box Open A saved color table is loaded from the disk Sa...

Page 418: ...of the graph axes Plot Color Color of the graph data display Reverse Plot Color Data display color of one of two graphs displayed on the same coordinate axes Grid Color Display color of graph grid CIT...

Page 419: ...tom left Bottom left 1 4 of the Display Window Bottom right Bottom right 1 4 of the Display Window Center Center 1 4 of the Display Window Selected A designated area of the Display Window refer to the...

Page 420: ...s displayed Image Type Topography Current image Log current image External ADC image CITS current image CITS log current image Force image Image Size X nm Optional Image Size Y nm Optional Data 0 0000...

Page 421: ...is displayed in the Display Window 1 Select Display SPS measurement position from the Display pull down menu The Select Data Item window is displayed and the selected spectrum measurement position and...

Page 422: ...eristics at each point of scanning That is I V data is obtained at each pixel I V Tip Specimen I V The top left image on the screen is a topographic image obtained under the parameters specified in th...

Page 423: ...current difference between neighboring frames are displayed Normalized d ADC Images of the normalized current difference between neighboring frames based on the original AD values are displayed Conduc...

Page 424: ...er is designated in Number to display Mixed Images for designated voltages are displayed 6 11 2 Special Displays Since one CITS consists of a lot of data special display modes are provided to display...

Page 425: ...as voltage is the current CITS image and each command is executed the following CITS images will be displayed Display The CITS image with a 1 8 V bias voltage is displayed in colored frame Previous Th...

Page 426: ...t image is displayed Display The current mapping image is displayed again Next The mapping image after the current one is displayed Copy An arbitrary mapping image extracted as an independent image fr...

Page 427: ...is no tunneling current image that was stored in the computer memory with the Copy operation selecting this function would cause an error Example Replace Topo image 2 0 V 1 75 V 1 9 V 1 6 V 2 0 V 1 9...

Page 428: ...7 V ITS 1 8 V 2 0 V 1 9 V Topo image 2 0 V 1 9 V 1 7 V 1 8 V 1 6 V Overlay an Image on Topography A current SPS mapping image is overlaid on a topography image Split all images All images comprising o...

Page 429: ...age 1 95 V 1 75 V 1 95 V 6 11 6 Duplicate Data Set The whole SPS mapping data are duplicated in the computer memory 1 Select Duplicate Data Set from the Mapping pull down menu 2 Then the whole data wi...

Page 430: ...is selected the I V curves at the points within the designated particles are averaged and displayed Select The region in which SPS data to be averaged is designated on a TOPO image Designation of one...

Page 431: ...othing It computes the mean value of the data for exactly the specified number of points consisting of the point of interest and the adjacent points and redisplays this mean value as the new value X Y...

Page 432: ...ation Description Add Addition of a constant Multiply Multiplication with a constant Divide Division by a constant Natural Log Natural logarithm Inverse Invert the sign of value Absolute Value Absolut...

Page 433: ...Difference A B Multiply A B Divide A B A Data of the current graph B Data of the selected graph 1 Select 2 Spec Math from the Process pull down menu Select the desired operation in the sub pulldown m...

Page 434: ...avitzky Golay method d2lnI d2lnV Normalised result of the d2lnI d lnV 2 is normalized by V I Data Width The number of data to be used for the Savitzky Golay method is specified in this input box 6 12...

Page 435: ...the approximation the resultant curve is overlaid on the original graph and the resultant polynomial formula the standard deviation and the correlation coefficient are displayed on the right of the g...

Page 436: ...e graph Moving the mouse cursor onto the graph changes the cursor to the shape of palm The marker can be moved by dragging the marker display position with the left button on the mouse held down The v...

Page 437: ...verlay Select a graph from the list and click Add to display a graph 3 Continue processing Multiple graphs are overlaid by repeating graph selection The vertical axis and horizontal axis of the graph...

Page 438: ...will be displayed in the pulldown sub menu The following FFT windows are provided FFT window Description No window FFT without window Cosine window W n 0 5 0 5cos 10n N Parzen window W n 1 n 0 5 N 1...

Page 439: ...xis Y axis Sets parameters for displaying the X axis and Y axis of the graph Size Designate a size on the vertical axis screen Sizes that can be designated are 256 and 512 Type Plot type Sets whether...

