12
INTELLIGEN LV DISPENSE SYSTEM
Installation and Use Manual | Entegris, Inc.
INSTALLING THE PUMP
Step 1: Preparation
1. Use the dimensional drawings as a reference for
dimensions and locations.
2. Leave appropriate space around the system to
perform any connections, maintenance, or trouble-
shooting. Clearance space can be shared space
with other equipment.
3. Verify all system facility hookups, including liquid
and power supplies. Refer to system specifications.
Step 2: Unpack and Position System
Allow space to make fluid connections, power, and
other cable connections. Please consult Entegris with
any installation questions.
1. Remove the outer protective bags in the change-
room. Wipe the inner bags according to cleanroom
procedures.
2. Bring the system components to the installation
location. Remove the inner bags.
3. Leave enough clearance around the system to
allow service access. Refer to system dimensional
drawings on page 10.
Step 3: Connect Electrical Supply
1. Connect power/communications cable. Contact
Entegris for any pinout or connection details.
Step 4: Connect N
2
and Vacuum Supplies
1. Connect filtered and regulated N
2
or CDA supply
to the inlet connection. Do not turn on the supply
at this time.
2. Connect vacuum supply to the vacuum connector.
Rating is >20 in Hg.
Step 5: Install the Filter
The dispense system cannot operate without a filter
or a flushing shell installed.
WARNING! POTENTIAL CHEMICAL HAZARD!
Obtain the chemical supplier’s MSDS for
specific health and safety information.
WARNING! Always wear chemical-resistant
garments and eye protection when working on
or near the fluid system. Obtain the chemical
supplier’s MSDS sheet for specific health and
safety information.
1. Wear PPE.
2. Pull down the tab on the lever until it clears the
catch (shown with filter installed for reference).
3. Raise the lever to open the filter manifold.
4. Verify that only
ONE
set of O-rings is used.
WARNING! POTENTIAL CHEMICAL LEAK!
Use one set of O-rings only. Check that the
filter has O-rings or the manifold has O-rings.
NEVER use O-rings on both the filter and the
manifold or the system may leak chemical.