NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
14
User Guide | Entegris, Inc.
Unit Operation
OPERATING ENVIRONMENT
—
Operating Temperature
The flow controller is designed to
operate in ambient temperature,
cleanroom environments. The unit
is specified to operate at tempertures
between 10° and 65°C (50° and
149°F). PFA sensor isolators are re-
commended for process tempera-
tures above 40°C (104°F). Contact the
factory for recommended materials
of construction for applications
involving hydrofluoric acid (HF) with
temperatures above 30°C (86°F).
When the process fluid is above
ambient temperatures 23°C (73°F),
the system will experience slight
accuracy errors due to instrument
warm-up and changes in viscosity
and specific gravity of the liquid.
The unit
must
be re-zeroed after
any temperature change. Please
see the
Maintenance Section
on
page 19 to perform the re-zero.
Effects of Fluid Viscosity and
Specific Gravity
The flow controller has been factory
calibrated using deionized water.
Fluids with viscosities and/or specific
gravity different from the calibration
fluid (water) will cause slight accuracy
errors. Correction factors for viscosity
and specific gravity changes may be
obtained from Entegris by calling or
following the sensing and control
product links at
www.entegris.com.
Power-up Characteristics
When power is first applied to the
flow controller, the flow will be within
2% of the setpoint value in less than
10 seconds and within specification
after 5 minutes. As part of the power-
up routine, the unit will perform a
homing routine that re-establishes
the unit’s fully closed position. This
routine requires the valve to shut
completely for no more than
8 seconds, then to the position
dictated by the setpoint input.
Unit Enclosure
The standard NT Integrated Flow
Controller cover is factory sealed
and should not be tampered with
or opened. Spray-down will not
compromise the performance of
the unit.
NOTE: Any attempt to remove, tamper
or open the flow controller cover will
void the warranty.
PERFORMANCE
—
Operating Pressure Requirements
The flow rate is calculated using
Entegris’ differential pressure flow
technology. The minimum operating
pressure is 69 kPa (10 psig). The mini-
mum pressure drop (differential
pressure) required for the flow
controller is 69 kPa (10 psid).
CAUTION! The flow controller may
be damaged if it is subjected to any
level of vacuum pressure (less than
atmospheric pressure).
