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NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION

Entegris, Inc. | User Guide

Ordering Information

NT Integrated Flow Controller, NT6500:

part number

6500 – – – – – –

Primary/secondary seal

U3 = Kalrez 6375 UP/Viton

Sensor interface

P7 = CTFE
P8 = PFA

Electrical connector type

AM12 = PVC-jacketed 12' cable set

Inlet/outlet port connection

F02 = 1⁄4" Flaretek tube fitting
F03 = 3⁄8" Flaretek tube fitting
F04 = 1⁄2" Flaretek tube fitting
F06 = 3⁄4" Flaretek tube fitting

Setpoint input signal, controller type

D = DeviceNet communication

Flow range

T0 =  0  –15  mL/min
T1  =  0  –125  mL/min
T2 =  0  –250  mL/min
T3 =  0  –500  mL/min
T4 =  0  –1250  mL/min

T5 =  0  –2.5  L/min
T6 =  0  –5  L/min
T7  =  0  –10  L/min
T8 =  0  –20  L/min
T9 =  0  –40  L/min*

*Please consult factory for operating pressure requirement.

Allowed process connection and flow range combinations

FLARETEK FITTING SIZE FLOW RANGE

⁄

Yes

—

⁄

Yes

—

⁄

—

Yes

—

⁄

—

Yes

Summary of Contents for NT6500

Page 1: ...NT Integrated Flow Controller with DeviceNet Communication User Guide P N 2608 REV B 05 19 ...

Page 2: ...ements 10 Mechanical Installation 11 Electrical Connections 12 Unit Operation 14 Operating Environment 14 Performance 14 Reliability Information 16 Diagnostic Guide 17 Maintenance 19 Normal Operation 19 Re zero Function 19 Reference 20 Ordering Information 21 Certifications 22 DeviceNet Communication Integrated Flow Controller Device 23 Device Type 00hex 23 Identity Object 01hex 27 Message Router ...

Page 3: ...t from the standard offering NOTE Nonstandard NT Integrated Flow Controllers may be identified by the model number found on the product label Specifications for nonstandard NT Integrated Flow Controllers are available by contacting Entegris Nonstandard NT Integrated Flow Controllers Model 6500 product line are identified with an M followed by a number code Example part number 6500 T2 F02 AM12 D P7...

Page 4: ... AUTOZERO FUNCTION If autozero is enabled and the set point is set to 5 the valve closes and the flowmeter will enter into the re zero routine Upon application of a setpoint greater than or equal to 5 a new differential pressure DP zero value will be stored in non volatile memory and the unit will immediately resume operation Autozero is a selectable option through DeviceNet communication messagin...

Page 5: ...ck pressure is 34 kPa 5 psid avail able pressure drop This scenario does not meet the pressure drop requirement of 69 kPa 10 psid and the unit may not perform within specification For this example either increase the inlet pressure or decrease the back pressure to obtain a 69 kPa 10 psid pressure drop AMBIENT TEMPERATURE RANGE The flow controller is designed to operate in room temperature clean ro...

Page 6: ...ids These devices may produce electrical transients that may affect unit measurements An induced power spike creating an interruption in power greater than 10 msec in duration may cause the unit to reset DEVICENET CABLE The power supply range of the DeviceNet cable is 24 VDC 10 150 mA nominal current In addition to providing clean power all power communication cables must not be run within the sam...

Page 7: ...ura tion missing incomplete or incorrect DeviceNet Network Status LED This LED is labeled Net INTEGRATED FLOW CONTROLLER STATE LED STATE DESCRIPTION Not powered or not on line Off IFC is not on line IFC may not be powered look at Module Status LED On line not connected Flashing green IFC is on line but has no connection Link OK on line connected Green IFC is on line and has connection Connection t...

Page 8: ...position 0 selects 125 Kb position 1 selects 250 Kb and position 2 selects 500 Kb The PGM label indicates the software program mable switch positions Electrical Isolation The degree of electrical isolation between power and DeviceNet communication is as listed below From Power 24 VDC To DeviceNet Comm Isolation degree 500 VAC VDC Reverse Polarity Protection The flow controller is reverse polarity ...

Page 9: ... mm 0 77 244 1 mm 9 61 8 123 4 mm 4 86 130 mm 5 12 19 6 mm 0 77 247 7 mm 9 75 2 127 mm 5 00 133 6 mm 5 26 21 6 mm 0 85 251 7 mm 9 91 4 134 9 mm 5 31 141 5 mm 5 57 25 7 mm 1 01 257 8 mm 10 15 NT Integrated Flow Controller with DeviceNet Communication 65 5 mm 2 58 Top View Side View Front View A B D C 217 2 mm 8 55 230 4 mm 9 07 72 9 mm 2 87 47 mm 1 85 7 1 mm 0 28 ...

