INTELLIGEN LV DISPENSE SYSTEM
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Installation and Use Manual | Entegris, Inc.
CONFIRMATION TAB
The Confirmation tab compares a dispense profile to a referenced
profile by means of a criteria of “settable” confirmation tests.
• Alarms can be set to warning or error.
• Alarm limits, upper and lower, can be set by the user.
• A referenced dispense profile can be saved and viewed
for each recipe.
Last dispense
cycle number
Load both
profiles onto
the profiling page
Load last
dispense profile;
load data into
test field
Load only reference profile
onto profiling screen
Test field
conditions
Save last dispense to reference
of this recipe number
Select reference
to compare
Load
reference
Control panel
