6
INTELLIGEN LV DISPENSE SYSTEM
Installation and Use Manual | Entegris, Inc.
SPECIFICATIONS
—
Dispense performance
Volume
0.01 – 10.0 mL in 0.001 mL increments
Rate
0.01 – 3.0 mL/sec in 0.001 mL/sec increments
Repeatability
≤ 0.02 mL 3 sigma
Viscosity range*
1 – 100 cP or at higher viscosities when dispense pressure
does not exceed 29 psi
Maximum dispense
design pressure**
0.20 MPa (29 psi)
Recharge performance
Fill rate, filtration rate,
vent rate, purge rate
0.1 – 3.0 mL/sec in 0.001 mL/sec increments
Vent frequency
Auto-venting or 1 – 10,000 dispense cycles
Mechanical
Wetted surfaces
Modified PTFE, PTFE, Kalrez
®
Connection type
Insert style, Super Type Pillar
®
, or Flowell
™
60 Series
Filter
Impact
®
8G or Impact 2 V2 (OF style)
Inlet, outlet and
vent tubing
OD:
6.35 mm (0.25") or 6.0 mm (0.24")
ID:
3.97 mm (0.156") or 4.0 mm (0.16")
Inlet gas type
Regulated N
2
Operating conditions
Minimum operating pneumatic pressure:
0.26 MPa (38 psi)
Maximum operating pneumatic pressure:
0.28 MPa (40 psi)
Pneumatic leak pressure:
0.30 MPa (43 psi)
Vacuum
- 68 kPa (20 in-Hg min)
Dimensions
Height
200.1 mm (7.878")
Width
60.7 mm (2.39")
Depth
209.17 mm (8.235")
Weight
Approximately 5 kg (11 lbs)
Electrical
Current rating
1.25A maximum
Input voltage (system)
24 VDC ±10%
Serial communication
Specifications are dependent on interface module use
Parallel communication
Triggers and acknowledgments
Certifications
See provided documentation
Environment
Indoor use only
Altitude below 2000 m (2187.22 yd)
Ambient temperature 5° – 40°C (41° – 104°F)
Maximum relative humidity 80% for temperatures up to 31°C (88°F) decreasing linearly
to 50% relative humidity at 40°C (104°F)
Main supply fluctuations from 22 – 26 VDC
Transient overvoltages of overvoltage category II
Pollution degree 2
* Depends on tool configuration. Contact applications support for detailed window of operation.
** Maximum pressure is a limit on the Window of Operation. Actual volumes and rates may be restricted
to comply with the pressure limits for a given viscosity, tubing diameter, tubing length, and tubing height.