Page 10: ...t protect the flared tube con nections during shipment See Prepare Fluid Lines on page 11 Tightening these nuts without the proper tubing installed may damage the unit s flared tube connections Remove Unit from the Bag NOTE This unit has been assembled and double bagged under cleanroom conditions To maintain purity only open under cleanroom conditions ...

Page 11: ...at the inlet or the outlet connection Mount the Unit The flow controller and base bracket assembly must be mounted to a solid surface to ensure stability Verify the valve and the electrical cable are free from mechanical stress from the surrounding equipment NOTE The flow controller requires mounting in the direction of the fluid flow 10 M4 Pan head 10 M4 Flat washer Recommended Hardware 47 0 mm 1...

Page 12: ... size and fittings To prepare the fluid lines begin by sliding the supplied nuts onto the fluid tube Prepare Fluid Lines Connect Fluid Lines NOTE Flare each tube end prior to installation onto the valve fitting CAUTION Overtightening of the nuts will result in damage to the fittings Process ﬂuid tube Slide the nut onto the tube Process ﬂuid tube Flare each tube end prior to installation ...

Page 13: ...a solid surface to ensure stability Verify the body and the electrical cable are free from mechanical stress from the surrounding equipment ELECTRICAL CONNECTIONS Connect cable to flow controller The cable mounting receptacles are physically keyed making it impossible to insert the connector improperly Press it into the mount ing receptacle and rotate the outer coupling ring to lock the connector ...

Page 14: ...nector is a 5 pin micro style 12 mm male type FUNCTION PIN ASSIGNMENT COLOR Drain 1 Bare wire V 2 Red V 3 Black CAN_H 4 White CAN_L 5 Blue NOTE The allowable torque on the 8 32 1 2 PVDF screws used to secure the clear switch access cover is 7 Newton centimeters MSD LSD Data rate Data Rate Node Address 00 63 Net Mod LSD MSD PGM PGM 500 Kb 2 125 Kb 0 250 Kb 1 2 4 6 8 0 2 4 6 0 ...

Page 15: ...cy errors Correction factors for viscosity and specific gravity changes may be obtained from Entegris by calling or following the sensing and control product links at www entegris com Power up Characteristics When power is first applied to the flow controller the flow will be within 2 of the setpoint value in less than 10 seconds and within specification after 5 minutes As part of the power up rou...

Page 16: ... respond to setpoint changes within 50 msec of receiving the new setpoint value Pressure Measurement Accuracy The accuracy of the pressure output is 1 of full scale These calcula tions include the effects of linearity hysteresis and repeat ability measured at 23 C 73 F Minimum Operating Pressure The unit will operate within speci fication at any inlet pressure within the range of 69 to 414 kPa 10 ...

Page 17: ...secondary containment regions Long term Reliability The valve system can withstand 3 5 million open close cycles before the control performance is compromised Enclosure Integrity Spray down of the flow controller will not affect the performance per IP54 Drop and Topple If the unit topples over from a 45 degree angle onto a bench top the performance will not be com promised and the unit will not be...

Page 18: ...ons are noisy Flow turbulence may be caused by noisy pumps used in a system Examples of noisy pumps are dia phragm pumps without pulsation dampeners and peristaltic pumps operating at low flow rates Please contact Entegris for additional information 4 Unit resets The supply power 24V is noisy If the power supply is shared with other systems components such as solenoids DC motors valves etc the uni...

Page 19: ...sure is not 69 kPa 10 psig greater than outlet pressure See above Symptom 5 7 Flow output is not responsive to changes in setpoint signal Valve in full open position If the unit is plumbed be tween two closed valves the unit may stall in the full open position when the unit is commanded to close Since a fixed volume of fluid is incompressible the unit may stall when attempting to close if upstream...

Page 20: ...to begin a re zero process The Stop_Zero_Adjust service command in the Analog Sensor Object is sent to stop the re zero process When the re zero function is activated the flow controller valve module will close fully to ensure that fluid is not flowing The unit will verify the no flow condition and then re zero the flow module The entire re zero function is completed in 10 seconds In order to obta...

