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INTELLIGEN LV DISPENSE SYSTEM
Installation and Use Manual | Entegris, Inc.
HANDLING
Each dispense system is manufactured with
strict assembly, test, and inspection processes
to ensure high-quality assembly and protection
from unintended chemical release. As with all
chemical handling systems, the dispense system
has chemical connection points that must be
handled with care, including:
• Fluid ports on the top surface
• Filter fittings
• Pressure sensor ports on the back (under the
top cover)
• Between valve plate (front) and pump block
• Pump diaphragm mechanism in the pump block
A potential for chemical leak can occur at the above
cited points. Use care to ensure that O-rings are either
on the filter or on the manifold, never on both, or the
system will leak. Refer to filter installation instructions
in this manual.
Do not loosen any screws on the mechanism unless
specifically directed to do so by an Entegris service
engineer. Handle the dispense system with care to
prevent damage to any fluid handling point.
Additional points of critical assembly and perfor-
mance include pneumatic tubing, pressure and
vacuum connecting points, and solenoid manifold
tubes (inside cover or backplane). Use care to pre-
vent any damage to the unit which could result in
chemical leakage.
CHEMICAL LEAKS
In the event of a suspected or confirmed chemical
leak from the pump or in the vicinity of the pump,
please follow the instructions below:
1. Determine chemical currently in use with pump.
2. Obtain MSDS.
a. Determine if any incompatible materials may
come in contact with the leaking material.
b. Isolate incompatibles with barriers, including
spill containment, closing valves and removing
the chemical supply, if it is safe to do so.
c. Identify appropriate chemical protection equip-
ment requirements, including gloves, face and
eye protection, and chemical protective clothing
to prevent exposure to or contact with chemicals.
d. Determine if the chemical has permissible
exposure limits or short-term exposure limits:
– Identify limits requiring respiratory protection.
– Ensure that appropriate monitoring devices
are available to measure air levels.
3. Only personnel properly trained
to clean spills
of hazardous materials should conduct cleanup
activities. Consult local authorities or identified
hazardous materials emergency response agen-
cies or contractors for assistance if the facility
does not have trained personnel for spill cleanup
or containment.
4. Ensure adequate monitoring and protective
equipment is available for cleanup of hazardous
materials.
