Bruker QUANTAX EDS, User Manual, Page: 117 / 119

Index QUANTAX EDS
117
Index
A
Access rights ...................................................... 21
Administrator rights ............................................ 18
Analysis
Line scan ........................................................ 98
Map .............................................................. 106
Objects ........................................................... 96
Assistants ..................................................... 28, 47
Automation ......................................................... 29
AutoPhase ........................................................ 109
B
Backing up data .................................................. 21
Beam current setting .......................................... 71
Beryllium
Safety issues .................................................. 10
Blind flange, original ............................................. 9
Broken window .................................................. 20
BSE detector ...................................................... 30
C
Calibration
Energy-Channel .............................................. 53
Spectrometer ........................................... 44, 53
Capturing images ............................................... 55
Client-server architecture ............................. 17, 25
Cliff-Lorimer factors
Experimental .................................................. 76
Theoretical ...................................................... 76
Coating correction .............................................. 68
Coating sample ................................................... 32
Command field ................................................... 42
Communication active, control ........................... 33
Communication server ....................................... 26
Compatibility, electromagnetic ........................... 11
Configurator
Microscope..................................................... 33
Project ............................................................ 38
Report ............................................................ 38
Sample ........................................................... 32
Scan ............................................................... 34
Spectrometer ................................................. 36
Cooling mode ............................................... 20, 36
Copy to clipboard ................................................ 39
D
Data
Backing up ...................................................... 21
File formats .................................................... 39
Load file .......................................................... 39
Loading ........................................................... 39
Save file .......................................................... 39
Saving ............................................................. 39
Transfer of SEM- ............................................ 17
Datacube .................................................. 102, 106
Dead time .......................................................... 16
Delete
User ............................................................... 27
Detector
Broken window ........................................ 10, 20
Window .......................................................... 20
Device settings .................................................. 42
Display settings .................................................. 43
Drift correction ................................................... 59
Dwell time .......................................................... 34
E
EBSD ................................................................. 28
Electromagnetic interference ............................. 11
Electron beam
Deflection ....................................................... 17
Electron transparent samples
Cliff-Lorimer quantification ....................... 90, 92
Zeta quantification .......................................... 94
Electronic noise .................................................. 16
Electrostatic damage ......................................... 20
Element distribution images .................... 102, 106
Element identification
Exchanging data ............................................. 39
Saving data ..................................................... 39
Element selection
Storing ............................................................ 39
Energy
Range ............................................................. 36
Resolution ...................................................... 16
Energy dispersive spectrometry ........................ 15
Energy-Channel calibration ................................. 53
Error recovery .................................................... 21
Export
Graphic ........................................................... 39
Extension, Image ............................................... 57
F
Feature ............................................................... 28
File
Data-............................................................... 39
Format ............................................................ 39
License ........................................................... 18
Project- ........................................................... 39
Filter time ........................................................... 16
Folder ........................................................... 26, 39
Font size ............................................................. 43
G
Grounding
mains supply .................................................. 10