Page 440: ...nt button to display a setting dialog Manual Scales Sets the X axis and Y axis scales They are normally set at AUTO when in used Auto Sets whether the axis is to be drawn automatically or manually Dis...

Page 441: ...ely below the current data is graph data the image immediately below it will be displayed Previous Data Displays the data immediately above the current data displayed in the Select list Normally witho...

Page 442: ...s an active Display window Note however that you cannot close all of the Display windows One Display window must always be open The Display window is only for display The data in the memory will remai...

Page 443: ...the following equation 0 nN V V ka F Apply When the Apply check box is checked the force image or force curve is displayed with an interatomic force value calculated from the applied voltage Spring Co...

Page 444: ...the applied voltage Spring Constant k N rad Enter the spring constant of the cantilever in the torsional direction in the Spring Constant k N rad input box The spring constant is calculated from the f...

Page 445: ...2 1 V V x x a The moving distance of the photodiode by turning the adjusting knob per revolution is as follows axis axis 0 5 0 25 Distance d mm V Enter the distance of 40 0 between the cantilever and...

Page 446: ...in the pull down number list When you change the present set of parameters parameters such as voltage for scanner driving will be changed Be sure not to choose a wrong set of parame ters Description Y...

Page 447: ...window to a size that is easy to view the window will be the same size when you next start the system Also if you set the help window to Option Help display Display at front the window will always app...

Page 448: ...Sensitivity Settings 7 11 7 2 3 Saving and Loading the Motor Drive Position Calibration Values 7 13 7 3 CANTILEVER 7 15 7 4 FILE FORMAT 7 19 7 4 1 Standard TIFF File Structure 7 19 7 4 2 WinSPM image...

Page 449: ...nstall all of it Component parts of the WinSPM system computer system Computer proper Display monitor Keyboard mouse A D board WinSPM system software Checking the calibrated values of the scanner sens...

Page 450: ...ll font 7 1 3 Installing the A D Board Device Driver in the PC When you have reinstalled Windows install the Data Translation DT3016 A D board in the PC according to the instructions below Installatio...

Page 451: ...this window to start installing the DT3016 A D converter device driver 4 The device driver installer displays the window below Click on the Next button The package version may be different depending...

Page 452: ...ware from the driver list shown in the figure below and click on the Next button Continue the installation following the instructions from the installer The device driver installation will complete an...

Page 453: ...ta Acquisition Software Development Kit window appears 2 The SDK file installer starts Follow the instructions from the installer to install the SDK file Use the default settings throughout during thi...

Page 454: ...installing the DT3016 A D converter board 1 Shut down Windows and turn off the PC power 2 Install the DT3016 board on the desired PCI bus and restart the PC When Windows restarts Plug and Play operat...

Page 455: ...the WinSPM software WinSPM system Reinstall the WinSPM software using the appropriate installer 1 Insert the WinSPM software CD into the CD drive of the PC The setup program automatically starts and...

Page 456: ...instructions issued by the installer Use the default settings throughout this process 5 When the SPM software is completely installed restart the system as the Administrator in the WinSPM System meas...

Page 457: ...to the program This can be accomplished using the Device Setup window 1 Start the WinSPM program with system administrator privileges log in using the user name Admin The WinSPM for Scanning Probe Mic...

Page 458: ...o be used 5 Click on the OK button If the instrument has been changed the confirmation window opens asking whether to save the inputs or not If this happens terminate and restart the WinSPM program ot...

Page 459: ...device other than the hard disk Saving scanner sensitivity settings 1 Start the WinSPM measurement mode with the system administrator privilege 2 Select Scanner Calibration from the SPM Scan pull dow...

Page 460: ...g box appears 4 Select the file you want to load and click on the Open button The file extension is clb The scanner sensitivity settings previously saved in the file are loaded 5 Enter an identificati...

Page 461: ...k Saving motor drive position calibration settings 1 Start the WinSPM measurement mode as the system administrator privilege 2 Select Measurement from the SPM Scan pull down menu 3 Click on Large Stag...