Page 21: ...Electrical connection 12 length with 22 ga wire PVC jacketed wire Performance specifications Flow accuracy 1 0 FS at 20 to 100 of flow range 2 5 FS at 10 to 20 of flow range Accuracy defined for 20 seconds average using DI water at 23 C 73 F Accuracy not specified 0 to 10 of flow range Pressure accuracy 1 0 FS full scale is 414 kPa 60 psig includes the combined effects of linearity hysteresis and ...

Page 22: ... tube fitting F04 1 2 Flaretek tube fitting F06 3 4 Flaretek tube fitting Setpoint input signal controller type D DeviceNet communication Flow range T0 0 15 mL min T1 0 125 mL min T2 0 250 mL min T3 0 500 mL min T4 0 1250 mL min T5 0 2 5 L min T6 0 5 L min T7 0 10 L min T8 0 20 L min T9 0 40 L min Please consult factory for operating pressure requirement Allowed process connection and flow range c...

Page 23: ...sit www entegris com for the most current information ODVA CONFORMANCE The NT Integrated Flow Controller with DeviceNet communication has successfully completed and passed Open DeviceNet Vendor Association ODVA approved conformance tests at the independent authorized ODVA Training and Technology Center in Ann Arbor MI Entegris has been issued an official Declaration of Conformity from ODVA for thi...

Page 24: ...at closes the loop by receiving a set point and driving the actuator such that the fluid flow rate is controlled to the setpoint This chapter contains two primary sections First the device profile is specified as it appears in general DeviceNet specification Second the vendor specific attributes services behaviors ranges and capabilities are specified Object Model The Object Model in Table 1 repre...

Page 25: ... sensed para meters for example differential pressure Instance 2 Pressure The measured fluid pressure Hierarchy of Semiconductor Equipment Device Objects S Analog Sensor Class Connection Class DeviceNet Pressure Flow S Single stage controller S Analog actuator S Senor calibration S Device supervisor Message router Identity DeviceNet Assembly Explicit message I O P N 01 2608 Rev B 03 19 Figure 3 Ob...

Page 26: ...es for all application objects in the device and consolidates the Exception Conditions and Application Objects Status This object behaves differently from the Identity object in that the S Device supervisor object provides a single point of access to the Application Objects only it does not affect the DeviceNet specific objects i e Identity DeviceNet Connection etc S Sensor calibration Modifies th...

Page 27: ...ed by this device It is provided primarily to specify which attributes and services are supported and with what ranges NOTE Specific definitions of attributes and services are included here for reference only For specification details and latest revisions see the DeviceNet Specifications NOTE Attribute Tables that include an NV column use the following nomenclature V Volatile value is lost upon po...

Page 28: ...x Required Yes Get_Attribute_ Single Attribute ID USINT Retrieves an attribute value 1 255 Instance 1 Attributes 1 1 Instance Attributes Identity Object 1 ATT ID REQUIRED SUPPORTED ACCESS RULE NV NAME DATA TYPE ATTRIBUTE DESCRIPTION VALUES 1 Required Yes Get NVC Vendor ID UINT ODVA assigned identification of vendor 864 NT International 2 Required Yes Get NVC Device type UINT Indication of general ...

Page 29: ... Major unrecoverable fault b12 b15 0 6 Required Yes Get NVF Serial number UDINT Serial number of device Must be guaran teed unique for a given Vendor ID 7 Required Yes Get NVF Product name SHORT_ STRING Human readable identification FFC Services 1 1 Instances Services Identity Object 1 CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION PARAMETER VALUES 0Ehex Required Yes Get_Attribute_ Single Att...

Page 30: ...ED SUPPORTED ACCESS RULE NAME DATA TYPE ATTRIBUTE DESCRIPTION VALUES 1 Optional Yes Get Revision UINT Object revision 01 Services 2 0 Class Services Message Router Object CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION PARAMETER VALUES 0Ehex Required Yes Get_Attribute_ Single Attribute ID USINT Retrieves an attribute value 1 255 Instance 1 No instance attributes No instance services ...

Page 31: ...le Attribute ID USINT Retrieves an attribute value 1 255 Instance 1 Attributes 3 1 Instance Attributes DeviceNet Object 1 ATT ID REQUIRED SUPPORTED ACCESS RULE NV NAME DATA TYPE ATTRIBUTE DESCRIPTION VALUES 1 Optional Yes Get NV MACID USINT Node address 0 63 2 Optional Yes Get NV Baud rate USINT Baud rate 0 125K 1 250K 2 500K 3 undefined 3 Optional Yes Get NV BOI BOOL Bus off interrupt 0 Hold bus ...

