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INTELLIGEN LV DISPENSE SYSTEM
Installation and Use Manual | Entegris, Inc.
OVERVIEW
—
Entegris, Inc. provides this information for end
user reference.
Prior to using this manual, the user should verify
with the product manufacturer that the user has
the most recent copy of the product manual.
This manual is owned by Entegris, Inc., an affiliated
company for its suppliers, and the title shall not pass
to the user as a result of the use of the manual.
LIABILITY OWNERSHIP
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Read the following carefully before continuing:
In no event shall Entegris or its suppliers be liable for
any damages whatsoever (including, without limita-
tion, damages for loss of business profits, business
interruption, loss of business information, or any
pecuniary loss) arising out of the use of or inability to
use this manual, even if Entegris has been advised of
the possibility of such damages.
GENERAL MANUAL NOTES
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CHANGES TO THE MANUAL
The manufacturer reserves the right to make changes
to the product covered in this manual to improve
performance, reliability, or manufacturability.
Although every effort has been made to ensure ac-
curacy of the information contained in this manual,
the manufacturer assumes no responsibility for
inadvertent errors. Contents of the manual are
subject to change without notice.
INTENDED AUDIENCE
This manual is intended for technicians involved in
semiconductor manufacturing, and assumes that
each individual is familiar with the proper handling
of photochemicals and other potentially hazardous
materials. Users must also be familiar with installing
and using software on a computer running the
Windows
®
operating system.
INTENDED SCOPE AND USE
This manual is intended to be used by experienced
technicians for the planning, installation, and operation
of the described system. This manual contains basic
safety information for the installation and use of the
pump system. This manual covers this system only.
MISHANDLING products exposed to
a hazardous substance may result in death or
serious injury. Always follow the recommenda-
tions and guidelines provided by the chemical
suppliers and manufacturers. Always wear
appropriate personal protective equipment
(PPE) as required for the chemicals in use. Refer
to the Material Safety Data Sheets (MSDS) for
each chemical.
