NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
4
User Guide | Entegris, Inc.
General Considerations
NOTE: The flow controller has been
factory sealed. Do not attempt to
remove the cover of the unit. Any
attempt at removal of the unit cover
will void the warranty.
LINE PRESSURE
—
The system line pressure (measured
at the inlet of the unit) must be
between 69 to 414 kPa (10 and
60 psig). The minimum operating
pressure is 69 kPa (10 psig).
PRESSURE DROP
—
The minimum pressure drop (differ-
ential pressure) required for the unit
is 69 kPa (10 psid).
For example, if the flow controller
is operating at an inlet pressure of
103 kPa (15 psig) and outputs the
flow to a pressurized canister, which
is pressurized to 69 kPa (10 psig), the
pressure available to the unit will be
34 kPa (5 psid) (i.e., 103 kPa [15 psig]
inlet pressure minus 69 kPa [10 psig]
back pressure is 34 kPa [5 psid] avail-
able pressure drop). This scenario
does
not
meet the pressure drop
requirement of 69 kPa (10 psid) and
the unit may not perform within
specification. For this example,
either increase the inlet pressure or
decrease the back pressure to obtain
a 69 kPa (10 psid) pressure drop.
AMBIENT TEMPERATURE RANGE
—
The flow controller is designed to
operate in room temperature clean-
room environments: 10° to 30°C
(50° to 86°F). The unit must be
re-zeroed at operating temperature
conditions for the accuracy specifi-
cations to apply.
PROCESS TEMPERATURE RANGE
—
The range of acceptable process
temperatures is 10° to 65°C (50° to
149°F). The flow controller must be
re-zeroed at operating temperature
conditions for the accuracy specifica-
tion to apply. PFA isolators are recom-
mended for process temperatures
higher than 50°C (122°F). Applications
involving hydrofluoric acid (HF) with
temperatures above 30°C (86°F) must
contact the factory for recommend-
ed materials of construction. Positive
pressure must be maintained at
all times.