Page 32: ...n the attribute s limit the attribute has SET access Services 3 1 Instances Services DeviceNet Object 1 CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION PARAMETER VALUES 0Ehex Required Yes Get_Attribute_ Single Attribute ID USINT Retrieves an attribute value 1 255 10hex Required Yes Set_Attribute_ Single Attribute ID USINT Value Sets an attribute value Attribute ID 1 255 Value attribute specifi...

Page 33: ...YPE DESCRIPTION VALUES Allocation choice Yes BYTE Specifies the connection types b0 Explicit b1 Polled b2 Bit strobe b3 Multicast poll b4 COS b5 Cyclic b6 Ack suppress b7 Reserved Master Yes USINT Master s MACID 0 63 Allocate success Yes BYTE Message body format number of bits for Class Instance identifiers 0 8 8 default 1 8 16 2 16 16 3 16 8 ...

Page 34: ...Set NV Default I O consume USINT Default output assembly inst ID 10 11 default 10 101 Vendor specific Yes Set NV Default I O produce USINT Default input assembly inst ID 1 2 3 6 default 2 Services 4 0 Class Services Assembly Object CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION PARAMETER VALUES 0Ehex Required Yes Get_Attribute_ Single Attribute ID USINT Retrieves an attribute value 1 255 10he...

Page 35: ...e 10 Y default Output Setpoint 11 Y Output Override and setpoint Element Mapping Assembly Object Element Mapping DATA COMPONENT NAME CLASS INSTANCE NUMBER ATTRIBUTE NAME NUMBER NAME NUMBER TYPE Flow S Analog sensor 31hex 1 Value 6 INT Pressure S Analog sensor 31hex 2 Value 6 INT Valve S Analog actuator 32hex 1 Value 6 INT Override S Analog actuator 32hex 1 Override 5 USINT Setpoint S Single stage ...

Page 36: ... structure of data elements with the First element elements are listed in the Instance Identifiers table ordered first All data components are encoded with the low ordered byte first i e the least significant byte LSB is in the Low ordered index Address also known as Little endian Services 4 N Instanc Services Assembly Object CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION PARAMETER VALUES 0Eh...

Page 37: ...D USINT Retrieves an attribute value 1 255 Instance 1 Explicit Attributes 5 1 Instance Attributes Connection Object 1 ATT ID REQUIRED SUPPORTED ACCESS RULE NAME DATA TYPE ATTRIBUTE DESCRIPTION VALUES 1 Optional Yes Get Revision USINT Object state 00 Non existent 01 Configuring 02 Waiting for conn ID 03 Established 04 Timed out 05 Deferred delete 2 Required Yes Get Instance type USINT Explicit 00 3...

Page 38: ...ime out not supported 01 Auto delete default 02 AutoReset not supported 03 Deferred delete 13 Required Yes Get P Conn Path Length UINT Path length 00 14 Required Yes Get P Conn Path EPATH Path from which connection produces Empty 15 Required Yes Get C Conn Path length UINT Path length 00 16 Required Yes Get C Conn Path EPATH Path to which connection consumes Empty Services 5 1 Instance Services Co...

Page 39: ...t Initial Comm charac teristics BYTE Group IDs 0 01 7 Required Yes Get P Conn size UINT Produced data size Size of selected input assembly data 8 Required Yes Get C Conn size UINT Consumed data size Size of selected output assembly data 9 Required Yes Set EPR UINT Expected packet rate in milliseconds 0 Default 12 Required Yes Set WTO action USINT Watch dog timeout action 00 Time out default 01 Aut...

Page 40: ... Connection Object 2 CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION PARAMETER VALUES 0Ehex Required Yes Get_Attribute_ Single Attribute ID USINT Retrieves an attribute value 1 255 10hex Required Yes Set_Attribute_ Single Attribute ID USINT Value Sets an attribute value Attribute ID 1 255 Value attribute specific ...

Page 41: ... Attributes 30 1 Instance Attributes S Device Supervisor Object 1 ATT ID REQUIRED SUPPORTED ACCESS RULE NV NAME DATA TYPE ATTRIBUTE DESCRIPTION VALUES 3 Required Yes Get NVC Device type SHORT STRING ASCII text Max 8 charac ters see Semantics section FFC 4 Required Yes Get NVC SEMI standard revision level SHORT STRING Specifies the revision level of the SEMI S A Network Standard to which the device...