Page 462: ...g to display the Open dialog box 4 Select a file you want to load and click on the Open button The file extension is stg 5 Click the OK button to close the Coarse Stage Advanced window 6 Select Save S...

Page 463: ...ngle side 10 15 OMCL TR400PS 1 Triangle 100 200 0 4 Pyramidal 2 9 0 09 0 02 40 13 Single side 20 35 OMCL TR400PS 2 Triangle 100 200 0 4 Pyramidal 2 9 0 09 0 02 40 13 Single side 20 35 OMCL TR800PS 1 T...

Page 464: ...ber of cantilevers in one package is 16 50 or 385 The nominal value of the tip diameter is 10 nm Mode Part name Thick ness m Width m Length m Spring constant N m Reso nance frequency kHz Tip diame ter...

Page 465: ...r Au Pt Co Ni CSCF11 Coating Contact 400 W2C TiO TiN W Cr Au Pt Co Ni NSC21 Non contact 15 None NSCH21 Non contact 200 None NSCF21 Non contact 400 None NSC21 Coating Non contact 15 Si3N4 W2C TiO TiN W...

Page 466: ...Pt Co Ni NSCF21 Coating Contact 400 Si3N4 W2C TiO TiN W Cr Au Pt Co Ni4 CSCS12 Contact 15 None CSCH12 Contact 200 None CSCF12 Contact 400 None CSCS12 Coating Contact 15 Si3N4 W2C TiO TiN W Cr Au Pt C...

Page 467: ...ased on the standard TIFF might not accommodate SPM graphic data 7 4 1 Standard TIFF File Structure The figure below shows the structure of the standard TIFF schematically The structure consists of a...

Page 468: ...Null unless there is a directory after this one TAG TAGs can record various parameters of TIFF images Structure of TAG TAG type Kind of TAG Specified by the number 0x00FF to 0x012D in accordance with...

Page 469: ...Directory TIFF TAG Directory Pointer Directory Size EOF SPM Data Image data FFT Data CITS Data Montage Data Etc The data address and file size depend on the kind of image data In principle however th...

Page 470: ...AG 0x1BD4 EOF TIFF Image Data Measurement image data Header data structure The Header structure of a TIFF file to be created by WinSPM is the same as that of the standard TIFF file with additional 2 b...

Page 471: ...078 char 40 40 bytes Image internal filename 0x00A0 char 40 5 200 bytes Image information EOL CR 0x00168 unsigned char 50 50 bytes History that the image has been processed during a given period 0x019...

Page 472: ...0x02E8 float 4 bytes Tip speed X nm s during image measurement 0x02EC float 4 bytes Tip speed Y nm s during image measurement 0x02F0 CalibType 42 bytes Piezoelectric element sensitivity 0x031A SPMPar...

Page 473: ...ghtness 0x0AB4 float 4 bytes LUT Contrast 0x0AB8 short 2 bytes Software version used for measurement 0x0ABA long 4 bytes Software sub version used for measurement 0x0ABE ExtractType 20 bytes Region ex...

Page 474: ...VCO 6 Invalid Table 2 Kind of data source 1 Z 11 Phase 2 Log I 12 MFM 3 Lin I 13 Elasticity 4 AUX1 14 Viscosity 5 AUX2 15 FFM_Friction 6 AUX3 16 Surface_V 7 EXT Voltage 17 Prescan 8 Force 18 RMS 9 AF...

Page 475: ...e Second 0 to 59 unsigned char 1 byte 1 100 s 0 to 99 Structure to record the region selected from the image union ExtraType Type Size Note struct ImageExtraType 8 bytes Image selection range struct C...

Page 476: ...tes Reference Voltage V short 2 bytes Stage Structure to record the detailed SPM parameters SPMParamType Type Size Note float 4 bytes Clock ms float 4 bytes Measurement rotation angle float 4 bytes Fe...

Page 477: ...Topo2_kfm 3 Topo512 15 F C 27 Topo2_ffm 4 Topo256 16 FFC 28 TOPO1024 5 Topo128 17 Montage128 29 TOPO2x512 6 Line512 18 Montage256 30 Topo2_scfm 7 Line256 19 LSTS 31 Topo2_mfm_l 8 Line128 20 Topo SPS 4...

