５
MEASUREMENT OPERATION
•
IS
5-242
TMPM5200-2
. Usually,
perform it in the STM mode. You must use the conductive cantilever when you
perform IS measurement in the AFM mode.
u can m
ping
tween the ti
f
during IS measurement.
The position at which IS m
s determined by using the
sition function in the Tip
You can perform IS measurement in the STM or contact AFM mode
In the IS mode, yo
easure the change of the tunneling current by swee
the distance be
p and specimen. Feedback is automatically turned of
easurement is carried out i
Po
window.
fy this item in the same way as for IV.
e sweeping direction for the distance between the tip and the speci-
men.
In->Out:
The tip moves away from the specimen.
inear Current for IS measurement because you measure the change of
the tunneling current by sweeping the distance between the tip and specimen.
•
Clock/ms, Preamp Gain, Number to Average, Number of Points and SPS Mode
Speci
•
Tip Displacement/nm
±
Specify the scanning range of the tip in the vertical (Z) direction.
•
Tip Offset/nm
Specify the offset value in the Z direction. The value in Tip Offset/nm will be
added to the height before scanning. Usually, specify 0.
•
Ramp Direction
Specify th
Out->In:
The tip approaches the specimen.
•
Source
Select L