Page 42: ...NG ASCII text max 30 characters Device specific 10 Optional Yes Get NVF Device Config uration SHORT STRING ASCII text max 50 characters Device specific 11 Required Yes Get V Device status USINT State of the device s application objects 0 Undefined 1 Self testing 2 Idle 3 Self test exception 4 Executing 5 Abort 6 Critical fault 7 50 Reserved by DeviceNet 51 99 Device specific 100 255 Vendor specifi...

Page 43: ... of A structure of three structures containing bitmapped represent ations of the alarm detail Common exception detail STRUCT of Size USINT Number of common detail bytes 02 Detail 0 BYTE b0 Internal diagnostics b1 0 b2 EPROM b3 EEPROM b4 RAM b5 0 b6 Internal real time b7 0 Detail 1 BYTE b0 b7 Not supported Device exception detail STRUCT of Size USINT Number of common detail bytes 03 Detail 0 BYTE b...

Page 44: ...CT of Size USINT Number of manufacturer detail bytes 01 Detail 0 BYTE Manufacturer specified b0 b7 0 14 Based on exception status b7 Yes Get V Exception detail warning STRUCT of A structure of three structures containing bitmapped represent ations of the warning detail Common exception detail STRUCT of Size USINT Number of common detail bytes 02 Detail 0 BYTE b0 Internal diagnostics b1 0 b2 EPROM ...

Page 45: ...detail bytes 03 Detail 0 BYTE b0 Reading valid b1 Flow low b2 Flow high b4 0 b5 0 b6 Pressure low b7 Pressure high Detail 1 BYTE b0 b7 0 Detail 2 BYTE b0 b7 0 Manu facturer exception detail STRUCT of Size USINT Number of manufacturer detail bytes 01 Detail 0 BYTE Manufacturer specified b0 b7 0 15 Required Yes Set NV Alarm enable BOOL Enables the setting of alarm bits 00 Disabled 01 Enabled default...

Page 46: ...n attribute value Attribute ID 1 255 Value attribute specific 05hex Required Yes Reset None Resets the device to the self testing state 06hex Required Yes Start None Moves the device to the executing state 07hex Optional Yes Stop None Moves the device to the idle state 4Bhex Required Yes Abort None Moves the device to the abort state 4Chex Required Yes Recover None Moves the device out of the abor...

Page 47: ... 255 Instance 1 Flow Attributes 31 1 Instance Attributes S Analog Sensor Object 1 ATT ID REQUIRED SUPPORTED ACCESS RULE NV NAME DATA TYPE ATTRIBUTE DESCRIPTION VALUES 3 Optional Yes Get NVC Data type USINT Determines the data type of value and all related attributes as specified in this table default INT 4 Optional Yes Get NVC Data units ENGUNITS Determines the units context of value and all relat...

Page 48: ...tatus 0 Disable default 1 Enable 10 Optional Yes Get NVC Full scale Same as value The value of full scale for the sensor 6000hex 17 Optional Yes Set NV Alarm trip point high Same as value Determines the value above which an alarm condition will occur default Maximum value for its data type 18 Optional Yes Set NV Alarm trip point low Same as value Determines the value below which an alarm condition...

Page 49: ...afe value Same as Value The value to be used for Safe state Safe value default 0 27 Optional Yes Set NV Autozero enable BOOL Enables the Autozero 0 Disable 1 Enable default NOTE This default is a DeviceNet compliance variance 28 Optional Yes Get V Autozero status BOOL Indicates the status of the automatic nulling 0 Inactive 1 Active Counts are interpreted as a Percent of full scale where a Count v...

Page 50: ...ptional Yes Set NV Gas cali bration object instance UINT Indicates which Gas calibration object instance is active for this object 00 Disabled 01 Enable default NOTE This default is a DeviceNet compliance variance 99 Cond Yes Get NVC Subclass UINT Identifies instance subclass 01 Flow diagnostics 100 Vendor specific Yes Set NV Damping coefficient USINT Low pass filter coef ficient τ 62 5ms 2n 0 dis...

Page 51: ...e zero process 32hex Vendor specific Yes Stop_Zero _Adjust None Terminates the re zero process NOTE Upon termination of Zero adjust if the Actuator override is set to Hold the Actuator will resume to hold at the value just prior to the initiation of the Zero adjust Hence the FFC device can be made to jump start the position of the valve at the outset of the control algorithm by the following seque...

