
SAFETY - PRECAUTIONS AND FEATURES
Page 1-4
ELECTROSTATIC DISCHARGE
SENSITIVE DEVICES
This manual contains maintenance procedures for parts and assemblies sensitive to
damage by electrostatic discharge (ESD). Parts or assemblies are identi
fi
ed as ESD
sensitive by the symbol to the left.
The following are general precautions that should be observed when handling ESD
sensitive devices or assemblies:
1. Handling ESD sensitive devices at approved
fi
eld force protective work stations.
2. Keep work area free of static generators, such as plastic cups, foam cushions, and
rayon or polyester apparel.
3. Avoid static-producing activities, such as wiping feet and removing or putting on
smocks while in the work area.
4. Use ESD protective equipment, such as grounded work benches, grounded tools
and test equipment, conductive
fl
ooring, air ionizers, personnel ground straps with 1
megohm minimum resistance, and protective apparel whenever possible.
5. Store and transport ESD sensitive devices in protective bags, tote boxes, or trays.
Use original packaging whenever possible.
6. Remove power and signals before removing or installing ESD sensitive devices or
assemblies.
7. Handle ESD sensitive circuit card assemblies by their shunt bars or edges. Do not
touch parts, terminals, or circuitry. Do not use canned coolant for fault isolation.
Summary of Contents for ZP 16
Page 1: ...Installation Operation Maintenance Manual ZP Series 56120 REV AH 10 2019...
Page 4: ...INTRODUCTION THIS PAGE INTENTIONALLY LEFT BLANK...
Page 6: ...CHAMBER LABELS MEANINGS THIS PAGE INTENTIONALLY LEFT BLANK...
Page 40: ...GENERAL DESCRIPTION Page 2 24 THIS PAGE INTENTIONALLY LEFT BLANK...
Page 42: ...INSTALLATION Page 3 2 Figure 1 Transporting a Chamber...
Page 46: ...INSTALLATION Page 3 6 Table 2 Water Usage SI Units...
Page 62: ...OPERATION Page 4 14 THIS PAGE INTENTIONALLY LEFT BLANK...
Page 82: ...MAINTENANCE WITH Q A Page 5 20 THIS PAGE INTENTIONALLY LEFT BLANK...
Page 84: ...SERVICE PARTS WARRANTY Page 6 2 THIS PAGE INTENTIONALLY LEFT BLANK...
Page 88: ...SYSTEM DIAGRAMS Page 9 4 THIS PAGE INTENTIONALLY LEFT BLANK...