Bruker QUANTAX EDS, User Manual, Page: 86 / 119

User Manual 5 Step-by-Step Guides
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5.12.3 Standard-based Quantification with a Temporary Reference
This guide describes how to perform standard-based quantification without calibration of system
factor, measuring reference and unknown samples with same microscope/beam conditions.
Step Example/hints
1 Prepare an “unknown” sample,
reference sample(s) and a sample for
system factor calibration.
Select workspace.
“Unknown” sample, reference sample(s) and
sample for system factor calibration must be
available at the same time in the SEM
chamber.
2 Calibrate the system factor. For details see section 5.10. Do not change
microscope parameters afterwards.
3
Select the or
workspace.
4 Move the reference sample into
analytical position and
a
spectrum.
Follow 5.7 to acquire a spectrum. Use
automatic spectrum numbering or rename
spectrum after acquisition.
5
Click at the button and
select
Load…
Load a quantification method.
6 Set
Method mode
to Interactive ( ).
7
Click .
The QUANTIFICATION dialog opens.
Set quantification parameters (Element ID,
EDS background, Deconvolution) as needed.
8
Click .
EDIT STANDARD PROPERTIES dialog opens
9 Enter reference concentrations and click
.
NOTE: The reference values are
TEMPORARILY stored until the ESPRIT
software is closed. They will not be added
into the standards library. For advanced
standard-based quantification options see
section 5.12.4.
10 The VALIDATION dialog pops up. Close
it with .
11
Click to close the
QUANTIFICATION dialog.
12 Repeat steps 4-11 for other reference
samples.
13 Move the “unknown” sample into the
analytical position.
Do not change any relevant microscope
settings (beam current, focus, high voltage...)
14
a spectrum.
If automatic quantification during or after
acquisition is enabled (see 5.7), the spectrum
is quantified automatically and the results
appear in the result list.