Page 478: ...ytes Bias addition signal enum wint_activeDialogType 4 bytes Active Dialog Table 6 enum wint_SPMScanModeType 4 bytes SPM Scan Mode Table 7 enum wint_SourceType 4 bytes Measurement signal Table 8 short...

Page 479: ...Table 8 Measurment signal 0x000000 Off 0x000800 AUX 2 0x000001 Topography 0x001000 AFM Contact 0x000002 Bias 0x002000 Motor X 20 0x000004 Linear Current 0x004000 Motor Y 20 0x000008 Log Current 0x008...

Page 480: ...indicated ool 5 5 bytes Broad Line setting hort 5 10 bytes Broad Line width CRect 16 bytes Selected area for roughness analysis short 2 bytes Setting of selected area for roughness analysis short 2 b...

Page 481: ...PENDIX TMPM5200 2 7 33 Table 9 Rz On Off menu application 1 Enable 2 Disable 3 Invisible Structure to record line coordinates POINTs Type Size Note short 2 bytes X coordinates short 2 bytes Y coordina...

Page 482: ...at 4 bytes Brightness Reflectivity short 2 3 12 bytes Surface display color 2 sheets float 2 8 bytes Light Azimuth float 2 8 bytes Light Elevation float 2 8 bytes Light Brightness short 3 6 bytes XYZ...

Page 483: ...structure TIFF_TAG Type Size Note short 2 bytes TAG type short 2 bytes Data type long 4 bytes Length of data long 4 bytes data or pointer Data structure Address Data Type Size Data Note 0x17D4 short...

Page 484: ...FF_TAG 12 bytes 00 00 Data compressed or not 1 not compressed 06 01 TAG 262 Photometric interpretation 03 00 short type data 01 00 00 00 Data unit 1 TAG Data length 2 bytes 01 00 0x1806 struct TIFF_TA...

Page 485: ..._TAG 12 bytes Strip Offset data 15 01 TAG 277 Samples per Pixel 03 00 short type data 01 00 00 00 Data unit 1 TAG Data length 2 bytes 01 00 0x1842 struct TIFF_TAG 12 bytes 00 00 No of samples per pixe...

Page 486: ...tes 0x1872 truct TIFF_TAG 12 bytes Pointer to Y Resolution data Resolution in the Y direction 28 01 TAG 296 Resolution Unit 03 00 short type data 01 00 00 00 Data unit 1 TAG Data length 2 bytes 0x187E...

Page 487: ...ectory is followed by a file TIFF image data area containing the actual image data The amount of data per pixel is 16 bits 2 bytes For instance the size of the image data file containing a 512 512 pix...

Page 488: ...inSPM The file structure is the same as that of the SPM image file except that the TIFF image data is recorded as 8 bit data per pixel and followed by the color map section with LUT color specificatio...

Page 489: ...TAG 257 Image Height 04 00 long type data 01 00 00 00 Data unit 1 TAG Data length 4 bytes 0x17E2 struct TIFF_TAG 12 bytes Image height 128 or 256 or 512 02 01 TAG 258 Bit Per Sample 03 00 short type d...

Page 490: ...12 bytes 00 00 Pointer to internal filename data 0F 01 TAG 271 Make 02 00 ASCII data 0B 00 00 00 Data unit 11 TAG Data length 11 bytes 0x181E struct TIFF_TAG 12 bytes Pointer to Make data default data...

Page 491: ...p data 17 01 TAG 279 Strip Byte Count 04 00 long type data 01 00 00 00 Data unit 1 TAG Data length 4 bytes 0x185A struct TIFF_TAG 12 bytes Strip Byte Count data 1A 01 TAG 282 X Resolution 05 00 Data t...

Page 492: ...es 0x188A struct TIFF_TAG 12 bytes Pointer to Host Computer data IBM Compatible Windows 40 01 TAG 320 Color Map 03 00 Short type data 00 03 00 00 Data unit 768 Data length 1536 bytes D4 1B 0x1896 stru...

Page 493: ...lor map data structure The LUT color data is recorded in the Color Map structure as 256 level data for each color RGB The amount of data per level is 16 bits 2 bytes and therefore Color Map 256 levels...

