Bruker QUANTAX EDS, User Manual, Page: 94 / 119

User Manual 5 Step-by-Step Guides
94
5.13.3 Standard-based Zeta Quantification
This section describes how to perform standard-based quantification of electron transparent
samples using beam current and thickness of standard sample as reference values.
Step Example/hints
1 Click the
Standards configurator
’s
calibration icon to open the
SYSTEM FACTOR CALIBRATION
dialog.
2 Measure and enter the beam current
value as system factor.
Follow section 5.10 for electron transparent
samples. Enter the beam current in [pA] units.
3 Check or Load the appropriate Zeta
factors.
Follow section 5.11.3.
4
Select the or
workspace and
a) a spectrum
b) use the Spectrum chart icon to
open a spectrum
Enter the beam current as spectrum
parameter: double click on the highlighted line
of the active spectrum in the spectrum list
(below the spectrum) to open the
SPECTRUM PROPERTIES
dialog and enter
the beam current in pA as system factor in
the
Parameter tab.
c) drag and drop a spectrum from project
to Spectrum chart.
5
Click on the button and
Load… a quantification method.
Select a TEM quantification method.
Alternatively drag and drop a quantification
method from the project to spectrum.
6 Set the quantification method to
interactive ( ).
7
Click on the button to
access the
QUANTIFICATION
dialog.
8 Set
Quantification model
to Zeta factor
method and perform quantification of
“unknown” sample.
See section 5.12.1 to optimize quantification
and to save or export quantification method
and results.
Calculated thickness is shown below the
result table. Density is calculated based on
element composition. If density is known, it
can be entered and sample thickness will
change correspondingly.
9
Click to close the
QUANTIFICATION dialog.