Page 52: ...1 Valid invalid e g not warmed up yet 6 Required Yes Get V Value INT or specified by data type if supported Analog input value The cor rected con verted cali brated final value of the sensor 7 Required Yes Get V Status BYTE Alarm and warning state of this object instance b0 High alarm b1 Low alarm b2 High warning b3 Low warning b4 b7 Reserved 8 Optional Yes Set NV Alarm enable BOOL Enables the set...

Page 53: ...ning trip point low Same as value Determines the value below which a warning condition will occur default Maximum value for its data type 25 Optional Yes Set NV Safe state USINT Specifies the behavior for the value for states other than Execute 0 Zero default 1 Full scale 2 Hold last value 3 Use safe value 4 Continue sensing 5 50 Reserved 51 99 Device specific 100 255 Vendor specific 26 Optional Y...

Page 54: ... Analog Sensor Object 2 CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION PARAMETER VALUES 0Ehex Required Yes Get_Attribute_ Single Attribute ID USINT Retrieves an attribute value 1 255 10hex Required Yes Get_Attribute_ Single Attribute ID USINT Value Sets an attribute value Attribute ID 1 255 Value attribute specific ...

Page 55: ...te_ Single Attribute ID USINT Retrieves an attribute value 1 255 Instance 1 Attributes 32 1 Instance Attributes S Analog Actuator Object 1 ATT ID REQUIRED SUPPORTED ACCESS RULE NV NAME DATA TYPE ATTRIBUTE DESCRIPTION VALUES 3 Optional Yes Get NVC Data type USINT Determines the data type of Value default INT 4 Optional Yes Get NVC Data units UINT Determines the context of Value default Counts 5 Req...

Page 56: ...ical actuator for states other than Execute 0 Close 1 Open 2 Hold 3 255 Invalid 100 Vendor specific Yes Get NVF Actuator serial number UINT Configuration Values are stored in the Stepper motor controller 101 Vendor specific Yes Get NVF Stepper FW Rev SHORT STRING Configuration Values are stored in the Stepper motor controller 102 Vendor specific Yes Get NVF Home offset USINT Configuration Values a...

Page 57: ... Single Attribute ID USINT Retrieves an attribute value 1 255 10hex Required Yes Set_Attribute_ Single Attribute ID USINT Value Sets an attribute value Attribute ID 1 255 Value attribute specific 32hex Vendor specific Yes Load_Stepper _Defaults None Causes the Stepper driver to revert to default parameters 33hex Vendor specific Yes Update_ Stepper Parameter_ Attributes None Updates the DeviceNet v...

Page 58: ...ute_ Single Attribute ID USINT Retrieves an attribute value 1 255 Instance 1 Attributes 33 1 Instance Attributes S Single Stage Controller Object 1 ATT ID REQUIRED SUPPORTED ACCESS RULE NV NAME DATA TYPE ATTRIBUTE DESCRIPTION VALUES 5 Optional Yes Set NV Control Mode USINT Specifies the operational mode of the controller 0 Normal 1 Off 2 On 3 Hold 4 127 Reserved 128 255 Vendor specific 6 Required ...

Page 59: ...ng factor INT Tuning parameter Specified by the value of S Analog sensor object Instance 1 Attribute 3 A description of these vendor specific tuning parameters is beyond the scope of this document Services 33 1 Instance Services S Single Stage Controller Object 1 CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION PARAMETER VALUES 0Ehex Required Yes Get_Attribute_ Single Attribute ID USINT Retriev...

Page 60: ...Instances None Retrieves a list of all supported instances See response below Service Date Field Parameters Get_All_Instances Success Response PARAMETER REQUIRED DATA TYPE DESCRIPTION VALUES Size of list Required UINT Specifies the number of elements in the array Number of calibra tions in the list List of calibrations Required if size 0 ARRAY of Supported list STRUCT of Supported calibration UINT...

Page 61: ...NG ASCII text max 50 characters User accessible string represen tation used to identify the calibration or application default Null 6 Optional Yes Get NVF Full scale STRUCT of Full scale of the device using this object instance default 0 0 REAL Amount ENGUNITS Units Services 64 1 Instance Services S Sensor Calibration Object 1 CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION PARAMETER VALUES 0E...

Page 62: ...in the footer LIMITED WARRANTY Entegris products are subject to the Entegris Inc General Limited Warranty To view and print this information visit entegris com and select the Legal Trademark Notices link in the footer Entegris does not warranty any failure in the case of customers using unapproved foreign components P N 2608 Rev B 05 19 Entegris the Entegris Rings Design and other product names ar...

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