Page 494: ...FFT data structure however contains FFT data that correspond to each point of the normal image data and the real part and imaginary part of complex numbers in the data are floating point FFT data reco...

Page 495: ...ecorded in the normal image data section as TIFF image data whose structure is the same as that of the SPM image file 0x0000 Normal Image Data Normal Image Data Size 0x9BD4 CITS Header CITS Image Head...

Page 496: ...ytes Buffer Char 128 0x9D58 short 2 bytes Intrinsic reference number 0x9D5A CITS Image Header 1 CITS image display option recording structure CITS DispOptType Type Size Note short 2 bytes Check flag T...

Page 497: ...V unsigned short 2 bytes ADC Gain int 4 bytes Head Amp Gain 1 10 100 float 4 bytes Image Voltage float 4 bytes Current at Image Data 0 float 4 bytes Current at Image Data 64 char 40 40 bytes CITS imag...

Page 498: ...header data structure Same as image header in the SPM image file Spec data structure The actual spectrum data are recorded in the file section beginning with 0x17CA after the spec header Each measure...

Page 499: ...simple spectrum data files being added to the end of an image file The file format of the image and spectrum data is the same as the one discussed earlier The number of added spectrum data files is re...

Page 500: ...um data files in each respective format Report Header data structure Type Size int 4 bytes No of data files in the output sheet short n 2 bytes n Data configuration for each data Table 14 BOOL n 4 byt...

Page 501: ...8 2 1 Compressor optional 8 2 8 2 2 Vibration Isolation Table 8 2 8 3 SPM HEAD 8 3 8 3 1 Laser Beam Focusing 8 3 8 3 2 Mirror Angle Adjustment 8 4 8 4 CCD CAMERA OPTIONAL 8 5 8 4 1 Installing the CCD...

Page 502: ...they are stored at high humidity the cantilevers could bend causing the reflected laser beam not to reach the correct position Especially a gold coated Si3N4 cantilever is prone to deteriorate with h...

Page 503: ...ace it with a new one or wash and dry the filter and remount it Air filter When water collects in the glass container of the air filter push up the pin at the bottom of the container to drain the wate...

Page 504: ...te the specimen stub using the manual approach thumbscrew until it rises flush with the cantilever tip 3 The optical microscope with CCD adjust the laser beam by turning the two laser beam positioning...

Page 505: ...hat the photodiode is positioned at the center point The total number of revolutions of the X axis adjusting knob is 20 and that of the Y axis knob is 52 Therefore the center position is at 10 X axis...

Page 506: ...e laser beam spot and perform coarse approaching to the specimen using the CCD camera Zoomable CCD camera 1 Open the Windows start menu and run the programs Flash Bus MV and FBG32 2 Move the CCD camer...

Page 507: ...Turn the zooming knob to set the magnification to the minimum 4 Adjust the fine positioning knob so that the cantilever comes to the center of the image 5 Adjust the focusing knob so that correct foc...

Page 508: ...ioning knob of this CCD camera you can position the laser beam spot and perform coarse approaching to the specimen in the same manner as for the zoomable CCD camera Locking knob Focusing knob Top view...

Page 509: ...lamp is turned off Then go on to the next step To avoid burns allow the lamp to cool down for at least 30 minutes before removing it Never touch the lamp with bare hands because it is very hot immedi...

Page 510: ...cket and insert it into the lamp holder Insert the lamp socket deeply into the lamp holder so that the lamp protuberance engages the recess in the lamp holder Lamp protuberance Lamp bulb Dichroic mirr...

Page 511: ...n below shows the positional relationship of utility ports 123 User port 2 O ring P20 O ring P5 Screw M4 8 Flange User port 1 O ring P12 Screw M3 6 118 8 6 USER PORTS Small port Large port The sizes o...

Page 512: ...he heating cable terminals on the AFM amplifier correspond to the screw holes on the scanner holder tip Pin 1 Bias reference contact Scanner Bias electrode Pin 2 Heating cable terminal B Bias contact...

Page 513: ...maintenance This set includes the following items Tool box Hexagonal wrench set 1 set Jeweler s screwdriver set 1 set Phillips screwdriver large 1 Flat blade screwdriver large 1 24 mm single head wren...

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