INTELLIGEN LV DISPENSE SYSTEM
35
Installation and Use Manual | Entegris, Inc.
TROUBLESHOOTING
This section covers some of the common problems
and solutions for the dispense system. Refer to the
“Serial Communications Protocol” for details on event
codes, error codes, and other details, if required.
After making any adjustments, test the result with 2-3
dispenses. If the solutions in this section do not help,
please contact technical support.
Pump Does Not Dispense
PROBLEM
SOLUTION
Pump is not responding
Check electrical connections between pump,
interface module, and track.
Check that the N
2
or CDA supply is connected.
External stop valve not operating
Verify pneumatic connections to the external valve.
Pump is in error state
Clear alarms. If condition persists, contact Entegris
technical support.
Improper N
2
or CDA pressure or vacuum
Verify N
2
or CDA and vacuum supply pressure.
No chemical in pump
Replace source bottle and prime pump.
Replace filter if chemical has dried out.
Bubbles in tubing
Check fitting connections and tubing for leaks.
Poor Quality Dispense
PROBLEM
SOLUTION
Air trapped in lines
Perform multiple dispenses using high volume and rate.
Nozzle too high or nozzle ID too large
Adjust nozzle height and size for dispense rate and viscosity.
Poor Start of Dispense
SYMPTOM
PROBLEM
SOLUTION
Fluid pulls up in nozzle before
dispense starts
External stop valve opening too soon
Slow down valve with the external
stop valve setup on Recipe page.
Dispense starts, stops, and
proceeds with dispense
External stop valve opening too late
Open valve more quickly through
the external stop valve setup.